JP2020065223A - Tuning fork type piezoelectric vibrating piece and tuning fork type piezoelectric vibrator using tuning fork type piezoelectric vibrating piece - Google Patents

Tuning fork type piezoelectric vibrating piece and tuning fork type piezoelectric vibrator using tuning fork type piezoelectric vibrating piece Download PDF

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JP2020065223A
JP2020065223A JP2018197464A JP2018197464A JP2020065223A JP 2020065223 A JP2020065223 A JP 2020065223A JP 2018197464 A JP2018197464 A JP 2018197464A JP 2018197464 A JP2018197464 A JP 2018197464A JP 2020065223 A JP2020065223 A JP 2020065223A
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tuning fork
fork type
type piezoelectric
long groove
base
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真澄 森本
Masumi Morimoto
真澄 森本
恵将 南
Yoshimasa Minami
恵将 南
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株式会社大真空
Daishinku Corp
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Abstract

To provide a tuning fork type piezoelectric vibrating piece and a tuning fork type piezoelectric vibrator using the same increasing the rigidity of a vibrating bowl even when the tuning fork type piezoelectric vibrating piece becomes ultra-small, and having good characteristics that do not easily cause disconnection.SOLUTION: A tuning fork type piezoelectric vibrating piece 2 includes a base 20, vibrating arms 21 and 22 having excitation electrodes 25 and 26 protruding from the base, long grooves G1 to G4 formed on the main surface of the vibrating arm, and protrusions T1, T2, T3, and T4 formed at the base end of each of the long grooves. A flat portion having the same thickness as the surrounding bank portion and an inclined portion having a gradually decreasing thickness are formed on the protrusion. A part of the excitation electrode is formed inside the long groove, and the excitation electrode extends from the long groove to the base portion via the flat portion and the inclined portion of the protrusion.SELECTED DRAWING: Figure 2

Description

本発明は音叉形状からなる圧電振動片と、当該圧電振動片を用いた音叉型圧電振動子に関する。   The present invention relates to a piezoelectric vibrating reed having a tuning fork shape and a tuning fork type piezoelectric vibrator using the piezoelectric vibrating reed.
音叉型圧電振動子等の圧電振動子は基準クロック源として様々な電子機器に用いられている。例えば、表面実装型の音叉型圧電振動子は、基部と当該基部の一端側から同一方向に突出する一対の振動腕を備え、当該一対の振動腕には振動腕を駆動させるための励振電極等が形成された音叉型圧電振動片が絶縁性容器の凹部に収容される。そして、音叉型圧電振動片の基部の他端側が前記容器の凹部の内底面に形成された電極パッド上に、導電性の接合材を介して導電接合され、前記容器の凹部の開口端に平板状の蓋が接合された構成となっている。   Piezoelectric vibrators such as tuning fork type piezoelectric vibrators are used in various electronic devices as a reference clock source. For example, a surface-mounted tuning fork type piezoelectric vibrator includes a base portion and a pair of vibrating arms protruding in the same direction from one end side of the base portion, and the pair of vibrating arms includes excitation electrodes for driving the vibrating arms. The tuning-fork type piezoelectric vibrating reed formed with is formed in the recess of the insulating container. The other end of the base of the tuning fork type piezoelectric vibrating piece is conductively bonded to an electrode pad formed on the inner bottom surface of the recess of the container through a conductive bonding material, and a flat plate is formed on the opening end of the recess of the container. The lids are joined together.
近年、通信機器の高性能化や小型化に伴い、音叉型圧電振動片も更なる小型化と特性面の高品質化が求められている。これに対して、音叉型圧電振動片の小型化に伴うCIの増加を抑制するために、振動腕の主面に長溝を形成し、当該溝の内部に励振電極を形成することで電界効率を高めることが必要不可欠な構成となっている。そして、音叉型圧電振動片の小型化が進むほど振動椀の主面に対する長溝の幅の比率を増し、その深さを増す傾向にある。   In recent years, as the performance and size of communication devices have increased, the tuning fork-type piezoelectric vibrating piece is required to be further downsized and the quality of its characteristics to be improved. On the other hand, in order to suppress the increase in CI due to the miniaturization of the tuning fork type piezoelectric vibrating piece, a long groove is formed on the main surface of the vibrating arm, and an excitation electrode is formed inside the groove to improve the electric field efficiency. It is an indispensable composition to raise. As the tuning fork type piezoelectric vibrating piece becomes smaller, the ratio of the width of the long groove to the main surface of the vibrating bowl tends to increase, and the depth thereof tends to increase.
また、音叉型圧電振動片が小型化されると、その小型化に応じて音叉型圧電振動片の振動椀も小さくなり、特に振動椀の長さが比較的短くなることで、基準クロック源として比較的低周波用途(特に、時計等のクロック源として利用される32.768KHz等)に対応することが難しくなっている。これに対して、音叉型圧電振動片の各振動椀には、前記励振電極を有する振動部とは別に、当該振動部の先端で、かつ振動部よりも幅広の錘部を構成することが必要となることがある。   Further, when the tuning fork type piezoelectric vibrating piece is miniaturized, the vibration bowl of the tuning fork type piezoelectric vibrating piece also becomes smaller according to the miniaturization, and in particular, since the length of the vibrating bowl becomes relatively short, it becomes a reference clock source. It has become difficult to support relatively low frequency applications (especially 32.768 KHz used as a clock source for clocks and the like). On the other hand, in each vibrating bowl of the tuning fork type piezoelectric vibrating piece, apart from the vibrating section having the excitation electrode, it is necessary to configure a weight section at the tip of the vibrating section and wider than the vibrating section. May be.
WO2014/208251号WO2014 / 208251
このように、音叉型圧電振動片も更なる小型化に伴って、振動椀の端部と長溝との間に形成された土手部の幅が従来と比較して細くなり、励振電極の引き回しに伴う断線が生じやすくなり、振動椀の剛性が低下するといった問題点があった。   In this way, the tuning fork type piezoelectric vibrating piece is further downsized, and the width of the bank portion formed between the end of the vibrating bowl and the long groove becomes narrower than in the conventional case, and it is easy to route the excitation electrode. There is a problem in that the disconnection is likely to occur and the rigidity of the vibration bowl is reduced.
