JPS5848818Y2 - Holding container for piezoelectric vibrator - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to the structure of a holding container for a piezoelectric vibrator in which two or more pairs of excitation electrodes are arranged on the main surface of a piezoelectric plate.

The technical means of providing an excitation electrode on a piezoelectric plate is to first insert the piezoelectric plate into a separately prepared lower evaporation mask, deposit the desired metal on the lower layer using vacuum evaporation technology, and then deposit the desired metal at the desired resonance frequency. In order to achieve this, a process is commonly used in which a mask for fine adjustment deposition is prepared separately on the surface occupied by the lower deposition described above and fine adjustment deposition is performed.

In the mini, it is necessary to align the fine-tuning deposition as precisely as possible on the surface occupied by the lower-deposited excitation electrode, and the reason is that when the lower deposition and the fine-tuning deposition are disposed non-uniformly, This is because it acts on the piezoelectric vibration mode and causes spurious generation and fluctuations in the electrical constants (referring to operating capacitance, operating inductance, etc.) of the vibrator.

By the way, the alignment between the lower vapor deposition and the fine-adjustment vapor deposition is difficult during assembly, even if finished accurately (in reality, it is difficult due to variations), due to strain, mechanical stress, and Conventionally, it has been considered impossible to perform fine-adjustment vapor deposition because positional deviations often occur due to the weight of the piezoelectric plate.

An object of the present invention is to provide a holder for a piezoelectric vibrator that can solve the above problems and improve manufacturing efficiency and reliability in assembly and frequency adjustment.

In order to achieve this objective, the present invention provides a holding container that holds a piezoelectric vibrator in which two or more pairs of excitation electrodes are arranged on the main surface of a piezoelectric plate, in which a piezoelectric vibrator is provided on one main surface of the holding container. two or more through-holes provided on the other main surface of the holding container at positions facing the excitation electrode of the piezoelectric plate; and a terminal hole provided on one of the main surfaces of the holding container at a position facing the connecting end of the external terminal to the piezoelectric plate. The main component is a holding container for a piezoelectric vibrator.

Here, the piezoelectric plate is a plate formed from a piezoelectric material such as quartz, lithium niobate, lithium tantalate, and piezoelectric ceramic.

Hereinafter, the present invention will be explained in detail with reference to the drawings of embodiments.

1, 2, 3, 4, and 5 show a holding container that holds one crystal plate on which two pairs of excitation electrodes are arranged, which is an embodiment of the present invention. In the structural drawings, A in FIG. The A-A sectional view, B-B sectional view, and C-C sectional view of the opening in Figure 1, as well as the openings in Figure 5 A and 5, are taken from the back and front of the holding container, respectively. FIG. 3 is a layout diagram of excitation electrodes arranged on the main surface of a quartz plate used in this example.

The holding container 1 is made of an insulating material such as plastic, ceramic, epoxy resin, or glass, and includes the following components when molded.

The cavity 2 has an opening at the head of the holding container 1 and a crystal plate 2.
9 is a gap inserted from the main surface direction, and the crystal plate 2
The excitation electrodes 31, 32, 34, and 36 arranged on the main surface of the holding container 9 and their vicinity maintain non-contact with the inner wall of the holding container 1.

The side groove portion 3 is located inside the side surface of the holding container 1, and is located on the inside side of the holding container 1, and
This is a groove into which the peripheral edge of 9 is inserted, and has a groove width that is slightly larger than the thickness of the crystal plate 29.

The bottom portion 4 is located on the bottom surface of the cavity 2 and is a portion that comes into contact with the chamfered portion 30 of the crystal plate 29.

The recess 5 is a groove that is located on the bottom surface of the cavity 2 and maintains non-contact with the connecting end 22 of the external terminal 21 and the flexible portion 23 .

The notch 6 is a notch provided near the top of one main surface of the holding container 1, and faces a fixing reservoir 7 described below.

Note that the shape of the cut 6 is a square square shape in the embodiment, but is not limited to this, and may be any shape such as a circle or a square.

The fixing reservoir 7 is provided near the top of the other main surface of the holding container 1 facing the notch 6, and its convex portion contacts the peripheral edge of the crystal plate 29.

The true holes 8 and 9 are holes provided near the center on one main surface of the holding container 1 at positions facing the excitation electrodes 34 and 36 deposited on the crystal plate 29, respectively.

