GB9117531D0 - Pressure sensor - Google Patents

Pressure sensor

Info

Publication number
GB9117531D0
GB9117531D0 GB919117531A GB9117531A GB9117531D0 GB 9117531 D0 GB9117531 D0 GB 9117531D0 GB 919117531 A GB919117531 A GB 919117531A GB 9117531 A GB9117531 A GB 9117531A GB 9117531 D0 GB9117531 D0 GB 9117531D0
Authority
GB
United Kingdom
Prior art keywords
pressure sensor
sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB919117531A
Other versions
GB2247953A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of GB9117531D0 publication Critical patent/GB9117531D0/en
Publication of GB2247953A publication Critical patent/GB2247953A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
GB9117531A 1990-09-07 1991-08-14 Pressure sensor Withdrawn GB2247953A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19904028402 DE4028402A1 (en) 1990-09-07 1990-09-07 PRESSURE SENSOR

Publications (2)

Publication Number Publication Date
GB9117531D0 true GB9117531D0 (en) 1991-10-02
GB2247953A GB2247953A (en) 1992-03-18

Family

ID=6413792

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9117531A Withdrawn GB2247953A (en) 1990-09-07 1991-08-14 Pressure sensor

Country Status (3)

Country Link
JP (1) JPH04245484A (en)
DE (1) DE4028402A1 (en)
GB (1) GB2247953A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113226494A (en) * 2019-12-02 2021-08-06 空气箱株式会社 Air sensor

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10043630A1 (en) * 2000-09-01 2002-03-14 Endress Hauser Gmbh Co pressure measuring cell
EP1470405A1 (en) * 2002-01-30 2004-10-27 Honeywell International Inc. An absolute micromachined silicon pressure sensor with backside hermetic cover and method of making the same
DE102004058877A1 (en) * 2004-12-06 2006-04-13 Infineon Technologies Ag Semiconductor chip comprises a front section with a semiconductor functional element, and a rear section
US8173918B2 (en) 2007-05-29 2012-05-08 Norgren Gmbh Pressure switch with an integrated diaphragm and switch
CN102967394A (en) * 2012-09-15 2013-03-13 华东光电集成器件研究所 Symmetrical capacitor pressure sensor and manufacture method thereof

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI74350C (en) * 1984-02-21 1988-01-11 Vaisala Oy Capacitive absolute pressure sensor.
FI84401C (en) * 1987-05-08 1991-11-25 Vaisala Oy CAPACITIVE TRYCKGIVARKONSTRUKTION.
EP0339981A3 (en) * 1988-04-29 1991-10-09 Schlumberger Industries, Inc. Laminated semiconductor sensor with overpressure protection

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113226494A (en) * 2019-12-02 2021-08-06 空气箱株式会社 Air sensor
CN113226494B (en) * 2019-12-02 2023-02-28 空气箱株式会社 Air sensor

Also Published As

Publication number Publication date
JPH04245484A (en) 1992-09-02
GB2247953A (en) 1992-03-18
DE4028402A1 (en) 1992-03-12

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)