JPH03243011A - Piezo-electric resonator - Google Patents

Piezo-electric resonator

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Publication number
JPH03243011A
JPH03243011A JP4070490A JP4070490A JPH03243011A JP H03243011 A JPH03243011 A JP H03243011A JP 4070490 A JP4070490 A JP 4070490A JP 4070490 A JP4070490 A JP 4070490A JP H03243011 A JPH03243011 A JP H03243011A
Authority
JP
Japan
Prior art keywords
case
base
elastic material
piezoelectric substrate
resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4070490A
Other languages
Japanese (ja)
Inventor
Yasuhiro Tanaka
田中 康廣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP4070490A priority Critical patent/JPH03243011A/en
Publication of JPH03243011A publication Critical patent/JPH03243011A/en
Pending legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To attain attenuation up to degree to be practically neglected by the means of spurious dumping by filling the recessed part of a case storing a piezo-electric base with an elastic material so that the periphery of the base is covered with the elastic material. CONSTITUTION:The recessed part 4a of the case 4 is filled with the elastic material 10 so that the periphery of the piezo electric base 1 is covered with the material 10. Melted elastic resin is allowed to flow from the aperture part of the case 4 into the recessed part 4a until the recessed part 4a is completely filled with the resin. Since the base 1 is vertically stored in the case 4, the front and back faces of the base 1 can be efficiently covered with the pouring elastic resin. Since the area of the lower end face of the base 1 is reduced, the sneaking quantity of the resin around the base 1 can be reduced and the formation of an air reservoir can be suppressed. Although the vibration of a main frequency band generated on the base 1 by the dumping of the elastic material 10 is slightly dumped, spurious dumping more than the practical vibration dumping is executed and a superior resonator can be obtained.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、フィルタ回路、トラップ回路等に使用される
圧電共振子に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a piezoelectric resonator used in filter circuits, trap circuits, and the like.

従来の技術と課題 従来、この種の圧電共振子としては第13図〜第15図
に示すものが知られている。この共振子は、圧電体基板
31、圧電体基板31を収納している絶縁ケース35及
び封止蓋36から構成されている。
2. Description of the Related Art Conventionally, as this type of piezoelectric resonator, those shown in FIGS. 13 to 15 are known. This resonator is composed of a piezoelectric substrate 31, an insulating case 35 housing the piezoelectric substrate 31, and a sealing lid 36.

圧電体基板31は、その表裏面に振動電極32a。The piezoelectric substrate 31 has vibrating electrodes 32a on its front and back surfaces.

32bが形成きれている。この圧電体基板31は、絶縁
ケース35に水平に収納きれている。振動電極32a、
 32bは絶縁ケース35に形成されている引出し電極
33a、 33bに半田34.34を介して接続してい
る。
32b is completely formed. This piezoelectric substrate 31 is housed horizontally in an insulating case 35. vibrating electrode 32a,
32b is connected to lead electrodes 33a and 33b formed on the insulating case 35 via solders 34 and 34.

封止蓋36は、絶縁ケース35の開口端に接着剤によっ
て固着されている。さらに共振子の両端部には外部電極
38a、 38bがそれぞれ引出し電極33a、 33
bに電気的に接続された状態で形成されている。
The sealing lid 36 is fixed to the open end of the insulating case 35 with an adhesive. Furthermore, external electrodes 38a and 38b are provided at both ends of the resonator, respectively, leading electrodes 33a and 33.
It is formed in a state where it is electrically connected to b.

ところで、この共振子の共振周波数特性には寄生振動、
いわゆるスプリアスが発生することが知られている。こ
のためこの共振子は発振回路等には使用できるが、フィ
ルタ回路やトラップ回路等には使用できなかった。
By the way, the resonant frequency characteristics of this resonator include parasitic vibration,
It is known that so-called spurious signals occur. For this reason, this resonator can be used for oscillation circuits, etc., but cannot be used for filter circuits, trap circuits, etc.