本発明はかかる点に鑑みてなされたものであり、音叉型圧電振動片が超小型になっても振動椀の剛性を高めるとともに、断線の生じにくい良好な特性を有する音叉型圧電振動片および当該音叉型圧電振動片を用いた音叉型圧電振動子を提供することを目的とするものである。   The present invention has been made in view of the above point, and the tuning fork type piezoelectric vibrating piece which has good characteristics in which the rigidity of the vibrating bowl is increased even when the tuning fork type piezoelectric vibrating piece is made extremely small and the wire breakage is unlikely to occur, and An object of the present invention is to provide a tuning fork type piezoelectric vibrator using a tuning fork type piezoelectric vibrating piece.
上記目的を達成するために請求項1に係る発明は、基部、上記基部から突出し励振電極が形成された複数の振動腕、上記振動腕の主面に形成された長溝と当該長溝の周囲の土手部とを備えており、上記長溝は、上記振動腕の突出する方向に沿った長手方向と、上記振動腕の突出する方向に直交する方向に沿った幅方向を具備しており、上記長溝の長手方向の基部側端部には、突起部が形成され、上記突起部は、上記土手部と肉厚が同じ平坦部と当該平坦部から長溝の中心に向かって次第に肉厚が薄くなる傾斜部とを備えており、上記平坦部の上記長溝の長手方向における突出寸法は、上記長溝の幅方向の幅寸法より短く形成され、上記振動椀の長溝の内部と、当該長溝に形成された突起部の平坦部と傾斜部とは、上記基部から上記長溝の基部側端部を経由して延出された上記励振電極の一部が形成されていることを特徴とする。   In order to achieve the above object, the invention according to claim 1 provides a base, a plurality of vibrating arms protruding from the base and having excitation electrodes formed therein, a long groove formed on a main surface of the vibrating arm, and a bank around the long groove. The long groove has a longitudinal direction along the protruding direction of the vibrating arm and a width direction along a direction orthogonal to the protruding direction of the vibrating arm. A protrusion is formed at the end portion on the base side in the longitudinal direction, and the protrusion has a flat portion having the same thickness as the bank portion and an inclined portion whose thickness gradually decreases from the flat portion toward the center of the long groove. The flat portion has a protrusion dimension in the longitudinal direction of the long groove that is shorter than the width dimension of the long groove in the width direction, and the inside of the long groove of the vibrating bowl and the protrusion portion formed in the long groove. Of the flat portion and the inclined portion of the long groove from the base portion Wherein a portion of the excitation electrode which extends through the end portion is formed.
上記発明によれば、振動椀の長溝の長手方向の基部側端部には突起部が形成され、当該突起部は土手部と同じ肉厚の平坦部と次第に肉厚が薄くなる傾斜部とを備えており、上記平坦部の突出寸法を長溝の幅寸法より短く形成しているため、突起部により、振動椀の長溝の基部側領域の容積を全体として大きく削減することなく、かつ同領域の剛性を高めることができる。結果として、長溝の内部に形成される励振電極の面積も大きく削減されず、音叉型圧電振動片の励振時の電界効率を低下させることがないので、CIの増加を抑制して良好な特性を確保することができ、振動椀の剛性を高めることができる。   According to the above invention, a protrusion is formed at the end of the long groove of the vibration bowl on the base side in the longitudinal direction, and the protrusion has a flat portion having the same thickness as the bank portion and an inclined portion having a gradually decreasing thickness. Since the protrusion of the flat portion is formed shorter than the width of the long groove, the protrusion does not significantly reduce the volume of the base side region of the long groove of the vibration bowl as a whole, and The rigidity can be increased. As a result, the area of the excitation electrode formed inside the long groove is not significantly reduced, and the electric field efficiency at the time of excitation of the tuning fork type piezoelectric vibrating piece is not reduced, so that the increase in CI is suppressed and good characteristics are obtained. Therefore, the rigidity of the vibration bowl can be increased.
しかも、突起部の平坦部は長溝の幅寸法より短く形成しながら、その先端には次第に肉厚が薄くなる傾斜部が形成されていることで、振動椀の先端側と基部側との剛性を大きく変化させることがなく、かつ突起部による極端な剛性の変化点を生じることもないため、振動椀の剛性の変化に伴って音叉型圧電振動片の屈曲振動を妨げにくく不要な振動モードが発生するのも抑制することができる。   Moreover, the flat portion of the protrusion is formed to be shorter than the width dimension of the long groove, and at the tip thereof, the inclined portion whose thickness is gradually reduced is formed, so that the rigidity between the tip side and the base side of the vibrating bowl is improved. Since it does not change significantly and the protrusion does not cause an extreme change point in rigidity, the bending vibration of the tuning-fork type piezoelectric vibrating piece is not easily disturbed by the change in rigidity of the vibration bowl, and an unnecessary vibration mode is generated. It can also be suppressed.
さらに、この様に傾斜面と短い平坦部からなる突起部を経由して振動椀の長溝の内部と基部とが励振電極の一部により延出されており、長溝と土手部との間に生じる段差を軽減した状態で電極が引き出されるため、励振電極の断線を抑制することができる。   Further, the inside of the long groove of the vibrating bowl and the base portion are extended by a part of the excitation electrode via the protrusion formed of the inclined surface and the short flat portion as described above, and are generated between the long groove and the bank portion. Since the electrode is pulled out in a state in which the step is reduced, it is possible to suppress disconnection of the excitation electrode.
また、上述の構成に加えて、上記突起部は、上記長溝の基部側端部の中央に形成されており、当該突起部の平坦部は長溝の中心に向かって次第に面積が狭まる様に形成してもよい。   In addition to the above configuration, the protrusion is formed at the center of the base side end of the long groove, and the flat portion of the protrusion is formed so that the area gradually decreases toward the center of the long groove. May be.
上記発明によれば、上述の作用効果に加えて、突起部は長溝の基部側端部の中央に形成されており、当該突起部の平坦部は長溝の中心に向かって次第に面積が狭まる様に形成されていることで、より一層、振動椀の先端側と基部側との剛性を大きく変化させることがなくなり、かつ突起部による極端な剛性の変化点を生じることもない。このため、より一層、音叉型圧電振動片の屈曲振動を妨げにくく不要な振動モードが発生するのもさらに抑制することができる。   According to the above invention, in addition to the above-described effects, the protrusion is formed at the center of the base-side end of the long groove, and the flat portion of the protrusion gradually narrows in area toward the center of the long groove. By being formed, the rigidity of the tip end side and the base part side of the vibrating bowl is not significantly changed, and the extreme change point of the rigidity due to the protrusion is not generated. Therefore, it is possible to further suppress the occurrence of an unnecessary vibration mode in which bending vibration of the tuning fork type piezoelectric vibrating piece is less likely to be disturbed.
