JPH03223677A - Tester head - Google Patents

Abstract

PURPOSE:To inspect an object to be measured having fine electrode parts in high density by uniformly bringing a projection part into contact with the electric terminal of the object to be measured under pressure through an insulating elastic plate to electrically connect the electric terminal to the output terminal of a tester. CONSTITUTION:A test head 100 is composed of a flexible film 110 having the conductive pattern 120, which has a conductive projection part 121 formed to the end part thereof, on the surface 111 thereof. A semispherical conductive projection part 121 is formed to the end part of the conductive pattern 120. An inspection apparatus 300 has a contact part 310 aligning a liquid crystal display 200 with a tester head 100 under pressure. Only by bringing the conductive projection part 121 of the tester head 100 into contact with the electrode part 210 of the liquid crystal display 200 under pressure, the tester head 100 is connected to an inspection unit 320 to measure electrical characteristics.

Description

DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to a tester head, particularly for electrical checking of high-density mounting patterns such as patterns of face-mount type substrates to which LSI chips are directly bonded. This invention relates to a tester head used for.

(b) Conventional technology In recent years, chips such as LSI have become more densely packaged and miniaturized.
There is a trend of miniaturization and increase in electrode parts. Such chips are often directly mounted on a substrate using a face bonding method.

As the density and miniaturization of chips such as LSIs have increased, the density and miniaturization of the substrates on which these chips are face-mounted have also progressed. Therefore, it is necessary to check the wiring pattern on the board before bonding the chip.

Such a check is performed by connecting the substrate, which is the object to be measured, to a measuring device (tester) using a probe card 400 as shown in FIG. This probe card is
A substrate 410 in which an opening 420 is formed, and the opening 420
The object to be measured and the measuring device are connected by pressing the tip of the probe 430, which is bent into a hook shape, to the electrode part of the object to be measured. It is configured in (
For example, see Japanese Unexamined Patent Publication No. 119544/1983).

(c) Problems to be Solved by the Invention However, with the increasing density, miniaturization, and miniaturization of wiring patterns, it has become difficult to check using the probe card as described above.

The present invention provides a tester head that can measure the electrical characteristics of an object even if it has a higher density and finer pattern.

(d) Means for Solving the Problems The present invention includes a flexi-no-pleu substrate, a plurality of conductive protrusions provided on the substrate and arranged at positions corresponding to a plurality of electrical terminals of a test object, Each it! is provided on the substrate and one end of each is electrically connected to the protrusion! ! and a conductive pattern whose end is connected to the output terminal of the tester, and by uniformly press-contacting the protrusion to the electrical terminal of the test object through an insulating elastic plate, the electrical terminal and the tester are The tester head to which the output terminal is electrically connected is t1! This is what we provide.

A flexible insulating board has a plurality of openings corresponding to the positions of the electrical terminals of the test object, a conductive pattern is formed on the back side of the board, and the bottom of the conductive protrusion is connected to the conductive pattern on the back side of the board. In addition, it is preferable that the tip of the conductive protrusion protrudes onto the substrate surface through the opening.

The bottom surface of the conductive protrusion may include a pressurizing protrusion.

Furthermore, the through hole is formed such that the opening diameter on the front side of the substrate is larger than the opening diameter on the back side of the substrate, and has a step-like cross section, and the conductive pattern is formed regardless of the shape of the conductive protrusion. .

(e) Function: By simply pressing the conductive protrusion of the tester head against the electrical terminal of the test object, the tester head is connected to the tester and the electrical characteristics can be measured.

(F) Examples The present invention will be described below with reference to first to fourth examples shown in the drawings.

[First Embodiment] FIG. 1 is a schematic perspective view of a tester head according to a first embodiment of the present invention, and FIG. 2 is a schematic diagram showing how electrical characteristics are measured using this tester head. FIG. 3 is a schematic front view of the entire measuring device, and FIG. 4 is a perspective view of a conductive protrusion of a tester head according to a modification of this embodiment. In this embodiment, the liquid crystal display 200 is taken as an example of the measurement (test) object.

The tester head 100 according to the present embodiment is used to measure the electrical characteristics of a liquid crystal display 200, and includes a conductive protrusion 121 that is pressed into contact with an electrode portion (electrical terminal) 21O of the liquid crystal display 200. It consists of a flexible film 110 having a conductive pattern 120 formed on the end thereof on its surface I11. Flexible film 110 made of a flexible material such as polyimide film
A predetermined conductive pattern 120 is formed on the surface. This conductive pattern 120 is a liquid crystal display 20
Set according to 0.