そこで、本発明の課題は、共振周波数特性においてスプ
リアスが発生せず、かつ製造が簡単な圧電共振子を提供
することにある。
SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a piezoelectric resonator that does not generate spurious in its resonance frequency characteristics and is easy to manufacture.

課 を解決するための手段と作用 以上の課題を解決するため、本発明に係る圧1共振子は
、振動電極を設けた圧電体基板と、凹部を設けたケース
とを備え、前記ケースの凹部に前記圧電体基板を収納し
、かつ、圧電体基板の周囲を覆うようにケースの凹部に
弾性材を充填したことを特徴とする。
Means and Function for Solving the Problems In order to solve the above problems, a piezoelectric resonator according to the present invention includes a piezoelectric substrate provided with a vibrating electrode, and a case provided with a recess, and the recess of the case The piezoelectric substrate is housed in the case, and the concave portion of the case is filled with an elastic material so as to cover the periphery of the piezoelectric substrate.

以上の構成により、圧電体基板の周囲を覆った弾性材の
ダンピング作用によって圧電体基板に生しているスプリ
アスが実用上無視できる程度まで減衰する。
With the above configuration, the spurious generated in the piezoelectric substrate is attenuated to a practically negligible extent by the damping effect of the elastic material surrounding the piezoelectric substrate.

弾性材としては例えはシリコンコム等が用いられる。シ
リコンゴム等は溶融状態としたものをケスの凹部に流し
込まれるが、この場合、本発明に係る圧電共振子は、ケ
ースの凹部に開口面と圧電体基板の板厚方向とが平行に
なるように、前記圧電体基板を前記ケースの凹部に収納
することが望ましい。即ち、圧電体基板がケースに対し
て垂直状態で収納されるため、溶融状態にある弾性材が
ケースの凹部に充填される際に圧電体基板を回り込まな
ければならない量が少なくて済む。従って、空気溜が形
成されにくく、圧電体基板の周囲が完全に弾性材によっ
て覆われる。
As the elastic material, for example, silicone comb or the like is used. Molten silicone rubber or the like is poured into the recess of the case. In this case, the piezoelectric resonator according to the present invention is poured into the recess of the case so that the opening surface and the thickness direction of the piezoelectric substrate are parallel to each other. Preferably, the piezoelectric substrate is housed in a recess of the case. That is, since the piezoelectric substrate is stored perpendicularly to the case, the amount of molten elastic material that must go around the piezoelectric substrate when filling the recess of the case can be reduced. Therefore, air pockets are less likely to be formed, and the periphery of the piezoelectric substrate is completely covered with the elastic material.

実施例 以下、本発明に係る圧電共振子の実施例を添付図面を参
照して説明する。
Embodiments Hereinafter, embodiments of a piezoelectric resonator according to the present invention will be described with reference to the accompanying drawings.

[第1実施例、第1図〜第4図] 第1図は共振子の正面から見た垂直断面図、第2図は右
側面から見た垂直断面図、第3図は平面図である。共振
子は、圧電体基板1、この圧電体基板1を収納している
ケース4及び圧電体基板1の周囲を覆っている弾性材1
0から構成きれている。
[First Example, Figures 1 to 4] Figure 1 is a vertical sectional view of the resonator as seen from the front, Figure 2 is a vertical sectional view of the resonator as seen from the right side, and Figure 3 is a plan view. . The resonator includes a piezoelectric substrate 1, a case 4 housing the piezoelectric substrate 1, and an elastic material 1 covering the piezoelectric substrate 1.
It is configured from 0.

圧電体基板1は、その表裏面に振動電極2a、 2bが
形成きれている。振動電極2a、2bはAg、Ag−P
d等のペーストを塗布等によって形成される。この圧電
体基板1の振動モードは厚みすべり振動である。
The piezoelectric substrate 1 has vibrating electrodes 2a and 2b formed on its front and back surfaces. The vibrating electrodes 2a and 2b are Ag and Ag-P.
It is formed by applying a paste such as d. The vibration mode of this piezoelectric substrate 1 is thickness shear vibration.