また、上述の構成に加えて、上記振動腕の突出端部には幅広の錘部を形成してもよい。   In addition to the above-mentioned structure, a wide weight may be formed on the protruding end of the vibrating arm.
上記発明によれば、上述の作用効果に加えて、振動腕の突出端部の幅広の錘部により、音叉型圧電振動片の小型化に伴う低周波化が行え、この錘部が存在することによるさらなる剛性不足にも対応できる。結果として、振動腕折れなどのリスクがなくなる。   According to the above invention, in addition to the above-described effects, the wide weight portion of the projecting end portion of the vibrating arm can reduce the frequency due to the miniaturization of the tuning fork type piezoelectric vibrating piece, and the weight portion exists. It is possible to cope with further insufficient rigidity due to. As a result, there is no risk of vibrating arms being broken.
また、上述の音叉型圧電振動片が、容器の内部に搭載され収容されるとともに気密封止された音叉型圧電振動子に適用することができ、上述と同様の作用効果が音叉型圧電振動子として得られる。   Further, the tuning fork type piezoelectric vibrating piece described above can be applied to a tuning fork type piezoelectric vibrator which is mounted and housed inside a container and is hermetically sealed, and the same effect as the above is obtained. Obtained as.
以上のように本発明によれば、音叉型圧電振動片が超小型になっても振動椀の剛性を高めるとともに、断線の生じにくい良好な特性を有する音叉型圧電振動片および当該音叉型圧電振動片を用いた音叉型圧電振動子を提供することができる。   As described above, according to the present invention, the tuning fork type piezoelectric vibrating piece and the tuning fork type piezoelectric vibrating piece which have good characteristics such that the rigidity of the vibrating bowl is enhanced even if the tuning fork type piezoelectric vibrating piece is miniaturized and the disconnection does not easily occur. It is possible to provide a tuning fork type piezoelectric vibrator using a piece.
本発明の実施形態に係る音叉型水晶振動子の模式的な断面図である。FIG. 3 is a schematic cross-sectional view of a tuning fork type crystal resonator according to the embodiment of the present invention. 本発明の実施形態に係る音叉型水晶振動片の一主面側の模式的な平面図である。FIG. 3 is a schematic plan view of one main surface side of the tuning fork type crystal vibrating piece according to the embodiment of the present invention. 図2の音叉型水晶振動片の他主面側の平面図である。FIG. 3 is a plan view of the other main surface side of the tuning fork type crystal vibrating piece of FIG. 2. 本発明の他の実施形態に係る音叉型水晶振動片の一主面側の模式的な平面図である。FIG. 8 is a schematic plan view of one main surface side of a tuning fork type quartz vibrating piece according to another embodiment of the present invention.
以下、本発明の実施形態として、音叉型水晶振動片(音叉型圧電振動片)を用いた音叉型水晶振動子(音叉型圧電振動子)を例に挙げ、図面を参照しながら説明する。本実施形態における音叉型水晶振動子(以下、水晶振動子と略)は略直方体状のパッケージ構造からなる表面実装型の水晶振動子である。本実施形態ではその平面視の外形寸法は例えば縦1.6mm、横1.0mmとなっている。なお、水晶振動子の平面視の外形寸法は当該寸法に限定されるものではないが、同寸法以下の超小型の水晶振動子に対して好適である。   Hereinafter, as an embodiment of the present invention, a tuning fork type crystal resonator (tuning fork type piezoelectric resonator) using a tuning fork type crystal resonator element (tuning fork type piezoelectric resonator element) will be described as an example with reference to the drawings. The tuning fork type crystal unit (hereinafter, abbreviated as a crystal unit) in the present embodiment is a surface mount type crystal unit having a substantially rectangular parallelepiped package structure. In the present embodiment, the external dimensions in plan view are, for example, 1.6 mm in length and 1.0 mm in width. The external dimensions of the crystal unit in plan view are not limited to the dimensions, but are suitable for an ultra-small crystal unit having the same size or less.
本発明の実施形態に係る水晶振動子1は、図1に示すように凹部5を有する絶縁材料からなる容器3と、音叉型水晶振動片2(以下、水晶振動片2と略)と、凹部5を封止する平板状の蓋4が主な構成部材となっている。なお、図1では水晶振動片に形成される各種電極の記載は省略している。水晶振動片2は、容器3の凹部5の内部に収容された後、蓋4が凹部5を覆うように容器3の開口端に接合されることによって気密に封止される。ここで容器3と蓋4とは図示しない封止材を介して接合される。   A crystal resonator 1 according to an embodiment of the present invention includes a container 3 made of an insulating material having a recess 5 as shown in FIG. 1, a tuning fork type crystal vibrating piece 2 (hereinafter, abbreviated as crystal vibrating piece 2), and a concave portion. The flat plate-shaped lid 4 that seals 5 is a main component. Note that, in FIG. 1, various electrodes formed on the crystal vibrating piece are omitted. The crystal vibrating piece 2 is housed inside the recess 5 of the container 3 and then hermetically sealed by the lid 4 being joined to the open end of the container 3 so as to cover the recess 5. Here, the container 3 and the lid 4 are joined via a sealing material (not shown).
容器3はアルミナ等のセラミックを主体とした絶縁材料から成る箱状体であり、例えば2枚のセラミックグリーンシートを積層して一体焼成することによって成形されている(図1参照)。容器3は枠状の堤部30の内側に平面視矩形状の凹部5を有している。堤部30の上面には図示しない封止材が平面視で枠状に形成されており、前記接合材は蓋4の外周部分と対応している。   The container 3 is a box-shaped body made of an insulating material mainly composed of ceramics such as alumina, and is formed by, for example, stacking two ceramic green sheets and integrally firing them (see FIG. 1). The container 3 has a concave portion 5 having a rectangular shape in a plan view inside the frame-shaped bank portion 30. A sealing material (not shown) is formed in a frame shape on the upper surface of the bank 30 in a plan view, and the bonding material corresponds to the outer peripheral portion of the lid 4.