At the end of the conductive pattern 120, there is a semicircular conductive protrusion! 21 is formed. This conductive protrusion 12
1 is pressed against the electrode section 210 of the liquid crystal display 200. This conductive protrusion +2+ is formed by etching a copper foil formed on the surface 111 of the flexible film +10 or by laminating copper plating onto the surface ill of the flexible film 110. Of course, the conductive pattern 120 is also formed at the same time.

Next, measurement of the electrical characteristics of the liquid crystal display 200 using the tester head 100 according to this embodiment will be explained with reference to FIGS. 2 and 3.

As shown in FIG. 3, the inspection device 300 includes a contact section 310 that aligns the liquid crystal display 200 and the tester head 100 and presses the electrode section 210 of the liquid crystal display 200 and the conductive protrusion 12+ of the tester head 100; It is composed of an inspection unit (tester) 320 that inspects the liquid crystal display (noise 200), a control section 330 that controls the entire inspection apparatus 300, and the like.

The contact portion 310 is used to press the desk head 100 against the liquid crystal display 200 from the back side.
・311, this plate 311 and tester head 10
The conductive protrusion 1 is interposed between the conductive protrusion 1 and the
2+, a fork 314 and a wiring board 313 that connect the inspection unit (tester') 320 and the tester head +00.

That is, simply by pressing the conductive protrusion 121 of the tester head 100 against the electrode section 210 of the liquid crystal display 200, the tester head 100 is connected to the inspection unit 320 and the electrical characteristics are measured.

Incidentally, the conductive protrusion +21 is not limited to the semicircular shape as shown in FIG. 1, but may be, for example, in the shape of a thin column as shown in FIG. 4.

The tester head according to this embodiment is capable of measuring 1i of the object to be measured.
Since a conductive pattern having a conductive protrusion that is pressed against the ti portion is formed on the surface of the flexible film,
It is possible to inspect objects to be measured that have higher density and finer electrode parts.

[Second Embodiment] FIG. 6 is a schematic partially cutaway perspective view of a tester head according to a second embodiment of the present invention, and FIG. 7 shows a conductive protrusion of a modified tester head of this embodiment. FIG. Note that in this embodiment, the display 200 is used as an example of the object to be measured, similar to the above-described embodiments.

The tester head 100 according to the present embodiment is used to measure the electrical characteristics of a liquid crystal display 200, and has an opening 113 corresponding to the electrode section 210 of the liquid crystal display 200, and an opening 113 on the back side ill. Flexible film 1 on which a predetermined conductive pattern 120 is formed
10, and a conductive protrusion 121 extends from the end of the conductive pattern 120 through the writing opening 113 to the surface 112.
It stands out.

The back surface 1 of a flexible film 110 made of a flexible material such as polyimide film. A predetermined conductive pattern 120 is formed on l l.

This conductive pattern 1.20 is a liquid crystal display 200.
It will be set accordingly. In addition, the flexible film +1
0, a circular opening 113 is opened. This opening 113 corresponds to the electrode section 210 of the liquid crystal display 200 and also corresponds to the end of the conductive pattern +20.

A hemispherical conductive protrusion 121 is formed at an end of the conductive pattern 120 . Therefore, the conductive protrusion +21 is connected to the flexible film through the opening 113! 10
protrudes toward the surface 112 side. This conductive protrusion +2
1 is pressed against the electrode section 210 of the liquid crystal display 200. This conductive protrusion +21 is formed by plating the end of the conductive pattern 120 through the opening 113.

Note that the measurement of the electrical characteristics of the liquid crystal display 200 using the tester head 100 according to this embodiment is performed in the same manner as in the first embodiment.

Although the conductive protrusion 121 has been described as having a semicircular spherical shape, the present invention is not limited to this. For example, even if the flexible film 110 is formed into a trapezoidal shape as shown in FIG.
It only needs to protrude to the 2nd side.

The tester head according to this embodiment is a tester head used for measuring the electrical characteristics of an object to be measured.
It is made of a flexible film with an opening corresponding to the electrode part of the object to be measured and a predetermined conductive pattern formed on the back surface, and a conductive protrusion is formed from the end of the conductive pattern through the opening. The conductive protrusion protrudes from the surface, and the conductive protrusion is pressed against the electrode part of the object to be measured to connect the measuring device and the object to be measured. The object to be measured can be inspected.

[Third Embodiment] FIG. 8 is a schematic partially cutaway perspective view of a tester head according to an embodiment of the present invention, and FIG. 9 is a side view of this tester head. Note that in this embodiment, the liquid crystal display 200 is used as an example of the object to be measured, similar to the above-described embodiments.