絶縁性ケース4は凹部4aを有し、この凹部4aの左右
の両側壁面には切り込み5,5が設けられ、この切り込
み5,5をガイドにして圧電体基板1が横長の状態で垂
直に収納きれている。凹部4aの底壁面の左右両側には
段差6,6が設けられ、圧電体基板1の両端部を支持し
て振動部分が底壁面に接触しないようにしている。
The insulating case 4 has a recess 4a, and cuts 5, 5 are provided on the left and right side walls of the recess 4a, and the piezoelectric substrate 1 is stored vertically in a horizontally long state using the cuts 5, 5 as a guide. It's broken. Steps 6, 6 are provided on both left and right sides of the bottom wall surface of the recess 4a to support both ends of the piezoelectric substrate 1 to prevent the vibrating portion from contacting the bottom wall surface.

ケース4の両側及び切り込み5,5にはスバ・ンタ、あ
るいは蒸着等の方法により引出し電極7a。
Extracting electrodes 7a are formed on both sides of the case 4 and in the notches 5, 5 by a method such as sintering or vapor deposition.

7bが形成されている。この引出し電極7a、 7bは
共振子をプリント配線板等に取り付ける際の取付け1極
となるものである。振動1極2a、 2bは半田9゜9
を介して引出し電極7a、 7bに接続している。
7b is formed. These extraction electrodes 7a and 7b serve as one mounting pole when the resonator is mounted on a printed wiring board or the like. Vibration 1 pole 2a, 2b is solder 9°9
It is connected to extraction electrodes 7a and 7b via.

弾性材lOはケース4の凹部4aに充填されていて、圧
電体基板1の周囲を覆っている。弾性材10には、例え
ばシリコンゴム等の弾性樹脂が使用される。
The elastic material IO is filled in the recess 4a of the case 4 and covers the circumference of the piezoelectric substrate 1. For the elastic material 10, an elastic resin such as silicone rubber is used, for example.

溶融状態の弾性樹脂は、ケース4の開口部から凹部4a
が樹脂で完全に充填されるまで流し込まれる。
The molten elastic resin flows from the opening of the case 4 to the recess 4a.
is poured until it is completely filled with resin.

圧電体基板1はケース4に対して垂直状態で収納されて
いるため、流し込まれた弾性樹脂は効率よく圧電体基板
lの表裏面を覆うことができる。しかも、圧電体基板1
の下側の端面の面積が小さいため、弾性樹脂は圧電体基
板1を回り込まなければならない量が少なくて済み、空
気溜を形成しにくい。流し込まれた弾性樹脂は、乾燥工
程を経て弾性材10になる。
Since the piezoelectric substrate 1 is housed vertically in the case 4, the poured elastic resin can efficiently cover the front and back surfaces of the piezoelectric substrate 1. Moreover, the piezoelectric substrate 1
Since the area of the lower end surface is small, the amount of elastic resin that must go around the piezoelectric substrate 1 is small, making it difficult to form air pockets. The poured elastic resin becomes the elastic material 10 through a drying process.

こうして得られた圧電共振子は、弾性材10によって圧
電体基板1を覆っているため、外界からの機械的、熱的
ストレスが少ない状況下で使用される場合等は封止蓋を
必要としない。圧電共振子は圧電体基板1の周囲を覆っ
ている弾性材10のダンピング作用によって、圧電体基
板1に生じているメインの周波数帯域の振動が若干ダン
ピングするものの、それ以上にスプリアスのダンピング
が行なわれて実用上無視できる程度まで減衰するので、
共振周波数特性が優れた圧電共振子となる。
Since the piezoelectric resonator thus obtained covers the piezoelectric substrate 1 with the elastic material 10, it does not require a sealing lid when used under conditions with little mechanical or thermal stress from the outside world. . In the piezoelectric resonator, vibrations in the main frequency band occurring in the piezoelectric substrate 1 are slightly damped due to the damping effect of the elastic material 10 covering the periphery of the piezoelectric substrate 1, but spurious waves are damped more than that. and is attenuated to a point where it can be ignored in practical terms.
This results in a piezoelectric resonator with excellent resonance frequency characteristics.