凹部5の内底面301の一短辺側には、水晶振動片2と導電接合される2つの電極パッド6,7(図1では一方のみ図示)が、互いに隙間を空けた状態で並列して形成されている。2つの電極パッド6,7は、図示しない内部配線およびビアを介して容器3の外底面302の4隅に設けられた4つの外部接続端子8(図1では2つのみ図示)のうちの2つの端子と電気的に接続されている。これら2つの電極パッド6,7は互いに異極となっている。   On one short side of the inner bottom surface 301 of the recess 5, two electrode pads 6 and 7 (only one is shown in FIG. 1) conductively bonded to the crystal vibrating piece 2 are arranged in parallel with each other with a gap therebetween. Has been formed. The two electrode pads 6 and 7 are two of the four external connection terminals 8 (only two are shown in FIG. 1) provided at the four corners of the outer bottom surface 302 of the container 3 via internal wiring and vias not shown. It is electrically connected to two terminals. These two electrode pads 6 and 7 have different polarities.
本実施形態では2つの電極パッド6,7は、タングステンメタライズ層の上面に金をメッキ等の手法を用いて積層することによって形成されている。なお前記メタライズ層として、タングステンの代わりにモリブデンを用いてもよい。   In this embodiment, the two electrode pads 6 and 7 are formed by stacking gold on the upper surface of the tungsten metallized layer using a technique such as plating. Note that molybdenum may be used instead of tungsten as the metallized layer.
電極パッド6,7のタングステン部分はメタライズの最小単位厚みの点から2段に重ね塗りされている。これは、本実施形態では水晶振動子の薄型化を図るために容器3を2層構成としたことによって凹部5の内底面301に段部を形成することができないため、水晶振動片2の搭載後の状態で、水晶振動片の下面(内底面301に対向する面)と前記内底面301との間に或る程度の隙間を確保するためである。   The tungsten portions of the electrode pads 6 and 7 are overcoated in two steps from the viewpoint of the minimum unit thickness of metallization. This is because in the present embodiment, since the container 3 has a two-layer structure in order to reduce the thickness of the crystal resonator, it is not possible to form a step on the inner bottom surface 301 of the recess 5, so that the crystal resonator element 2 is mounted. This is to secure a certain gap between the lower surface of the crystal vibrating piece (the surface facing the inner bottom surface 301) and the inner bottom surface 301 in the latter state.
蓋4はコバールを基体とする平面視矩形状の金属性の蓋体であり、当該蓋の表裏面にはニッケルメッキ層が形成されている。また蓋4の容器との接合面側には、前記ニッケルメッキ層の上に金属からなるロウ材が全面に亘って形成されている。本実施形態では前記ロウ材として銀ロウが使用されている。   The lid 4 is a metallic lid body having a rectangular shape in plan view and having Kovar as a base, and nickel plating layers are formed on the front and back surfaces of the lid. A brazing material made of metal is formed over the entire surface of the lid 4 on the side of the joint with the container. In the present embodiment, silver brazing is used as the brazing material.
次に本実施形態における水晶振動片について図2、図3を参照しながら説明する。なお説明の便宜上、水晶振動片2の対向する2つの主面(2a,2b)のうち、容器に搭載される際に電極パッド6,7に対面する側の主面を裏面2bとし、当該裏面に対向する反対側の主面を表面2aとして説明する。図2は水晶振動片の表面側(2a)から見た平面図を、図3は水晶振動片の裏面側(2b)から見た平面図をそれぞれ表している。   Next, the crystal resonator element according to the present embodiment will be described with reference to FIGS. 2 and 3. For convenience of explanation, of the two main surfaces (2a, 2b) of the quartz resonator blank 2 facing each other, the main surface facing the electrode pads 6 and 7 when mounted on a container is a back surface 2b, and the back surface is the back surface 2b. The main surface on the opposite side opposite to is described as the surface 2a. 2 shows a plan view seen from the front surface side (2a) of the crystal vibrating piece, and FIG. 3 shows a plan view seen from the back surface side (2b) of the crystal vibrating piece.
図2、図3に示すように、水晶振動片2は音叉形状であり、基部20と、基部20の一端側201から同一方向に突出する一対の振動腕21,22と、基部の他端側202の一側面から基部20の幅方向(図2、図3の符号Xで示す軸方向における基部の寸法)の一方に向かって突出した突出部24とから成っている。   As shown in FIGS. 2 and 3, the crystal vibrating piece 2 has a tuning fork shape and includes a base portion 20, a pair of vibrating arms 21 and 22 projecting from one end side 201 of the base portion 20 in the same direction, and the other end side of the base portion. The protrusion 24 is formed by projecting from one side surface of the base portion 202 toward one side in the width direction of the base portion 20 (the dimension of the base portion in the axial direction indicated by the symbol X in FIGS. 2 and 3).
前記一対の振動腕21,22の各々の先端側には、振動腕21,22の腕幅(振動腕の突出方向に対して直交する方向における腕の寸法)よりも幅広となる幅広部23,23(錘部)が形成されている。幅広部23,23は、振動腕の突出方向に向かって漸次拡幅する拡幅部(符号省略)を介して、振動腕21,22の先端部分と一体で成形されている。前記拡幅部と前記幅広部とは、振動腕と一体で成形されている。なお幅広部23,23の各々の先端側211,221の各隅部は面取り状(C面状)に加工されている。振動腕21,22と拡幅部と幅広部23,23は、対向する一対の主面2a,2bと対向する一対の側面(符号省略)を有している。   A wide portion 23, which is wider than the arm width of the vibrating arms 21 and 22 (the dimension of the arm in the direction orthogonal to the protruding direction of the vibrating arm), is provided on the distal end side of each of the pair of vibrating arms 21 and 22. 23 (weight part) is formed. The wide portions 23, 23 are integrally formed with the tip end portions of the vibrating arms 21, 22 via a widening portion (reference numeral omitted) that gradually widens in the protruding direction of the vibrating arm. The widened portion and the widened portion are integrally formed with the vibrating arm. Note that the corners on the tip ends 211, 221 of the wide portions 23, 23 are chamfered (C-faced). The vibrating arms 21 and 22, the widened portions and the widened portions 23 and 23 have a pair of side surfaces (reference numeral omitted) that face the pair of main surfaces 2a and 2b that face each other.
