JPH0426233B2 - - Google Patents
Info
- Publication number
- JPH0426233B2 JPH0426233B2 JP58197210A JP19721083A JPH0426233B2 JP H0426233 B2 JPH0426233 B2 JP H0426233B2 JP 58197210 A JP58197210 A JP 58197210A JP 19721083 A JP19721083 A JP 19721083A JP H0426233 B2 JPH0426233 B2 JP H0426233B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor laser
- layer
- integrated circuit
- substrate
- optical integrated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims description 59
- 239000004065 semiconductor Substances 0.000 claims description 55
- 239000000758 substrate Substances 0.000 claims description 24
- 238000005253 cladding Methods 0.000 claims description 23
- 239000013078 crystal Substances 0.000 claims description 6
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 5
- 238000000034 method Methods 0.000 description 8
- 238000012544 monitoring process Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000003776 cleavage reaction Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 230000010365 information processing Effects 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 230000007017 scission Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 229910002058 ternary alloy Inorganic materials 0.000 description 2
- 238000001947 vapour-phase growth Methods 0.000 description 2
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 229910002059 quaternary alloy Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/50—Transmitters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1028—Coupling to elements in the cavity, e.g. coupling to waveguides adjacent the active region, e.g. forward coupled [DFC] structures
- H01S5/1032—Coupling to elements comprising an optical axis that is not aligned with the optical axis of the active region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
- H01S5/4031—Edge-emitting structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
- H01S5/0262—Photo-diodes, e.g. transceiver devices, bidirectional devices
- H01S5/0264—Photo-diodes, e.g. transceiver devices, bidirectional devices for monitoring the laser-output
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/068—Stabilisation of laser output parameters
- H01S5/06825—Protecting the laser, e.g. during switch-on/off, detection of malfunctioning or degradation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- Signal Processing (AREA)
- Optical Integrated Circuits (AREA)
- Semiconductor Lasers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58197210A JPS6089990A (ja) | 1983-10-21 | 1983-10-21 | 光集積回路 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58197210A JPS6089990A (ja) | 1983-10-21 | 1983-10-21 | 光集積回路 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6089990A JPS6089990A (ja) | 1985-05-20 |
JPH0426233B2 true JPH0426233B2 (de) | 1992-05-06 |
Family
ID=16370652
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58197210A Granted JPS6089990A (ja) | 1983-10-21 | 1983-10-21 | 光集積回路 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6089990A (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62169389A (ja) * | 1986-01-21 | 1987-07-25 | Sharp Corp | 半導体レ−ザアレイ装置 |
JPS63222485A (ja) * | 1987-03-12 | 1988-09-16 | Kokusai Denshin Denwa Co Ltd <Kdd> | モニタ付分布帰還形半導体レ−ザ |
EP0459020B1 (de) * | 1990-05-28 | 1995-03-08 | Siemens Aktiengesellschaft | Optoelektronischer Schaltkreis |
CA2091302A1 (en) * | 1992-03-11 | 1993-09-12 | Ichiro Yoshida | Semiconductor laser and process for fabricating the same |
JPH05343809A (ja) * | 1992-06-08 | 1993-12-24 | Sumitomo Electric Ind Ltd | 半導体レーザ装置システム |
JP3595167B2 (ja) * | 1998-07-29 | 2004-12-02 | 日本オプネクスト株式会社 | 半導体発光素子およびその素子を組み込んだ半導体発光装置ならびにそれらの製造方法 |
SE528653C2 (sv) * | 2005-05-30 | 2007-01-09 | Phoxtal Comm Ab | Integrerat chip |
JP5257604B2 (ja) | 2009-01-29 | 2013-08-07 | セイコーエプソン株式会社 | 発光装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53138688A (en) * | 1977-05-06 | 1978-12-04 | Western Electric Co | Photo ic |
JPS54129904A (en) * | 1978-03-31 | 1979-10-08 | Fujitsu Ltd | Doubling system of light source |
JPS5717188A (en) * | 1980-07-04 | 1982-01-28 | Fujitsu Ltd | Semiconductor light-emitting element |
JPS5728382A (en) * | 1980-07-28 | 1982-02-16 | Toshiba Corp | Semiconductor lasre device |
-
1983
- 1983-10-21 JP JP58197210A patent/JPS6089990A/ja active Granted
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53138688A (en) * | 1977-05-06 | 1978-12-04 | Western Electric Co | Photo ic |
JPS54129904A (en) * | 1978-03-31 | 1979-10-08 | Fujitsu Ltd | Doubling system of light source |
JPS5717188A (en) * | 1980-07-04 | 1982-01-28 | Fujitsu Ltd | Semiconductor light-emitting element |
JPS5728382A (en) * | 1980-07-28 | 1982-02-16 | Toshiba Corp | Semiconductor lasre device |
Also Published As
Publication number | Publication date |
---|---|
JPS6089990A (ja) | 1985-05-20 |
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