The terminal through-holes 10.11 and 12 are provided with external terminals 17.21 and 25 that are electrically and mechanically connected to the extraction electrodes 35, 33 and 37 of the crystal plate 29, respectively, near the lower end on one main surface of the holding container 1. The holes are located opposite the connecting ends 18, 22 and 26 of the.

The intermediate hole portion 13 is a hole provided near the center on the other main surface of the holding container 1 at a position opposite to the intermediate position between the true hole portions 8 and 9, and its size is the same as that of the true hole portions 8 and 9. 9
smaller than that of

The terminal through holes 14.15 and 16 are holes provided near the upper and lower ends of the other main surface of the holding container 1 at positions facing the aforementioned terminal through holes 10.11 and 12, respectively.

The vapor deposition reservoir 7 and the connection ends 18, 22 and 26 are located on the same plane and are installed without giving any distortion to the crystal plate 29.

External terminals 17, 21 and 25 are made of phosphor bronze, IJ
It is made of a spring material such as IJum copper, and is planted in the bottom wall of the holding container 1, and the aforementioned connection ends are 22 and 2, respectively.
In addition to 6, each implanted part and each connection end can be connected to buffer the force applied to the vibration of the vibrator, and to improve the vibration resistance, shock resistance, and thermal shock resistance from the outside as a whole. flexible parts 19.23 and 27 and holes 20.24 and 28 (into which the composition of the holding container 1 is stored) which can improve the mechanical strength of the implanted part. ).

The crystal plate 29 is inserted into the holding container 1 constructed in this manner as shown in the figure, and the terminal through holes 10, 11, 12°, 14.
Connecting electrodes 35.3 of the crystal plate 29 through 15 and 16
3 and 27 and the connection ends 18.22 and 26 of the external terminals 17.21 and 25 are electrically and mechanically connected by applying conductive adhesive, soldering, etc., and are connected to the head of the crystal plate 29 through the notch 6. The convex portion of the fixing reservoir 7 is fixed by applying adhesive.

Since the cross section of the fixing reservoir 7 is formed in a concave shape, even if an appropriate amount of adhesive is applied, the adhesive does not flow to the vicinity of the center of the crystal plate 29, but stays and is fixed near the periphery thereof.

Note that the connections between each connection electrode of the crystal plate 29 and each connection end of the external terminal through the terminal through-holes 14.15 and 16 are also made through the terminal through-holes 10.11 and 12. The connection here may be omitted, or may be performed in the same way if necessary.

Next, fine adjustment deposition of the crystal plate 29 is performed on the excitation electrode pair (34,
The respective resonance frequencies f due to (31) and (36, 32)
This is done to make 1 and f2 equal and to reduce the degree of coupling K, but the true hole portions 8 and 9 are
At that time, it is used as a mask for fine adjustment vapor deposition, and the desired resonance frequency is set directly above the surface occupied by the excitation electrodes 34 and 36 deposited below.

The intermediate through-hole portion 13 is used as a mask for vapor deposition to adjust the degree of coupling, and forms an intermediate electrode 39 in the middle not in contact with the excitation electrodes 31 and 32.

Each hole viewed from the cavity 2 is sealed by covering the holding container 1 with heat shrink tape, a tube, a fitting lid, etc., but it is also possible to fill the cavity 2 with an inert gas before sealing. .

FIG. 6 is an application example of the present invention, and is a structural diagram of a composite oscillator in which a plurality of crystal oscillator holding containers according to the embodiment shown above are arranged in a plane. and C are a front view, a top view, and a rear view, respectively.

It should be noted that the reference numerals used here are the same or similar components shown in FIGS. 1 to 5 with ``,'', and `` appended to them, so their explanation will be omitted.

Note that the component chambers 38 and 39 are rooms in which a ground plate or other circuit components are inserted.

Figures 7, 8, 9, 10, and 11 show a holder for holding one crystal plate on which four pairs of excitation electrodes are arranged, which is another embodiment of the present invention. FIG. 7 is a structural view showing the container, and FIG. The A-A cross-sectional view, B-B cross-sectional view, and CC cross-sectional view shown at the opening in FIG. 7, and the opening in FIG. FIG. 3 is a layout diagram of excitation electrodes arranged on the main surface of a rectangular crystal plate used in the example.

The description of each component in this embodiment will be changed by displaying the name of the same type of component in comparison with each component in the previously described embodiment.