The tester head 100 according to this embodiment is used to measure the electrical characteristics of a liquid crystal display 200, and has an opening 113 corresponding to the electrode section 210 of the liquid crystal display 200, and has an opening 113 formed on the back surface 21. Flexible film +1 on which a predetermined conductive pattern 120 is formed
From the end of the conductive pattern 120, a semicircular conductive protrusion +21 protrudes to the front surface l12 through the opening l13, and a pressure protrusion 1 is formed on the back surface Ill.
22 is formed.

A predetermined conductive pattern 120 is formed by etching or the like on the back surface ill of the flexible film +10 made of a flexible material such as a polyimide film. This conductive pattern 120 is a liquid crystal display 200.
It will be set accordingly.

The flexible film 110 also includes a shade opening 1.
13 have been established. This opening 113 corresponds to the X-pole portion 210 of the liquid crystal display 200, and also corresponds to the end portion of the conductive pattern 120.

A semispherical conductive protrusion 121 having a smaller diameter than the opening 113 is formed at the end of the conductive pattern 120 . Therefore, the conductive protrusion 121 protrudes through the opening 113 toward the surface 112 of the flexible film 110. This conductive protrusion 121 forms the liquid crystal display 200.
The electrode portion 21O is pressed into contact with the electrode portion 21O. This conductive protrusion 121 is formed by plating and laminating the end of the conductive pattern 120 through the opening +13.

Further, on the rear surface lll side of the flexible film 110, a pressurizing projection +22 having a diameter larger than that of the conductive projection +21 and the opening 113 and having a substantially semicircular shape is formed. This pressurizing projection 122 is formed to close the opening 113 from the rear surface Ill side. This pressurizing projection 122 is also formed by laminating plating like the conductive projection 121. Therefore, the conductive protrusion +21 and the pressing protrusion [22] are integrally formed.

Note that the measurement of various electrical characteristics of the liquid crystal display 200 using the tester head 100 according to this embodiment is performed in the same manner as in the previous embodiment. At that time, when the conductive protrusion 12+ is pressed against the electrode part 210 of the liquid crystal display 200,
The pressurizing protrusion 122 bites into the pressurizing rubber 312 to ensure that the pressing force from the plate 311 is applied to the conductive protrusion 121.
is transmitted to. That is, the conductive protrusion 121 is reliably brought into contact with the electrode section 210 with a predetermined pressure contact force.

In this embodiment, the conductive protrusion 121 and the pressurizing protrusion 122 are described as having a substantially hemispherical shape, but they are not limited to this. Other shapes may be used as long as the conductive protrusion 121 protrudes from the front surface 112 of the flexible film 110 and the pressure protrusion 122 protrudes from the back surface III.

The tester head according to this embodiment is a tester head used for measuring various electrical characteristics of an object to be measured, and includes:
It is made of a flexible film with an opening corresponding to the electrode part of the object to be measured and a predetermined conductive pattern formed on the back side, and a conductive protrusion is formed from the end of the conductive pattern through the opening. Since the part protrudes from the front surface and the pressurizing protrusion is formed on the back surface, it is possible to inspect the object to be measured which has a higher density and finer electrode part, and the il of the object to be measured can be inspected. The pole part and the conductive protrusion can be brought into contact with a predetermined pressing force. Therefore, electrical characteristics can be measured more reliably.

[Fourth Embodiment] FIG. 10 is a schematic partially cutaway perspective view of a tester head according to a fourth embodiment of the present invention, and FIG. 11 is a side view of this tester head. Note that in this embodiment, the liquid crystal display 200 is used as an example of the object to be measured, similar to the above-described embodiments.

The tester head +00 according to this embodiment is used to measure the electrical characteristics of the liquid crystal display 200, and the openings 113 are opened in two stages corresponding to the electrode portions 210 of the liquid crystal display 200. To Otsu, back side 1
It consists of a flexible film 110 on which a predetermined conductive pattern 120 is formed, and from the end of the conductive pattern 120, a semicircular conductive protrusion 121 protrudes to the surface through the opening 113.

A predetermined conductive pattern 120 is formed on the back surface Ill of a flexible film 110 made of a flexible material such as a polyimide film by etching or the like. This conductive pattern 120 is set according to the liquid crystal display 200. In addition, the flexible film 110 includes:
Two circular openings 113 are provided. This opening 1
1.3 corresponds to the electrode section 210 of the liquid crystal display 200 and also corresponds to the end of the conductive pattern +20.