一対の振動腕21,22の各々の表裏主面には、等価直列抵抗値(Crystal Impedance。以下、CI値と略)をより低下させる目的で、長溝G1〜G4が形成されている。つまり、振動椀21の表裏主面には、長溝G1と長溝G3とが互いに対向するように形成され、振動椀22の表裏主面には、長溝G2と長溝G4とが互いに対向するように形成されている。長溝G1〜G4は、一対の振動腕21,22の各々の表裏主面に所定の深さで形成されており、その一端側が基部20の一端側201の領域まで延長され、その他端側が振動腕と拡幅部との境界に対して振動腕の付け根側に位置して形成されている。長溝G1〜G4は、振動腕21,22の突出する方向に沿った長手方向と(図2、図3の符号Yで示す軸方向)、振動腕21,22の突出する方向に直交する方向に沿った幅方向(図2、図3で符号Xで示す軸方向)とを有している。この長溝G1〜G4の周囲には、振動椀の厚みと同じ土手部が隣接して形成されている。なお、長溝G1〜G4が存在する振動椀の領域が振動部を構成している。   Long grooves G1 to G4 are formed on the front and back main surfaces of each of the pair of vibrating arms 21 and 22 for the purpose of further lowering the equivalent series resistance value (Crystal Impedance; hereinafter, abbreviated as CI value). That is, on the front and back main surfaces of the vibration bowl 21, the long groove G1 and the long groove G3 are formed to face each other, and on the front and back main surface of the vibration bowl 22, the long groove G2 and the long groove G4 are formed to face each other. Has been done. The long grooves G1 to G4 are formed with a predetermined depth on the front and back main surfaces of each of the pair of vibrating arms 21 and 22, one end side of which extends to the region of one end side 201 of the base 20, and the other end side thereof vibrates. Is formed on the base side of the vibrating arm with respect to the boundary between the widened part and the widened part. The long grooves G1 to G4 are in the longitudinal direction along the protruding direction of the vibrating arms 21 and 22 (the axial direction indicated by the symbol Y in FIGS. 2 and 3) and in the direction orthogonal to the protruding direction of the vibrating arms 21 and 22. Along the width direction (the axial direction indicated by the symbol X in FIGS. 2 and 3). Around the long grooves G1 to G4, a bank portion having the same thickness as the vibrating bowl is formed adjacently. The vibrating bowl region in which the long grooves G1 to G4 are present constitutes a vibrating portion.
各振動腕21,22の表裏主面に形成される長溝G1〜G4の内部には、各長溝の長手方向の基部側端部の中央に、各長溝の長手方向の中心位置に向かって突出する突起部T1,T2,T3,T4が形成されている。突起部T1,T2,T3,T4には、長溝G1〜G4の周囲の土手部と肉厚が同じ平坦部T11,T21,T31,T41と、当該平坦部から長溝G1〜G4の中心位置に向かって次第に肉厚が薄くなる傾斜部T12,T22,T32,T42とを備えている。本形態の突起部の平坦部T11,T21,T31,T41は、長溝G1〜G4の中心位置に向かって次第に面積が狭まるように、平面視形状を例えば三角形状に形成している。また、図4に示すように、突起部の平坦部T111,T211,T311,T411(表面2aのみ図示)の平面視形状を、半楕円形状としてもよい。なお、本形態に限らず、突起部の平坦部は、長溝の中心位置に向かって次第に面積が狭まらない構成としてもよく、例えば平面視形状を矩形状に形成してもよい。また、本形態に限らず、突起部は、長溝の長手方向の基部側端部だけでなく、腕先側端部に形成してもよい。   Inside the long grooves G1 to G4 formed on the front and back main surfaces of each of the vibrating arms 21 and 22, at the center of the end portion on the base side in the longitudinal direction of each long groove, the long grooves project toward the center position of the long groove in the longitudinal direction. Protrusions T1, T2, T3, T4 are formed. The protrusions T1, T2, T3, T4 have flat portions T11, T21, T31, T41 having the same thickness as the bank portion around the long grooves G1 to G4, and the flat portions are directed from the flat portion to the center positions of the long grooves G1 to G4. The inclined portions T12, T22, T32, and T42 are gradually reduced in thickness. The flat portions T11, T21, T31, T41 of the protrusions of the present embodiment are formed in a plan view shape, for example, in a triangular shape so that the area thereof gradually narrows toward the center positions of the long grooves G1 to G4. Further, as shown in FIG. 4, the planar shape of the flat portions T111, T211, T311, T411 (only the surface 2a is shown) of the protrusions may be a semi-elliptical shape. Not limited to this embodiment, the flat portion of the protrusion may have a configuration in which the area does not gradually decrease toward the central position of the long groove, and may have a rectangular shape in plan view, for example. Further, the present invention is not limited to this embodiment, and the protrusion may be formed not only on the base side end of the long groove in the longitudinal direction but also on the arm tip side end.
突起部の平坦部T11,T21,T31,T41における長溝G1〜G4の長手方向(長溝G1〜G4の中心位置)への突出寸法Lは、長溝G1〜G4の幅方向の幅寸法Wより短く形成されている。より具体的には、長溝G1〜G4の幅寸法Wを 37〜42μmとした場合、突起部の平坦部T11,T21,T31,T41の突出寸法Lは、3〜15μmとして構成している。   In the flat portions T11, T21, T31, T41 of the protrusions, the projecting dimension L of the long grooves G1 to G4 in the longitudinal direction (center position of the long grooves G1 to G4) is formed shorter than the width dimension W of the long grooves G1 to G4 in the width direction. Has been done. More specifically, when the width dimension W of the long grooves G1 to G4 is 37 to 42 μm, the projecting dimension L of the flat portions T11, T21, T31, T41 of the protrusions is 3 to 15 μm.
このように突起部の平坦部T11,T21,T31,T41の突出寸法Lを長溝G1〜G4の幅方向の幅寸法Wより短く形成することで、突起部T1,T2,T3,T4により、振動椀の長溝G1〜G4の基部側領域の容積を全体として大きく削減することなく、かつ同領域の剛性を高めることができるようになる。   In this way, by forming the protrusion dimension L of the flat portions T11, T21, T31, T41 of the protrusions shorter than the width dimension W in the width direction of the long grooves G1 to G4, the protrusions T1, T2, T3, T4 vibrate. It is possible to increase the rigidity of the base region of the long grooves G1 to G4 of the bowl without significantly reducing the overall volume of the region.