40... Holding container, 41... Vacancy,
42...Gutter part, 43...Bottom part, 44
. . . Recessed portion (In addition, in the recessed portion 44, connection ends 60, 64, 68, 72, and 76, which will be described later, and the flexible portion 6
1.65, 69.73 and 77 are kept out of contact with the holding container 40.

) 45...Notch, 46...Adhesive reservoir, 47.48.49.50...Through hole, 51
, 52.53... intermediate through-hole section, 54.55,
56, 57.58...Terminal through hole, 59.6
3,67.71.

75...External terminal, 60.64.68.72.
76... Connection end, 61°65.69.73.7
7...... Portable part, 62, 66. 70, 74.
78... Hole, 80, 81.82, 83, 87,
89,91.93...Excitation electrodes (The excitation electrodes forming the four pairs are (87,82), (89,83),
(91,80) and (93,81).

)84,85,86,87,88゜90.92.94・
...Connection electrode, 95, 96.97...
intermediate electrode.

FIG. 12 shows the external terminal member before being implanted in the holding container, which was used in FIGS. 1 and 6 shown above.

The external terminal member having the shape shown in the figure is formed by etching, pressing, or the like.

The common member 98 connects each external terminal 17', 21', 25'
, 17".

21'', 25'', etc. are held together.

As a result, each external terminal can be precisely arranged.

After such external terminal members are implanted in the bottom wall portion of the holding container, each external terminal is cut from the common member 98.
become independent.

Thus, according to the holding container for a piezoelectric vibrator of the present invention, firstly, the through-hole portion can be used as a mask for fine-tuning vapor deposition at close range in the same way as the lower vapor-depositing mask during fine-tuning vapor deposition; In addition, it serves as a reference position mark for alignment with the excitation electrode facing the opposite side, and since the piezoelectric plate can be inserted into the holding container and electrically and mechanically connected in a static state, it is possible to It has the advantage of being able to uniformly perform fine-tuned vapor deposition directly above the occupied surface without manufacturing variations.

Furthermore, since the intermediate through-hole part is located on the main surface of the holding container on the opposite side to the through-hole part, it can be used as a mask for the fine-tuning vapor deposition described above and for bonding adjustment vapor deposition not only individually but also simultaneously. I can do it.

This adjustment of the degree of coupling not only prevents electrical short circuit accidents between adjacent excitation electrodes, but also dramatically improves manufacturing efficiency compared to conventional methods, since the alignment has already been done accurately. There are advantages.

Further, when fine-tuning vapor deposition and bonding degree adjustment are performed, a metal film is also formed on both mold surfaces of the holding container, so this metal film has the advantage of providing a shielding effect.

The precision of the molding of the holding container is ensured by having three or more holes formed by the terminal through-holes near the bottom of the cavity, so that not only the head (the open part) of the cavity but also the bottom of the cavity can be formed. It has the advantage of being highly processable.

[Brief explanation of the drawing]

Figures 1, 2, 3, 4, and 5 are structural diagrams of a crystal resonator with two pairs of excitation electrodes arranged as an embodiment of the present invention. 7, 8, 9, 10, and 11 are structural diagrams of a composite vibrator that is an application example of the invention. A structural diagram of the holding container for the placed crystal resonator, and FIG. 12 are structural diagrams of the external terminal member before being implanted in the holding container. 1.40...Holding container, 8.9.47.48.
49.50...Penetration part, 13,51.52.5
3...Middle true hole part, 29.79...Piezoelectric plate such as crystal plate, 31.32, 34, 36, 80, 81
．． 82, 83, 87, 89, 91. 93...Excitation electrode 1.17, 21.25, 59
, 63, 67.71.75...external terminal, 18
,22,26,61.64,68,72.77...
...Connection end, 10゜11.12,14,15,16,5
4, 55, 56, 57.58...Terminal true hole part.

Claims (1)

[Scope of utility model registration request] In a holding container that holds a piezoelectric vibrator in which two or more pairs of excitation electrodes are arranged on the main surface of a piezoelectric plate, at a position on one main surface of the holding container and facing the excitation electrodes of the piezoelectric plate. two or more through-holes provided, an intermediate hole provided on the other main surface of the holding container at a position opposite to an intermediate position of the through-holes, and one of the holding containers. 1. A holding container for a piezoelectric vibrator, characterized in that the holding container for a piezoelectric vibrator is provided with a terminal hole portion provided on a main surface at a position facing a connection end of an external terminal with the piezoelectric plate.