JPH04245484A - 圧力センサ - Google Patents

圧力センサ

Info

Publication number
JPH04245484A
JPH04245484A JP22559891A JP22559891A JPH04245484A JP H04245484 A JPH04245484 A JP H04245484A JP 22559891 A JP22559891 A JP 22559891A JP 22559891 A JP22559891 A JP 22559891A JP H04245484 A JPH04245484 A JP H04245484A
Authority
JP
Japan
Prior art keywords
cavity
sensor
silicon
pressure sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22559891A
Other languages
English (en)
Japanese (ja)
Inventor
Jiri Marek
イーリィ　マレク
Dieter Seipler
ザイプラー ディーター
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of JPH04245484A publication Critical patent/JPH04245484A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
JP22559891A 1990-09-07 1991-09-05 圧力センサ Pending JPH04245484A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19904028402 DE4028402A1 (de) 1990-09-07 1990-09-07 Drucksensor
DE4028402.6 1990-09-07

Publications (1)

Publication Number Publication Date
JPH04245484A true JPH04245484A (ja) 1992-09-02

Family

ID=6413792

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22559891A Pending JPH04245484A (ja) 1990-09-07 1991-09-05 圧力センサ

Country Status (3)

Country Link
JP (1) JPH04245484A (de)
DE (1) DE4028402A1 (de)
GB (1) GB2247953A (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10043630A1 (de) * 2000-09-01 2002-03-14 Endress Hauser Gmbh Co Druckmeßzelle
EP1470405A1 (de) * 2002-01-30 2004-10-27 Honeywell International Inc. Mikromechanischer silizium-absolutdrucksensor mit rückseitiger hermetischer kappe und herstellungverfahren hierfür
DE102004058877A1 (de) * 2004-12-06 2006-04-13 Infineon Technologies Ag Halbleiterchip und Verfahren zum Herstellen eines doppelseitig funktionellen Halbleiterchips
CN101715600B (zh) 2007-05-29 2013-02-06 诺格伦有限责任公司 具有集成隔膜和开关的压力开关
CN102967394A (zh) * 2012-09-15 2013-03-13 华东光电集成器件研究所 对称电容式压力传感器及其制备方法
WO2021112269A1 (ko) * 2019-12-02 2021-06-10 (주)에어박스 에어 센서

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI74350C (fi) * 1984-02-21 1988-01-11 Vaisala Oy Kapacitiv absoluttryckgivare.
FI84401C (fi) * 1987-05-08 1991-11-25 Vaisala Oy Kapacitiv tryckgivarkonstruktion.
EP0339981A3 (de) * 1988-04-29 1991-10-09 Schlumberger Industries, Inc. Geschichteter Halbleitersensor mit Überdruckschutz

Also Published As

Publication number Publication date
GB9117531D0 (en) 1991-10-02
GB2247953A (en) 1992-03-18
DE4028402A1 (de) 1992-03-12

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