第4図は本実施例をフィルタに適用した場合のフィルタ
の共振周波数特性を測定した結果を示すグラフである。
FIG. 4 is a graph showing the results of measuring the resonance frequency characteristics of a filter when this embodiment is applied to the filter.

縦軸は減衰量、横軸は周波数をとっている。図中実線1
5が本実施例に係るフィルタの共振周波数特性を示して
いる。このフィルタは、メインの周波数帯域が4.5肚
で、弾性材10にはシリコンゴムを使用した。比較のた
め、従来の圧電共振子の共振周波数特性を点線16で示
している。
The vertical axis shows the amount of attenuation, and the horizontal axis shows the frequency. Solid line 1 in the diagram
5 shows the resonant frequency characteristic of the filter according to this example. This filter had a main frequency band of 4.5 degrees, and silicone rubber was used as the elastic material 10. For comparison, the resonant frequency characteristic of a conventional piezoelectric resonator is shown by a dotted line 16.

第4図はメインの4.5MHz付近の振動が若干ダンピ
ングするものの、それ以上にスプリアスのダンピングが
行なわれていることを示している。
FIG. 4 shows that although the main vibration around 4.5 MHz is slightly damped, spurious damping is occurring more than that.

[第2実施例、第5図〜第7図] 第5図は圧電共振子の正面から見た垂直断面図、第6図
は右側面から見た垂直断面図、第7図は平面図である。
[Second Example, Figures 5 to 7] Figure 5 is a vertical sectional view of the piezoelectric resonator as seen from the front, Figure 6 is a vertical sectional view of the piezoelectric resonator as seen from the right side, and Figure 7 is a plan view. be.

共振子は圧電体基板21、この圧マ体基板21を収納し
ているケース24及び圧電体基板21の周囲を覆ってい
る弾性材30から構成されている。
The resonator is composed of a piezoelectric substrate 21, a case 24 housing the piezoelectric substrate 21, and an elastic material 30 covering the piezoelectric substrate 21.

表裏面に振動T極22a、 22bが形成きれた圧電体
基板21は、ケース24の凹部24aに横長の状態で水
平に収納されている。ケース24の両イ則には引出しI
極25a、 25bが形成されている。振動T極22a
、 22bは半田26.26を介して引出しT極25a
、 25bに接続している6弾性材30はケース24の
凹部24aに充填されていて、圧電体基板21の周囲を
覆っている。
The piezoelectric substrate 21, which has vibrating T-poles 22a and 22b formed on its front and back surfaces, is housed horizontally in a recess 24a of the case 24 in a horizontally elongated state. Drawer I for both A rules in case 24
Poles 25a and 25b are formed. Vibration T pole 22a
, 22b is connected to the lead-out T pole 25a via solder 26.26.
, 25b is filled in the recess 24a of the case 24, and covers the piezoelectric substrate 21.

弾性材30の材料である溶融状態の弾性樹脂は、ケース
24の開口部から流し込まれる。この場合、圧T体基板
21はケース24に対して水平状態で収納されているた
め、圧T体基板21の下側面の面積が犬きく、その部分
に空気溜が発生するおそれがある。
Molten elastic resin, which is the material of the elastic material 30, is poured from the opening of the case 24. In this case, since the pressure T-board 21 is housed in a horizontal state with respect to the case 24, the area of the lower surface of the pressure T-board 21 is large, and there is a possibility that air pockets may occur in that area.

しかし、真空引き等の特別な手段を併用して充填すれば
、特に支障は生じない。
However, if special means such as vacuuming are used for filling, no particular problem will occur.

こうして得られた圧電共振子は、弾性材30のダンピン
グ作用によって、優れた共振周波数特性を有する。
The piezoelectric resonator thus obtained has excellent resonance frequency characteristics due to the damping effect of the elastic material 30.

