JPH04252964A - Tester head - Google Patents

Abstract

PURPOSE:To enable the measurement of electric characteristics of an object having a highly dense and fine pattern by a method wherein a plurality of small protrusions are arranged and press-contacted on an electrode part to be measured to be connected thereto electrically at numerous points. CONSTITUTION:A conductive protrusion part 121 is arranged having a plurality of small protrusions on an end face surface of an electrconductive pattern 120. An inspector is made up of a contact section 310 in which a liquid crystal display 200 aligns a tester head 100 to get an electrode part 210 of the display 200 press-contacted on the protrusion part 121 of the head 100 and an inspection unit to perform an inspection of the display 200, a control part and the like. Then, when the protrusion part 121 of the head 100 press-contacts on the electrode part 210 of the display 200, the head 100 is connected to the inspection unit to measure electric characteristics. Thus, improved contact with the protrusion part 121 enables the measurement of a highly dense and fine pattern.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a tester head, and more particularly to a tester head used for electrically checking a high-density mounting pattern such as a pattern on a face-mount type substrate to which an LSI chip is directly bonded.

0002

[Prior Art] In recent years, chips such as LSI have been packaged with high density.
As miniaturization progresses, electrode portions also tend to become smaller and more numerous. Such chips are often directly mounted on a substrate using a face bonding method. As the density and miniaturization of chips such as LSIs have increased, the density and miniaturization of the substrates on which these chips are face-mounted have also progressed. Therefore, it is necessary to check the wiring pattern of the board before bonding the chip. Such a check is performed by connecting the board as the object to be measured and the object to be measured (tester) using a probe card 800 as shown in FIG. This probe card includes a substrate 810 in which an opening 820 is formed.
and a plurality of probes 830 attached radially to the opening 820, and the tip of the probe 830, which is bent into a hook shape, is brought into pressure contact with the electrode part of the object to be measured, thereby connecting the object to be measured and the measuring device. (For example, see Japanese Unexamined Patent Publication No. 119544/1983).

0003

[Problems to be Solved by the Invention] However, as wiring patterns become denser, finer, and more complex, it is becoming difficult to perform checks using the probe card as described above.

SUMMARY OF THE INVENTION An object of the present invention is to provide a tester head that can measure the electrical characteristics of an object even if it has a higher density and finer pattern.

[0005]

[Means for Solving the Problems] The tester head of the present invention is characterized in that the conductive protrusion that is pressed into contact with the electrode portion of the object to be measured has a plurality of small protrusions.

[0006]

[Operation] When the conductive protrusion is pressed into contact with the electrode part of the object to be measured, the electrode part and the tester head are electrically connected at multiple points by the plurality of small protrusions of the conductive protrusion.

[0007]

EXAMPLES The present invention will be explained below by way of examples with reference to the drawings. FIG. 1 is a schematic partially cutaway perspective view of a tester head according to an embodiment of the present invention, FIG. 2 is a side view of this tester head, and FIG. 3 shows how various electrical characteristics are measured using this tester head. FIG. Note that in this embodiment, the liquid crystal display 200 is taken as an example of the object to be measured.

The tester head 100 according to this embodiment has the following features:
It is used to measure various electrical characteristics of the liquid crystal display 200, and the electrode part 2 of the liquid crystal display 200
10, and a predetermined conductive pattern 120 is formed on the back surface 111 of the flexible film 110. A plurality of small protrusions (FIG. 2(b)) or conductive protrusions 121 having conductive beads 122 adhered to the surface (FIG. 2(a)) protrude from the surface 112. A predetermined conductive pattern 120 is formed on the back surface 111 of the flexible film 110 made of a flexible material such as a polyimide film by etching or the like. This conductive pattern 120 is connected to the liquid crystal display 2
00.

At the end of the conductive pattern 120, a conductive protrusion 121 having a plurality of small protrusions on a surface having a smaller diameter than the opening 113 is formed. Therefore, the conductive protrusion 121 connects the flexible film 11 through the opening 113.
0 protrudes toward the surface 112 side. This conductive protrusion 1
21 is pressed against the electrode section 210 of the liquid crystal display 200. This conductive protrusion 121 is connected to the opening 113.
The conductive pattern 120 is formed by plating and laminating the ends of the conductive pattern 120 through the conductive pattern 120.

Next, tester head 10 according to this embodiment
Measurement of various electrical characteristics of the liquid crystal display 200 using 0 will be explained with reference to FIG. As shown in FIG. 3, the inspection device aligns the liquid crystal display 200 and the tester head 100, and
A contact section 310 that makes pressure contact between the electrode section 210 of the tester head 100 and the conductive protrusion section 121 of the tester head 100, an inspection unit (not shown) that inspects the liquid crystal display 200, and a control section (not shown) that controls the entire inspection apparatus. (not shown), etc.

The contact portion 310 includes a plate 311 that presses the tester head 100 against the liquid crystal display 200 from the back side, and a conductive protrusion that is interposed between the plate 311 and the tester head 100 to disperse the pressing force. A connector 31 connects the pressurized rubber 312 that transmits the information to the test unit 121 and the tester head 100 of the inspection unit 320.
4 and a wiring board 313.

That is, the conductive protrusion 121 of the tester head 100 is connected to the electrode portion 210 of the liquid crystal display 200.
By simply pressing the tester head 100 into the inspection unit 320, various electrical characteristics can be measured.

[0013] The present invention is used in the above-described tester head to enable measurement of objects having higher density and finer patterns. As a further example, the performance of the tester head is improved by forming a plurality of small protrusions on the conductive protrusion of the tester head as shown below.

FIG. 4 is a schematic perspective view of a tester head without an opening. Tester head 400 according to this embodiment
This is also used to measure various electrical characteristics of the liquid crystal display 200, and includes a conductive protrusion 4 that is pressed into contact with an electrode portion (electrical terminal) 210 of the liquid crystal display 200.
21 is formed on the surface 41 with a conductive pattern 420 formed at the end.
The flexible film 410 shown in FIG. A predetermined conductive pattern 420 is formed on the surface of a flexible film 410 made of a flexible material such as a polyimide film.
is formed. This conductive pattern 420 is set according to the liquid crystal display 200. A hemispherical conductive protrusion 421 is formed at an end of the conductive pattern 420 . Note that the conductive protrusion 421 is not limited to the semicircular shape shown in FIG. 4, but may be, for example, thin cylindrical.

The tester head according to this embodiment is easy to manufacture because it has a conductive pattern formed on the surface of a flexible film having conductive protrusions that are pressed into contact with the electrodes of the object to be measured. .

FIG. 5 shows a conductive protrusion 12 on the back surface 111 side.
1 is a schematic partially cutaway perspective view of a tester head in which a pressurizing protrusion 122 is formed. flexible film 1
On the rear surface 111 side of 10, there is a pressurizing projection 122 having a diameter larger than that of the conductive projection 121 and the opening 113.
is formed. This pressurizing projection 122 is formed to close the opening 113 from the back surface 111 side. This pressurizing projection 122 is also connected to the conductive projection 12.
Similar to 1, it is formed by laminating plating. Therefore, the conductive protrusion 121 and the pressurizing protrusion 122 are integrally formed. Note that the tester head 5 according to this embodiment
Measurement of various electrical characteristics of the liquid crystal display 200 using 00 is performed in the same manner as in the previous embodiment. At that time, the conductive protrusion 121 is connected to the electrode section 210 of the liquid crystal display 200.
When pressed, the pressurizing protrusion 122 bites into the pressurizing rubber 312, and the pressing force from the plate 311 is reliably transmitted to the conductive protrusion 121. That is, the conductive protrusion 121 is reliably brought into contact with the electrode section 210 with a predetermined pressure contact force.

Note that in this embodiment, the conductive protrusion 12
1 and the pressurizing protrusion 122 have been described as having a substantially hemispherical shape, but the present invention is not limited to this. Even with other shapes, the conductive protrusion 121 protrudes from the front surface 112 of the flexible film 110, and the pressure protrusion 122 protrudes from the back surface 112.
It is sufficient if it sticks out from 11.

The tester head according to this embodiment is a tester head used for measuring various electrical characteristics of an object to be measured, and has an opening corresponding to the electrode part of the object to be measured, and an opening on the back side. It is made of a flexible film on which a predetermined conductive pattern is formed, a conductive protrusion protrudes from the end of the conductive pattern to the front surface through the opening, and a pressing protrusion is formed on the back surface. In addition, it is possible to inspect an object to be measured having a higher density and finer electrode portion, and it is also possible to bring the electrode portion of the object to be measured and the conductive protrusion into contact with a predetermined pressing force. Therefore,
Electrical characteristics can be measured more reliably.

FIG. 6 is a schematic partially cutaway perspective view of a tester head in which the through hole is formed such that the opening diameter on the front side of the substrate is larger than the opening diameter on the back side of the substrate and has a stepped cross section. , FIG. 7 is a side view of this tester head.

The tester head 600 according to this embodiment has the following features:
It is used to measure various electrical characteristics of the liquid crystal display 200, and the electrode part 2 of the liquid crystal display 200
It is made of a flexible film 110 in which openings 113 are opened in two stages corresponding to 10, and a predetermined conductive pattern 120 is formed on the back surface 111. A semicircular conductive protrusion 121 protrudes from the surface. Furthermore, opening 1
Although the explanation has been made by opening 13 in two stages, the present invention is not limited to this. Even if the conductive protrusion 121 has another shape,
It is sufficient if the bottom part has a smaller diameter than the head part.

[0021] The tester head according to this embodiment is a tester head used for measuring various electrical properties of an object to be measured, and is made of a flexible film on which a predetermined conductive pattern is formed on the back surface. In a tester head in which a conductive protrusion protrudes from the edge of the pattern to the surface through an opening corresponding to the electrode part of the object to be measured, the conductive protrusion protrudes from the opening in two stages. The bottom part is insulated except for the conductive pattern. Therefore, a conductive pattern can be formed regardless of the shape of the conductive protrusions, and an object to be measured having a high density and minute electrode part can be inspected. Contact can be made with a predetermined pressure contact force. Therefore, electrical characteristics can be measured more reliably.

[0022]

According to the present invention, when the conductive protrusions are pressed together, the number of surfaces that come into contact with them increases, and the contact area increases. If several of the many protrusions come into contact, electrical characteristics can be measured. Further, even if the heights of the respective protrusions vary, it is sufficient that the protrusions are in contact with each other, so that the contact pressure can be made uniform. It has various advantages, such as being able to measure various electrical characteristics even if there is dirt or dust, if only a few of the many protrusions come into contact.

[0023] Therefore, in a tester head provided with conductive protrusions for testing a measurement object having a high-density and fine electrode part, it is desirable to improve the contact state of the conductive protrusions with the measurement electrode part. This makes it possible to measure more dense and fine patterns.

[Brief explanation of the drawing]

FIG. 1 is a schematic partially cutaway perspective view of a tester head according to an embodiment of the present invention.

FIG. 2 is a side view of the tester head.

FIG. 3 is a schematic explanatory diagram showing how various electrical characteristics are measured using the tester head.

FIG. 4 is a schematic perspective view of a tester head without an opening.

FIG. 5 is a schematic partially cutaway perspective view of a tester head having a pressure projection.

FIG. 6 is a schematic, partially cutaway perspective view of a tester head having an opening with a stepped cross section.

FIG. 7 is a side view of the above tester head.

FIG. 8 is a perspective view of a conventional probe card.

[Explanation of symbols]

121 Conductive protrusion 122 Conductive beads

Claims (1)

[Claims] 1. A tester head characterized in that the conductive protrusion that is pressed into contact with the electrode part of the object to be measured has a plurality of small protrusions.