A hemispherical conductive protrusion 121 having a smaller diameter than the opening +13 is formed at the end of the conductive pattern 120. Therefore, the conductive protrusion +21 is connected to the flexible film through the opening +13! The surface of 10 [projects toward the 12 side]. This conductive protrusion +21 is the liquid crystal display 200.
The electrode portion 210 is pressed into contact with the electrode portion 210 of The conductive protrusion 121 is formed by plating the end of the conductive pattern 120 through the opening 113.

Tester head according to this example! Measurement of the electrical characteristics of the liquid crystal display 200 using 00 is performed in the same manner as in the previous embodiment.

That is, just by pressing the conductive protrusion 121 of the tester head lOO onto the electrode part 210 of the liquid crystal display 200, the tester head is ready! 00 is connected to a test unit to measure electrical characteristics.

In the above-described embodiment, the conductive protrusion 12 was described as having a substantially semicircular spherical shape, but the present invention is not limited to this. Even if it has other shapes, the conductive protrusion 12"
It is only necessary that the surface 112 of the flexible film 110 protrude from the surface 112 of the flexible film 110.

Further, in the above-described embodiment, the openings 11.3 are opened in two stages, but the present invention is not limited to this. Other shapes may be used as long as the bottom of the conductive protrusion 121 has a smaller diameter than the head.

The tester head according to this embodiment is a tester head used for measuring the electrical characteristics of an object to be measured, and includes:
It is made of a flexible film with a predetermined conductive pattern formed on its back surface, and conductive protrusions protrude from the ends of the conductive pattern to the surface through openings made corresponding to the electrodes of the object to be measured. In this tester head, since the opening is opened in two stages, the bottom of the conductive protrusion is disconnected except for the conductive pattern. Therefore, a conductive pattern can be formed regardless of the shape of the conductive protrusions, and an object to be measured having a high density and minute electrode part can be inspected. can be brought into contact with a predetermined pressing force. Therefore, electrical characteristics can be measured more reliably.

(G) Effects of the Invention According to the present invention, it is possible to provide a tester head that can be extremely easily and reliably connected to a test object having high-density and minute electrical terminals.

[Brief explanation of drawings]

FIG. 1 is a schematic perspective view of a tester head according to a first embodiment of the present invention, FIG. 2 is a schematic explanatory diagram showing how electrical characteristics are measured using this tester head, and FIG. 4 is a schematic front view of the entire measuring device, and FIG. 4 is a perspective view of the conductive protrusion of the tester head showing a modification of the first embodiment.
FIG. 5 is a perspective view of a probe used in conventional measurements. FIG. 6 is a schematic partially cutaway perspective view of a tester head according to a second embodiment of the present invention, and FIG. 7 is a cross section showing a conductive protrusion of a tester head showing a modified example of the second embodiment. 8 is a schematic partially cutaway perspective view of a tester head according to a third embodiment of the present invention, FIG. 9 is a side view of the tester head of FIG. 8, and FIG. 1O is a fourth embodiment of the tester head of the present invention. FIG. 11 is a schematic partially cutaway perspective view of the tester head according to the embodiment of FIG.
FIG. 3 is a side view of the tester head shown in FIG. 100...Tester head, 110...Flexible film, Ill...
...Surface, 120... Conductive pattern, 121.
... Conductive protrusion, 200 ... Liquid crystal display, 210 ...
...Electrode part, 1z Pl 2nd Fig.

Claims (1)

[Claims] 1. A flexible insulating substrate, a plurality of conductive protrusions provided on the substrate and arranged at positions corresponding to a plurality of electrical terminals of the test object, and each conductive protrusion provided on the substrate and a conductive pattern having one end electrically connected to the protrusion and each other end connected to an output terminal of the tester, and the protrusion is uniformly connected to the electrical terminal of the test object through an insulating elastic plate. A tester head in which the electrical terminal and the output terminal of the tester are electrically connected by pressure contact with the tester head. 2. The flexible insulating board has a plurality of through holes opened corresponding to the positions of the electrical terminals of the test object, a conductive pattern is formed on the back side of the board, and the bottom of the conductive protrusion forms a conductive pattern on the back side of the board. 2. The tester head according to claim 1, wherein the conductive protrusion has a tip end protruding from the substrate surface through the through hole. 3. The tester head according to claim 2, wherein the bottom surface of the conductive projection has a pressing projection. 4. The tester head according to claim 2, wherein the through hole is formed such that the opening diameter on the front side of the substrate is larger than the opening diameter on the back side of the substrate, and has a stepped cross section.