[他の実施例] なお、本発明に係る圧電共振子は、前記実施例に限定す
るものではなく、その要旨の範囲内で種々に変更するこ
とができる。
[Other Examples] Note that the piezoelectric resonator according to the present invention is not limited to the above embodiments, and can be variously modified within the scope of the gist.

例えば、第1実施例において加工方法によっては第8図
、第9図に示すように充填形状が異なる弾性材10A、
 IOBが得られる。また、第10図、第11図、第1
2図のように、耐熱性、耐溶剤性に優れ、機械的強度の
強い材料で製作された封止蓋11A、 11B、 II
Cを設けているものであってもよい。
For example, in the first embodiment, depending on the processing method, the elastic material 10A has a different filling shape as shown in FIGS. 8 and 9;
IOB is obtained. Also, Figure 10, Figure 11, Figure 1
As shown in Figure 2, the sealing lids 11A, 11B, II are made of a material with excellent heat resistance, solvent resistance, and strong mechanical strength.
C may be provided.

このとき、各封止蓋11A、 IIB、 IICは充填
形状が異なる弾性材10C,IOD、 IOEと組み合
わされている。
At this time, each of the sealing lids 11A, IIB, and IIC is combined with elastic members 10C, IOD, and IOE having different filling shapes.

特に、第12図に示した圧電共振子の場合は変形したケ
ース4Aが使用されている。
In particular, in the case of the piezoelectric resonator shown in FIG. 12, a modified case 4A is used.

さらに、この封止蓋11A、 IIB、 IICは種類
の異なる材料を積層した多層構造のものであってもよい
Further, the sealing lids 11A, IIB, and IIC may have a multilayer structure in which different materials are laminated.

発明の効果 以上のように、本発明によれば、圧電体基板が収納きれ
たケースの凹部に弾性材を充填し、圧電体基板の周囲が
弾性材で覆われるようにしたため、弾性材のダンピング
作用によって圧電体基板に生じているメインの周波数帯
域の振動を若干ダンピングさせるものの、それ以上にス
プリアスのダンピングを行なって実用上無視できる程度
まで減衰させるので、共振周波数特性が優れた圧電共振
子が得られる。従って、この圧電共振子はフィルタ回路
やトラップ回路等に使用できる。しかも、外界からの機
械的、熱的ストレスが少ない状況下で圧T共振子を使用
する場合等は、封止蓋も不要であり、その結果、コスト
ダウンが図れる。
Effects of the Invention As described above, according to the present invention, the concave portion of the case in which the piezoelectric substrate is fully housed is filled with an elastic material so that the periphery of the piezoelectric substrate is covered with the elastic material, thereby reducing damping of the elastic material. Although this action slightly damps vibrations in the main frequency band occurring in the piezoelectric substrate, it also damps spurious components to a level that can be ignored in practical terms, making it possible to use a piezoelectric resonator with excellent resonance frequency characteristics. can get. Therefore, this piezoelectric resonator can be used for filter circuits, trap circuits, etc. Moreover, when the pressure-T resonator is used in a situation where there is little mechanical or thermal stress from the outside world, a sealing lid is not necessary, and as a result, costs can be reduced.

また、ケースの凹部開口面と圧電体基板の板厚方向とが
平行になるように、即ち圧電体基板をケースに対して垂
直状態で収納すれば、弾性材をケースの凹部に充填する
際に空気溜が形成されにくく、圧電体基板の周囲が完全
に弾性材によって覆われるので、作業性がよく、生産効
率がアップする。
In addition, if the piezoelectric substrate is stored perpendicular to the case so that the opening surface of the recess in the case is parallel to the thickness direction of the piezoelectric substrate, it will be easier to fill the recess in the case with the elastic material. Since air pockets are less likely to be formed and the piezoelectric substrate is completely covered with the elastic material, workability is improved and production efficiency is improved.