また、本形態では、突起部T1,T2,T3,T4が、長溝G1〜G4の基部側端部の中央に形成されていることと、突起部の平坦部T11,T21,T31,T41が、長溝G1〜G4の中心位置に向かって次第に平面視の面積が狭まる三角形状や半楕円形状などの形状様に形成されていることと、突起部の平坦部の先端に次第に肉厚が薄くなる傾斜部T12,T22,T32,T42が形成されていることを相互に組み合わせている。このため、振動椀の先端側と基部側との剛性を大きく変化させることがなくなり、かつ突起部による極端な剛性の変化点を生じることもないため、音叉型圧電振動片の屈曲振動を妨げにくく不要な振動モードが発生するのもさらに抑制することができるより好ましい形態となっている。   Further, in the present embodiment, the protrusions T1, T2, T3, T4 are formed in the center of the base-side end of the long grooves G1 to G4, and the flat portions T11, T21, T31, T41 of the protrusions are It is formed in a shape such as a triangular shape or a semi-elliptical shape in which the area in plan view is gradually reduced toward the center position of the long grooves G1 to G4, and the slope where the wall thickness is gradually reduced at the tip of the flat portion of the protrusion. The formation of the portions T12, T22, T32 and T42 is combined with each other. Therefore, the rigidity of the tip side of the vibrating bowl and the base side of the vibrating bowl are not significantly changed, and the protrusion does not cause an extreme change point of the rigidity, so that the bending vibration of the tuning fork type piezoelectric vibrating piece is not easily disturbed. This is a more preferable form that can further suppress the generation of an unnecessary vibration mode.
振動椀21,22の長溝G1〜G4の内部と、長溝G1〜G4に形成された突起部の平坦部T11,T21,T31,T41と、傾斜部T12,T22,T32,T42とは、後述する第1および第2の励振電極25,26の一部が形成されている。第1および第2の励振電極25,26は、各突起部の傾斜部と平坦部を経由して長溝の基部側端部から基部20へと延出され、後述する引出電極27,28の一部と接続されている。このため、長溝と周囲の土手部との間に生じる段差を軽減した状態で励振電極が引き出されるため、励振電極の断線を抑制することができる。   The inside of the long grooves G1 to G4 of the vibration bowls 21 and 22, the flat portions T11, T21, T31, T41 of the protrusions formed in the long grooves G1 to G4, and the inclined portions T12, T22, T32, T42 will be described later. Part of the first and second excitation electrodes 25, 26 is formed. The first and second excitation electrodes 25 and 26 are extended from the end portion on the base side of the long groove to the base portion 20 via the inclined portion and the flat portion of each protruding portion, and one of the extraction electrodes 27 and 28 to be described later. Connected to the department. For this reason, since the excitation electrode is pulled out in a state in which the step generated between the long groove and the surrounding bank portion is reduced, disconnection of the excitation electrode can be suppressed.
ここで、振動椀21と振動椀22に形成された長溝G1と長溝G2、突起部T1,T2とは、振動腕21と振動椀22の間にある仮想中心線CLを基準として線対称に形成されるとともに、長溝G3と長溝G4、突起部T3,T4とは、振動腕21と振動椀22の間にある仮想中心線CLを基準として線対称に形成されている。これにより、後述する励振電極25,26を介して振動椀21,22にかかる電界が、お互いの振動椀で均一にバランスが保たれ、不要な振動を助長することがない。   Here, the long groove G1 and the long groove G2 formed in the vibration bowl 21 and the vibration bowl 22 and the protrusions T1 and T2 are formed line-symmetrically with respect to the virtual center line CL between the vibrating arm 21 and the vibration bowl 22. In addition, the long groove G3, the long groove G4, and the protrusions T3 and T4 are formed line-symmetrically with respect to the virtual center line CL between the vibrating arm 21 and the vibrating bowl 22. As a result, the electric fields applied to the vibrating bowls 21 and 22 via the excitation electrodes 25 and 26, which will be described later, are uniformly balanced by the vibrating bowls, and unnecessary vibration is not promoted.
基部20には、他端側202側が一端側201側よりも基部の幅が狭くなる縮幅部203が形成されている。この縮幅部203の一側面には前述した突出部24が形成されている。この突出部24と基部20とによって平面視では直角に折れ曲がったアルファベットの「L」字状の部位が形成されている。なお、音叉型水晶振動片は本実施形態における形状に限定されるものではない。例えば前記突出部が、基部の一側面だけでなく基部の他側面(前記一側面と対向する側面)から突出した形状、つまり突出部が基部の両外側に各々突出した形状であってもよい。あるいは前記突出部が、基部から両外側に突出した後、振動腕の突出方向に向きを変えて、互いに平行に突出する左右対称の形状であってもよい。また、基部に突出部が形成されていない形状であってもよい。   The base portion 20 is formed with a reduced width portion 203 in which the width of the base portion on the other end side 202 side is narrower than that on the one end side 201 side. The above-mentioned protruding portion 24 is formed on one side surface of the reduced width portion 203. The projecting portion 24 and the base portion 20 form an "L" -shaped portion of the alphabet which is bent at a right angle in a plan view. The tuning-fork type crystal vibrating piece is not limited to the shape in this embodiment. For example, the protruding portion may have a shape protruding from not only one side surface of the base portion but also the other side surface of the base portion (side surface facing the one side surface), that is, the protruding portion may protrude to both outer sides of the base portion. Alternatively, the protrusions may have a bilaterally symmetrical shape that protrudes outward from both sides of the base and then turns in the protruding direction of the vibrating arm to protrude in parallel with each other. Further, it may have a shape in which the protrusion is not formed on the base.
前述した水晶振動片の外形や突起部は、1枚の水晶ウエハからフォトリソグラフィ技術とウェットエッチングを用いて一括同時に多数個が成形される。   A large number of outer shapes and projections of the crystal vibrating piece described above are simultaneously molded from one crystal wafer using a photolithography technique and wet etching.
水晶振動片2には、異電位で構成された第1の励振電極25および第2の励振電極26と、第1の励振電極25と第2の励振電極26の各々から引回し電極(後述)を経由して引き出された引出電極27,28とが形成されている。   The crystal vibrating piece 2 includes a first excitation electrode 25 and a second excitation electrode 26 which are configured with different potentials, and a routing electrode (described later) from each of the first excitation electrode 25 and the second excitation electrode 26. Lead-out electrodes 27 and 28 led out via.
また、一対の振動腕21,22の表裏主面に形成される第1および第2の励振電極25,26の一部は、突起部の平坦部T11,T21,T31,T41と、傾斜部T12,T22,T32,T42を含む一対の振動腕21,22の長溝G1〜G4の内部の全体に及んで形成されている。前記長溝を形成することにより、水晶振動片を小型化しても一対の振動腕21,22の電界効率が高まり、良好なCI値を得ることができる。なお、突起部の平坦部T11,T21,T31,T41と、傾斜部T12,T22,T32,T42には第1および第2の励振電極を必ず形成しつつ、長溝G1〜G4の内部のうちの一部の領域に第1および第2の励振電極を形成しない構成としてもよい。   In addition, a part of the first and second excitation electrodes 25 and 26 formed on the front and back main surfaces of the pair of vibrating arms 21 and 22 includes flat portions T11, T21, T31, T41 of the protrusion and the inclined portion T12. , T22, T32, T42 are formed over the entire inside of the long grooves G1 to G4 of the pair of vibrating arms 21 and 22. By forming the long groove, the electric field efficiency of the pair of vibrating arms 21 and 22 is increased and a good CI value can be obtained even if the crystal vibrating piece is downsized. In addition, the first and second excitation electrodes are always formed on the flat portions T11, T21, T31, T41 and the inclined portions T12, T22, T32, T42 of the protrusions, and the inside of the long grooves G1 to G4 is formed. The first and second excitation electrodes may not be formed in some regions.
第1の励振電極25は、一方の振動腕21の表裏主面と、引回し電極(符号省略)を介して他方の振動腕22の外側面と内側面とに形成されている。同様に第2の励振電極26は、他方の振動腕22の表裏主面と、引回し電極(符号省略)を介して一方の振動腕21の外側面と内側面とに形成されている。   The first excitation electrode 25 is formed on the front and back main surfaces of the one vibrating arm 21 and on the outer side surface and the inner side surface of the other vibrating arm 22 via a routing electrode (reference numeral omitted). Similarly, the second excitation electrode 26 is formed on the front and back main surfaces of the other vibrating arm 22 and on the outer side surface and the inner side surface of the one vibrating arm 21 via the routing electrodes (reference numeral omitted).
引出電極27,28は基部20および突出部24(裏面2bのみ)に形成されている。基部20に形成された引出電極27により、他方の振動腕22の外側面と内側面の各々に形成された第1の励振電極25と,引回し電極(符号省略)を経由して、一方の振動腕21の表裏主面に形成された第1の励振電極25と接続されている。同様に、基部20に形成された引出電極28により、一方の振動腕21の外側面と内側面の各々に形成された第2の励振電極26と,引回し電極(符号省略)を経由して、他方の振動腕22の表裏主面に形成された第2の励振電極26と接続されている。   The extraction electrodes 27 and 28 are formed on the base 20 and the protrusion 24 (only the back surface 2b). By the extraction electrode 27 formed on the base portion 20, the first excitation electrode 25 formed on each of the outer side surface and the inner side surface of the other vibrating arm 22 and the leading electrode (reference numeral omitted) It is connected to the first excitation electrode 25 formed on the front and back main surfaces of the vibrating arm 21. Similarly, the extraction electrode 28 formed on the base portion 20 passes through the second excitation electrode 26 formed on each of the outer surface and the inner surface of the one vibrating arm 21 and the routing electrode (reference numeral omitted). , And is connected to the second excitation electrode 26 formed on the front and back main surfaces of the other vibrating arm 22.
引出電極27,28は、水晶振動片の表面2aにおいては基部20の一端側201から縮幅部203まで引き出されている。一方、水晶振動片の裏面2bにおいては他端側202および突出部24の先端側まで引き出されている。そして図3に示すように、水晶振動片の裏面2bにおける基部20の他端側202の領域と突出部24の先端側の各領域とは、容器3の電極パッド6,7と各々電気機械的に接続される接続電極271,281となっている。   The extraction electrodes 27 and 28 are drawn out from the one end side 201 of the base portion 20 to the reduced width portion 203 on the surface 2 a of the crystal vibrating piece. On the other hand, on the back surface 2b of the crystal vibrating piece, it is pulled out to the other end side 202 and the tip side of the projecting portion 24. As shown in FIG. 3, the region on the other end side 202 of the base portion 20 and the regions on the tip end side of the projecting portion 24 on the back surface 2b of the quartz crystal vibrating piece are electromechanical with the electrode pads 6 and 7 of the container 3, respectively. Are connection electrodes 271, 281 connected to.
図3に示すように、2つの接続電極271,281の各々の上面には、導電性の接合材S,Sが各々形成されている。本実施形態では接合材Sは、電解めっき法によって形成されためっきバンプとなっている。そして水晶振動片2と電極パッド6,7との導電接合は、FCB法(Flip Chip Bonding)によって行われている。   As shown in FIG. 3, conductive bonding materials S and S are formed on the upper surfaces of the two connection electrodes 271 and 281 respectively. In the present embodiment, the bonding material S is a plated bump formed by the electrolytic plating method. Conductive bonding between the crystal vibrating piece 2 and the electrode pads 6 and 7 is performed by the FCB method (Flip Chip Bonding).
幅広部23,23を構成する一対の主面と一対の側面の全ての面には、前述した引回し電極が各々形成されている。本実施形態において引回し電極は、幅広部23の全周と、振動腕21,22の拡幅部寄りの部位の全周(一対の主面と一対の側面)とに形成されている。   The routing electrodes described above are respectively formed on all of the pair of main surfaces and the pair of side surfaces forming the wide portions 23, 23. In the present embodiment, the lead-out electrodes are formed on the entire circumference of the wide portion 23 and the entire circumference (a pair of main surfaces and a pair of side surfaces) of a portion of the vibrating arms 21 and 22 near the widened portion.
前述した第1および第2の励振電極25,26や引出電極27,28、引回し電極(符号省略)は、水晶基材上にクロム(Cr)層が形成され、このクロム層の上に金(Au)層が積層された層構成となっている。なお前記各種電極の層構成は、クロム層の上に金層が形成された層構成に限らず、他の層構成であってもよい。   The above-mentioned first and second excitation electrodes 25 and 26, extraction electrodes 27 and 28, and routing electrodes (reference numeral omitted) have a chromium (Cr) layer formed on a quartz substrate, and a gold (Cr) layer is formed on the chromium layer. It has a layered structure in which (Au) layers are laminated. The layer structure of the various electrodes is not limited to the layer structure in which the gold layer is formed on the chromium layer, and may be another layer structure.
第1および第2の励振電極と引出電極や引回し電極は、真空蒸着法やスパッタリング等によって水晶ウエハの主面全体に成膜された後、フォトリソグラフィ技術とメタルエッチングによって所望のパターンに一括同時に成形されている。   The first and second excitation electrodes, the extraction electrodes, and the routing electrodes are formed on the entire main surface of the quartz wafer by vacuum vapor deposition, sputtering, etc., and then simultaneously formed into a desired pattern by photolithography and metal etching. It is molded.
図2に示すように本発明の実施形態では、幅広部23を構成する面のうち一主面のみ(表面2a)に周波数調整用金属膜W(周波数調整用錘)が形成されている。この周波数調整用金属膜Wの質量を、レーザービームやイオンビーム等のビーム照射によって削減することによって水晶振動片2の周波数が微調整される。なお周波数調整用金属膜Wは幅広部23,23の主面における引回し電極よりも、平面視における面積が一回り小さく形成されている。   As shown in FIG. 2, in the embodiment of the present invention, the frequency adjusting metal film W (frequency adjusting weight) is formed only on one main surface (surface 2a) of the surfaces forming the wide portion 23. The frequency of the crystal vibrating piece 2 is finely adjusted by reducing the mass of the frequency adjusting metal film W by irradiation with a beam such as a laser beam or an ion beam. The frequency adjusting metal film W is formed so that the area in plan view is one size smaller than that of the leading electrode on the main surfaces of the wide portions 23, 23.
本発明は、その精神または主要な特徴から逸脱することなく、他のいろいろな形で実施することができる。そのため、上述の実施の形態はあらゆる点で単なる例示にすぎず、限定的に解釈してはならない。本発明の範囲は特許請求の範囲によって示すものであって、明細書本文には、なんら拘束されない。さらに、特許請求の範囲の均等範囲に属する変形や変更は、全て本発明の範囲内のものである。   The present invention can be embodied in various other forms without departing from the spirit or the main characteristics thereof. Therefore, the above-described embodiments are merely examples in all respects and should not be limitedly interpreted. The scope of the present invention is defined by the scope of the claims, and is not restricted by the text of the specification. Furthermore, all modifications and changes belonging to the equivalent scope of the claims are within the scope of the present invention.
音叉型圧電振動片および音叉型圧電振動子の量産に適用できる。   It can be applied to mass production of tuning fork type piezoelectric vibrating reeds and tuning fork type piezoelectric vibrators.
1 音叉型水晶振動子
2 音叉型水晶振動片
20 基部
21,22 振動腕
23 幅広部
24 突出部
25,26 励振電極
27,28 引出電極
3 容器
G1,G2,G3,G4 長溝
T1,T2,T3,T4 突起部
1 tuning fork type crystal resonator 2 tuning fork type crystal vibrating piece 20 base 21, 22 vibrating arm 23 wide part 24 protruding part 25, 26 excitation electrode 27, 28 extraction electrode 3 container G1, G2, G3, G4 long groove T1, T2, T3 , T4 protrusion

Claims (3)

  1. 基部、
    上記基部から突出し励振電極が形成された複数の振動腕、
    上記振動腕の主面に形成された長溝と当該長溝の周囲の土手部と
    を備えており、
    上記長溝は、上記振動腕の突出する方向に沿った長手方向と、上記振動腕の突出する方向に直交する方向に沿った幅方向を具備しており、
    上記長溝の長手方向の基部側端部には、突起部が形成され、
    上記突起部は、上記土手部と肉厚が同じ平坦部と当該平坦部から長溝の中心に向かって次第に肉厚が薄くなる傾斜部とを備えており、
    上記平坦部の上記長溝の長手方向における突出寸法は、上記長溝の幅方向の幅寸法より短く形成され、
    上記振動椀の長溝の内部と、当該長溝に形成された突起部の平坦部と傾斜部とは、
    上記基部から上記長溝の基部側端部を経由して延出された上記励振電極の一部が形成されている、
    ことを特徴とする音叉型圧電振動片。
    base,
    A plurality of vibrating arms protruding from the base and having excitation electrodes formed thereon;
    It comprises a long groove formed on the main surface of the vibrating arm and a bank portion around the long groove,
    The long groove has a longitudinal direction along the protruding direction of the vibrating arm and a width direction along a direction orthogonal to the protruding direction of the vibrating arm,
    A protrusion is formed at the end of the long groove on the base side in the longitudinal direction,
    The projection portion includes a flat portion having the same thickness as the bank portion and an inclined portion having a thickness that gradually decreases from the flat portion toward the center of the long groove,
    The projecting dimension in the longitudinal direction of the long groove of the flat portion is formed shorter than the width dimension of the long groove in the width direction,
    The inside of the long groove of the vibrating bowl, the flat portion and the inclined portion of the protrusion formed in the long groove,
    A part of the excitation electrode extended from the base via the base side end of the long groove is formed,
    A tuning fork type piezoelectric vibrating piece characterized by the following.
  2. 上記突起部は、上記長溝の基部側端部の中央に形成されており、当該突起部の平坦部は長溝の中心に向かって次第に面積が狭まる
    ことを特徴とする請求項1に記載の音叉型圧電振動片。
    The tuning fork mold according to claim 1, wherein the protrusion is formed at the center of the end portion of the long groove on the base side, and the flat portion of the protrusion gradually narrows toward the center of the long groove. Piezoelectric vibrating piece.
  3. 請求項1、または請求項2に記載の音叉型圧電振動片が、容器の内部に搭載され収容されるとともに気密封止された音叉型圧電振動子。   A tuning fork type piezoelectric vibrator in which the tuning fork type piezoelectric vibrating piece according to claim 1 or 2 is mounted and housed inside a container and hermetically sealed.
JP2018197464A 2018-10-19 2018-10-19 Tuning fork type piezoelectric vibrating piece and tuning fork type piezoelectric vibrator using tuning fork type piezoelectric vibrating piece Pending JP2020065223A (en)

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