JPS62121102A - 炉処理装置 - Google Patents
炉処理装置Info
- Publication number
- JPS62121102A JPS62121102A JP26080185A JP26080185A JPS62121102A JP S62121102 A JPS62121102 A JP S62121102A JP 26080185 A JP26080185 A JP 26080185A JP 26080185 A JP26080185 A JP 26080185A JP S62121102 A JPS62121102 A JP S62121102A
- Authority
- JP
- Japan
- Prior art keywords
- transferred
- carrier
- transfer
- objects
- counting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 65
- 239000000969 carrier Substances 0.000 claims description 15
- 230000007246 mechanism Effects 0.000 abstract description 90
- 239000010453 quartz Substances 0.000 abstract description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 19
- 230000002950 deficient Effects 0.000 abstract 2
- 235000012431 wafers Nutrition 0.000 description 66
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 15
- 238000009792 diffusion process Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000002441 reversible effect Effects 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000008520 organization Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Specific Conveyance Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26080185A JPS62121102A (ja) | 1985-11-20 | 1985-11-20 | 炉処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26080185A JPS62121102A (ja) | 1985-11-20 | 1985-11-20 | 炉処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62121102A true JPS62121102A (ja) | 1987-06-02 |
| JPH0427121B2 JPH0427121B2 (esLanguage) | 1992-05-11 |
Family
ID=17352931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26080185A Granted JPS62121102A (ja) | 1985-11-20 | 1985-11-20 | 炉処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62121102A (esLanguage) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022515550A (ja) * | 2018-12-31 | 2022-02-18 | ゴルトホーファー アクチエンゲゼルシャフト | 重荷重車両 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59128125A (ja) * | 1983-01-12 | 1984-07-24 | Nec Home Electronics Ltd | ロ−ダ・アンロ−ダ |
| JPS6031410A (ja) * | 1983-07-28 | 1985-02-18 | Nippon Telegr & Teleph Corp <Ntt> | 回転式棚設備 |
| JPS6044406A (ja) * | 1983-08-17 | 1985-03-09 | Daifuku Co Ltd | 荷保管設備 |
| JPS6044404A (ja) * | 1983-08-17 | 1985-03-09 | Daifuku Co Ltd | クリ−ンル−ム内の荷保管設備 |
| JPS6044405A (ja) * | 1983-08-17 | 1985-03-09 | Daifuku Co Ltd | クリ−ンル−ム内の荷保管設備 |
| JPS6044403A (ja) * | 1983-08-17 | 1985-03-09 | Daifuku Co Ltd | クリ−ンル−ム内の荷保管設備 |
-
1985
- 1985-11-20 JP JP26080185A patent/JPS62121102A/ja active Granted
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59128125A (ja) * | 1983-01-12 | 1984-07-24 | Nec Home Electronics Ltd | ロ−ダ・アンロ−ダ |
| JPS6031410A (ja) * | 1983-07-28 | 1985-02-18 | Nippon Telegr & Teleph Corp <Ntt> | 回転式棚設備 |
| JPS6044406A (ja) * | 1983-08-17 | 1985-03-09 | Daifuku Co Ltd | 荷保管設備 |
| JPS6044404A (ja) * | 1983-08-17 | 1985-03-09 | Daifuku Co Ltd | クリ−ンル−ム内の荷保管設備 |
| JPS6044405A (ja) * | 1983-08-17 | 1985-03-09 | Daifuku Co Ltd | クリ−ンル−ム内の荷保管設備 |
| JPS6044403A (ja) * | 1983-08-17 | 1985-03-09 | Daifuku Co Ltd | クリ−ンル−ム内の荷保管設備 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022515550A (ja) * | 2018-12-31 | 2022-02-18 | ゴルトホーファー アクチエンゲゼルシャフト | 重荷重車両 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0427121B2 (esLanguage) | 1992-05-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |