JPH04233311A - Piezoelectric parts - Google Patents

Piezoelectric parts

Info

Publication number
JPH04233311A
JPH04233311A JP2408816A JP40881690A JPH04233311A JP H04233311 A JPH04233311 A JP H04233311A JP 2408816 A JP2408816 A JP 2408816A JP 40881690 A JP40881690 A JP 40881690A JP H04233311 A JPH04233311 A JP H04233311A
Authority
JP
Japan
Prior art keywords
intermediate stage
damping material
case member
box member
case
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2408816A
Other languages
Japanese (ja)
Other versions
JP2643605B2 (en
Inventor
Koji Nagahara
恒治 永原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP2408816A priority Critical patent/JP2643605B2/en
Publication of JPH04233311A publication Critical patent/JPH04233311A/en
Application granted granted Critical
Publication of JP2643605B2 publication Critical patent/JP2643605B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To obtain the piezoelectric parts of a structure in which a damping material does not ooze out to the adhesion surface of a casing constituted of a case member and a cover member. CONSTITUTION:On an opening side of an inner wall of a case member 2, an intermediate stage 4 is provided, and a metallic thin film 5b of silver, etc., for functioning as an electrode is formed so as to intersect this intermediate stage 4. A piezoelectric body substrate 10 is contained in a recessed part 3 of the case member 2, and thereafter, by injecting molten silicon until it reaches the intermediate stage 4, a damping material 7 is formed. In such a case, the molten silicon oozes out to the part of the metallic thin film 5b formed on the surface of the intermediate stage 4 and forms an ooze-out part 7a, as the case may be, it does not occur that it oozes out to the adhesion surface 2e of the case member 2. Thereafter, a cover member 8 is attached fixedly to the case member 2 with an adhesive agent 14 of an epoxy compound, and the piezoelectric body substrate 10 becomes a state that it is contained in a vibration space closed tightly and completely by the case member 2 and the cover member 8.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、音声IF回路や復調回
路、トラップ回路等に利用される圧電部品に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to piezoelectric components used in audio IF circuits, demodulation circuits, trap circuits, and the like.

【0002】0002

【従来の技術と課題】従来、この種の圧電部品としては
図3に示すものが知られている。ケーシング20は箱部
材21と蓋部材26とで構成され、これら箱部材21と
蓋部材26とは接着剤25を介して固着される。振動電
極を表面に設けた圧電体基板27は、この圧電体基板2
7を覆うダンピング材28と共にケーシング20に収納
されている。箱部材21の表面に形成した銀薄膜からな
る引出し電極22は、圧電体基板27の振動電極から引
き出された引出し電極に接続している。
2. Description of the Related Art Conventionally, as this type of piezoelectric component, one shown in FIG. 3 is known. The casing 20 is composed of a box member 21 and a lid member 26, and these box member 21 and lid member 26 are fixed together with an adhesive 25 interposed therebetween. This piezoelectric substrate 27 has a vibrating electrode on its surface.
It is housed in the casing 20 together with a damping material 28 covering the casing 7. An extraction electrode 22 made of a thin silver film formed on the surface of the box member 21 is connected to an extraction electrode extracted from the vibration electrode of the piezoelectric substrate 27.

【0003】以上の構成の圧電部品において、圧電体基
板27をダンピング材28で覆う場合、溶融状態のダン
ピング材を箱部材21に注入すると、ダンピング材の一
部が引出し電極22にしみ出し、しみ出し部分28aを
形成する。このしみ出し部分28aは、箱部材21の接
着面に形成されるため、箱部材21と蓋部材26との固
着が不充分なものとなる。何故なら、通常接着剤として
使用されるエポキシ樹脂系の接着剤とダンピング材(例
えば、シリコンゴム)とは相互間の接着強度が弱いから
である。
In the piezoelectric component having the above structure, when the piezoelectric substrate 27 is covered with the damping material 28, when the molten damping material is injected into the box member 21, a part of the damping material seeps into the extraction electrode 22 and stains. A protruding portion 28a is formed. Since this seeping portion 28a is formed on the adhesive surface of the box member 21, the adhesion between the box member 21 and the lid member 26 becomes insufficient. This is because the adhesive strength between the epoxy resin adhesive, which is normally used as an adhesive, and the damping material (for example, silicone rubber) is weak.

【0004】そこで、本発明の課題は、ダンピング材が
ケーシングの接着面にしみ出さない構造の圧電部品を提
供することにある。
SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a piezoelectric component having a structure in which the damping material does not seep into the adhesive surface of the casing.

【0005】[0005]

【課題を解決するための手段】以上の課題を解決するた
め、本発明に係る圧電部品は、ケーシングが箱部材と蓋
部材とで構成され、該箱部材の内壁面に中間段を設け、
この中間段の位置まで溶融状態のダンピング材を注入し
て圧電体基板を覆ったことを特徴とする。
[Means for Solving the Problems] In order to solve the above problems, a piezoelectric component according to the present invention has a casing composed of a box member and a lid member, an intermediate stage is provided on the inner wall surface of the box member,
The piezoelectric substrate is characterized in that a damping material in a molten state is injected up to this intermediate stage position to cover the piezoelectric substrate.

【0006】[0006]

【作用】以上の構成において、箱部材の内壁面に設けた
中間段によって、箱部材の接着面とダンピング材の界面
との間の沿面距離が長くなる。その結果、ダンピング材
のしみ出しが中間段の位置まで達しても、箱部材の接着
面にまで達することはなくなる。
[Operation] In the above structure, the intermediate stage provided on the inner wall surface of the box member increases the creeping distance between the adhesive surface of the box member and the interface of the damping material. As a result, even if the damping material seeps out to the middle stage, it will not reach the adhesive surface of the box member.

【0007】[0007]

【実施例】以下、本発明に係る圧電部品の一実施例を添
付図面を参照して説明する。図1は圧電部品の分解斜視
図である。絶縁性ケーシング1は箱部材2と蓋部材8と
で構成されている。箱部材2は凹部3を有し、この凹部
3の底面の両端部及び中央部に後述の圧電体基板10を
横長の状態で水平に支持する段差2a,2b,2cが設
けられている。凹部3の開口側周囲には中間段4が設け
られている。箱部材2の段差2a,2b,2cの部分に
は銀等の金属薄膜5a,5b,5cが蒸着又はスパッタ
等の方法により形成されている。これら薄膜5a〜5c
は中間段4を横切り、箱部材2の上下面及び側面に延在
している。
DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a piezoelectric component according to the present invention will be described below with reference to the accompanying drawings. FIG. 1 is an exploded perspective view of a piezoelectric component. The insulating casing 1 is composed of a box member 2 and a lid member 8. The box member 2 has a recess 3, and steps 2a, 2b, and 2c are provided at both ends and the center of the bottom of the recess 3 to horizontally support a piezoelectric substrate 10, which will be described later, in a laterally elongated state. An intermediate step 4 is provided around the opening side of the recess 3. Metal thin films 5a, 5b, 5c of silver or the like are formed on the steps 2a, 2b, 2c of the box member 2 by a method such as vapor deposition or sputtering. These thin films 5a to 5c
crosses the intermediate stage 4 and extends on the top, bottom and side surfaces of the box member 2.

【0008】圧電体基板10は、BaTiO3やPb(
ZrTi)O3等のセラミックス基板からなり、その表
裏面に振動電極12a,12b,12c,12d,12
e,12fを設けている。この圧電体基板10は、振動
電極12a,12d,12e,12fにそれぞれ接続し
ている引出し電極13a,13d,13eが、薄膜5a
,5b,5cに接続するように箱部材2に収納される。 この後、溶融状態のシリコンゴム等が箱部材2の凹部3
の中にディスペンサ法等の方法により中間段4に達する
まで注入される。 シリコンゴムは圧電体基板10の裏面にも回り込み、圧
電体基板10の振動部分を十分に覆う状態となる。この
シリコンゴムは固化してダンピング材7(図2参照)と
なる。このとき、シリコンゴムの一部は中間段4の面に
形成された金属薄膜5a,5b,5cの部分にしみ出し
、しみ出し部分7aを形成する。しかし、中間段4によ
って、箱部材2の接着面2eとダンピング材7の界面と
の相互間の沿面距離が長くなったため、ダンピング材7
のしみ出し部分7aは接着面2eにまで達しない。
The piezoelectric substrate 10 is made of BaTiO3 or Pb(
It consists of a ceramic substrate such as ZrTi)O3, and vibrating electrodes 12a, 12b, 12c, 12d, 12 are provided on the front and back surfaces of the substrate.
e and 12f are provided. This piezoelectric substrate 10 has lead electrodes 13a, 13d, 13e connected to vibrating electrodes 12a, 12d, 12e, 12f, respectively, and a thin film 5a.
, 5b, and 5c. After this, the molten silicone rubber etc. are poured into the recess 3 of the box member 2.
The liquid is injected into the middle stage 4 by a method such as a dispenser method. The silicone rubber also wraps around the back surface of the piezoelectric substrate 10, sufficiently covering the vibrating portion of the piezoelectric substrate 10. This silicone rubber solidifies and becomes a damping material 7 (see FIG. 2). At this time, a portion of the silicone rubber seeps into the metal thin films 5a, 5b, and 5c formed on the surface of the intermediate stage 4, forming a seeping portion 7a. However, due to the intermediate stage 4, the creepage distance between the adhesive surface 2e of the box member 2 and the interface of the damping material 7 is increased, so the damping material 7
The seeping portion 7a does not reach the adhesive surface 2e.

【0009】蓋部材8は、その両端部及び中央部に金属
薄膜9a,9b,9cが蒸着等の方法により形成されて
いる。この蓋部材8は圧電体基板10が収納された箱部
材2の接着面2eに載置され、箱部材2の接着面2eに
予め塗布していた接着剤14(図2参照)、例えば、エ
ポキシ系の接着剤にて箱部材2に固着される。こうして
、圧電体基板10は箱部材2と蓋部材8によって完全に
密閉された振動空間に収納された状態となる。この後、
金属薄膜5a,5b,5c,9a,9b,9cの露出部
分にめっき等の手段にて金属厚膜15(図2参照)等を
形成して完成品とする。
The lid member 8 has metal thin films 9a, 9b, and 9c formed on both ends and the center by a method such as vapor deposition. This lid member 8 is placed on the adhesive surface 2e of the box member 2 in which the piezoelectric substrate 10 is housed, and the adhesive 14 (see FIG. 2) previously applied to the adhesive surface 2e of the box member 2, such as epoxy It is fixed to the box member 2 with a type of adhesive. In this way, the piezoelectric substrate 10 is housed in a vibration space completely sealed by the box member 2 and the lid member 8. After this,
A thick metal film 15 (see FIG. 2) or the like is formed on the exposed portions of the thin metal films 5a, 5b, 5c, 9a, 9b, and 9c by means such as plating to obtain a finished product.

【0010】なお、本発明に係る圧電部品は前記実施例
に限定するものではなく、その要旨の範囲内で種々に変
形することができる。特に、中間段は箱部材の凹部の外
周全てに設ける必要はなく、金属薄膜形成部分にのみ設
けてもダンピング材の接着面へのしみ出しは防止できる
It should be noted that the piezoelectric component according to the present invention is not limited to the above-mentioned embodiments, and can be modified in various ways within the scope of the gist. In particular, it is not necessary to provide the intermediate stage on the entire outer periphery of the concave portion of the box member, and even if it is provided only on the portion where the metal thin film is formed, it is possible to prevent the damping material from seeping into the adhesive surface.

【0011】[0011]

【発明の効果】以上のように、本発明によれば、箱部材
の内壁面に中間段を設けたため、箱部材の接着面とダン
ピング材の界面との相互間の沿面距離が長くなり、ダン
ピング材がケーシングの接着面にしみ出さない構造の圧
電部品が得られる。その結果、振動空間の密閉性が高い
ものが得られる。
As described above, according to the present invention, since the intermediate stage is provided on the inner wall surface of the box member, the mutual creepage distance between the adhesive surface of the box member and the interface of the damping material is increased, and damping A piezoelectric component having a structure in which the material does not seep into the adhesive surface of the casing can be obtained. As a result, a highly sealed vibration space can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】本発明に係る圧電部品の分解斜視図。FIG. 1 is an exploded perspective view of a piezoelectric component according to the present invention.

【図2】図1のX−X’の垂直断面図。FIG. 2 is a vertical cross-sectional view taken along line X-X' in FIG. 1;

【図3】従来例を示す垂直断面図。FIG. 3 is a vertical sectional view showing a conventional example.

【符号の説明】[Explanation of symbols]

1…ケーシング 2…箱部材 2e…接着面 3…凹部 4…中間段 7…ダンピング材 7a…しみ出し部分 8…蓋部材 10…圧電体基板 12a,12b,12c,12d,12e,12f…振
動電極
1... Casing 2... Box member 2e... Adhesive surface 3... Recessed portion 4... Intermediate stage 7... Damping material 7a... Seepage portion 8... Lid member 10... Piezoelectric substrate 12a, 12b, 12c, 12d, 12e, 12f... Vibrating electrode

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】  振動電極を設けた圧電体基板と、該圧
電体基板を覆うダンピング材と、前記圧電体基板とダン
ピング材とを収納するケーシングとを備えた圧電部品に
おいて、前記ケーシングが箱部材と蓋部材とで構成され
、該箱部材の内壁面に中間段を設け、この中間段の位置
まで溶融状態の前記ダンピング材を注入して前記圧電体
基板を覆ったことを特徴とする圧電部品。
1. A piezoelectric component comprising a piezoelectric substrate provided with a vibrating electrode, a damping material covering the piezoelectric substrate, and a casing housing the piezoelectric substrate and the damping material, wherein the casing is a box member. and a lid member, an intermediate stage is provided on the inner wall surface of the box member, and the damping material in a molten state is injected up to the position of the intermediate stage to cover the piezoelectric substrate. .
JP2408816A 1990-12-28 1990-12-28 Piezo components Expired - Fee Related JP2643605B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2408816A JP2643605B2 (en) 1990-12-28 1990-12-28 Piezo components

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2408816A JP2643605B2 (en) 1990-12-28 1990-12-28 Piezo components

Publications (2)

Publication Number Publication Date
JPH04233311A true JPH04233311A (en) 1992-08-21
JP2643605B2 JP2643605B2 (en) 1997-08-20

Family

ID=18518221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2408816A Expired - Fee Related JP2643605B2 (en) 1990-12-28 1990-12-28 Piezo components

Country Status (1)

Country Link
JP (1) JP2643605B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018225351A1 (en) * 2017-06-07 2018-12-13 日立オートモティブシステムズ株式会社 Physical quantity detection device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63248211A (en) * 1987-04-03 1988-10-14 Murata Mfg Co Ltd Electronic component and its manufacture
JPS63293959A (en) * 1987-05-27 1988-11-30 Murata Mfg Co Ltd Electronic part

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63248211A (en) * 1987-04-03 1988-10-14 Murata Mfg Co Ltd Electronic component and its manufacture
JPS63293959A (en) * 1987-05-27 1988-11-30 Murata Mfg Co Ltd Electronic part

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018225351A1 (en) * 2017-06-07 2018-12-13 日立オートモティブシステムズ株式会社 Physical quantity detection device
JPWO2018225351A1 (en) * 2017-06-07 2020-01-16 日立オートモティブシステムズ株式会社 Physical quantity detector

Also Published As

Publication number Publication date
JP2643605B2 (en) 1997-08-20

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