JPH0425203B2 - - Google Patents

Info

Publication number
JPH0425203B2
JPH0425203B2 JP60219131A JP21913185A JPH0425203B2 JP H0425203 B2 JPH0425203 B2 JP H0425203B2 JP 60219131 A JP60219131 A JP 60219131A JP 21913185 A JP21913185 A JP 21913185A JP H0425203 B2 JPH0425203 B2 JP H0425203B2
Authority
JP
Japan
Prior art keywords
chamber
gas
synthesis
silicon nitride
pressure chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60219131A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6283307A (ja
Inventor
Masaaki Mori
Sho Sano
Jushi Horiuchi
Yoshihiro Okumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP21913185A priority Critical patent/JPS6283307A/ja
Priority to US06/838,566 priority patent/US4640023A/en
Priority to DE19863608972 priority patent/DE3608972A1/de
Publication of JPS6283307A publication Critical patent/JPS6283307A/ja
Publication of JPH0425203B2 publication Critical patent/JPH0425203B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
JP21913185A 1985-07-05 1985-10-03 窒化ケイ素粉末の製造装置 Granted JPS6283307A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP21913185A JPS6283307A (ja) 1985-10-03 1985-10-03 窒化ケイ素粉末の製造装置
US06/838,566 US4640023A (en) 1985-07-05 1986-03-11 Apparatus for manufacturing powdered silicon nitride
DE19863608972 DE3608972A1 (de) 1985-07-05 1986-03-18 Vorrichtung zur herstellung pulverisierten siliciumnitrids

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21913185A JPS6283307A (ja) 1985-10-03 1985-10-03 窒化ケイ素粉末の製造装置

Publications (2)

Publication Number Publication Date
JPS6283307A JPS6283307A (ja) 1987-04-16
JPH0425203B2 true JPH0425203B2 (en:Method) 1992-04-30

Family

ID=16730722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21913185A Granted JPS6283307A (ja) 1985-07-05 1985-10-03 窒化ケイ素粉末の製造装置

Country Status (1)

Country Link
JP (1) JPS6283307A (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0638911B2 (ja) * 1986-03-08 1994-05-25 日本セメント株式会社 非酸化物粉末の製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5731051Y2 (en:Method) * 1978-07-04 1982-07-08
JPS5891012A (ja) * 1981-11-25 1983-05-30 Toshiba Ceramics Co Ltd 窒化珪素粉末の製造方法及びその製造装置
JPS58151302A (ja) * 1982-03-04 1983-09-08 Nippon Mining Co Ltd 流動塩化装置
JPS5945912A (ja) * 1982-09-02 1984-03-15 Kawasaki Steel Corp サイアロン系物質の連続製造法

Also Published As

Publication number Publication date
JPS6283307A (ja) 1987-04-16

Similar Documents

Publication Publication Date Title
JP3763104B2 (ja) テトラクロロシランの水素添加法
US5032365A (en) Reaction apparatus
US4106556A (en) Ceramic tube recuperators
JP2508287B2 (ja) 反応装置
JPH0425203B2 (en:Method)
US4269266A (en) Recuperator tube construction
US4837423A (en) Low temperature kiln
WO2001069155A3 (en) Regenerative heat exchanger and method for heating a gas therewith
JPS63127072A (ja) 高温真空炉
JPH06501302A (ja) ライニング
EP0401172B1 (en) A heating mantle with a porous radiation wall
JPH0323833B2 (en:Method)
JPH0526091B2 (en:Method)
JP2819049B2 (ja) 水蒸気改質装置
JPH0112159Y2 (en:Method)
JP7361007B2 (ja) ラジアントチューブバーナ
JP2873392B2 (ja) ラジアントチューブバーナー
JPH0252538B2 (en:Method)
JPH10318681A (ja) 断熱カバーおよび熱処理炉
AKHTYAMOV HEAT-RESISTANT VERMICULITE MATERIAL FOR WALLS OF HIGH-TEMPERATURE HEAT GENERATING UNITS
JP2532102B2 (ja) 外熱式ロ−タリキルン
SU1553811A1 (ru) Фасонный кирпич и футеровка печи с внутренней рекуперацией
JPH0532531Y2 (en:Method)
JP2847543B2 (ja) 雰囲気熱処理炉
JPH01315332A (ja) 反応装置

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term