【図面の簡単な説明】[Brief explanation of drawings]

第1図ないし第3図は本発明の第1実施例である圧電共
振子を示し、第1図は圧電共振子の正面から見た垂直断
面図、第2図は右側面から見た垂直断面図、第3図は平
面図、第4図はこの圧電共振子の共振周波数特性を測定
した結果を示すグラフである。第5図ないし第7図は第
2実施例を示し、第5図、第6図、第7図はそれぞれ圧
電共振子の正面から見た垂直断面図、右側面から見た垂
直断面図、平面図である。第8図ないし第12図は第1
実施例の変形例を示し、第8図、第9図、第10図、第
11図、第12図はそれぞれ圧電共振子の右側面から見
た垂直断面図である。第13図ないし第15図は従来の
圧電共振子を示すもので、第13図、第14図、第15
図はそれぞれ圧電共振子の正面から見た垂直断面図、右
側面から見た垂直断面図、平面図である。 1・・・圧電体基板、2a、 2b・・・振動T極、4
,4A・・・ケース、4a−・凹部、10. IOA、
 IOB、 IOC,IOD、 IOE・・・弾性材、
21・・・圧電体基板、22a、 22b・・・振動マ
極、24・・・ケース、24a・・・凹部、30・・・
弾性材。
1 to 3 show a piezoelectric resonator according to a first embodiment of the present invention, FIG. 1 is a vertical sectional view of the piezoelectric resonator as seen from the front, and FIG. 2 is a vertical sectional view of the piezoelectric resonator as seen from the right side. 3 is a plan view, and FIG. 4 is a graph showing the results of measuring the resonance frequency characteristics of this piezoelectric resonator. 5 to 7 show the second embodiment, and FIG. 5, FIG. 6, and FIG. 7 are a vertical sectional view of the piezoelectric resonator as seen from the front, a vertical sectional view as seen from the right side, and a plan view, respectively. It is a diagram. Figures 8 to 12 are the first
Modifications of the embodiment are shown, and FIGS. 8, 9, 10, 11, and 12 are vertical cross-sectional views as viewed from the right side of the piezoelectric resonator. Figures 13 to 15 show conventional piezoelectric resonators, and Figures 13 to 15 show conventional piezoelectric resonators.
The figures are a vertical cross-sectional view as seen from the front, a vertical cross-sectional view as seen from the right side, and a plan view, respectively, of the piezoelectric resonator. 1... Piezoelectric substrate, 2a, 2b... Vibration T pole, 4
, 4A...Case, 4a--Concavity, 10. IOA,
IOB, IOC, IOD, IOE...elastic material,
21... Piezoelectric substrate, 22a, 22b... Vibration maple, 24... Case, 24a... Concave portion, 30...
elastic material.

Claims (2)

【特許請求の範囲】[Claims] 1.振動電極を設けた圧電体基板と、凹部を設けたケー
スとを備え、前記ケースの凹部に前記圧電体基板を収納
し、かつ、圧電体基板の周囲を覆うようにケースの凹部
に弾性材を充填したことを特徴とする圧電共振子。
1. A piezoelectric substrate provided with a vibrating electrode and a case provided with a recess are provided, the piezoelectric substrate is housed in the recess of the case, and an elastic material is provided in the recess of the case so as to cover the circumference of the piezoelectric substrate. A piezoelectric resonator characterized by being filled.
2.ケースの凹部に開口面と圧電体基板の板厚方向とが
平行になるように、前記圧電体基板を前記ケースの凹部
に収納したことを特徴とする請求項1記載の圧電共振子
2. 2. The piezoelectric resonator according to claim 1, wherein the piezoelectric substrate is housed in the recess of the case so that the opening surface of the case is parallel to the thickness direction of the piezoelectric substrate.
JP4070490A 1990-02-20 1990-02-20 Piezo-electric resonator Pending JPH03243011A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4070490A JPH03243011A (en) 1990-02-20 1990-02-20 Piezo-electric resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4070490A JPH03243011A (en) 1990-02-20 1990-02-20 Piezo-electric resonator

Publications (1)

Publication Number Publication Date
JPH03243011A true JPH03243011A (en) 1991-10-30

Family

ID=12587963

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4070490A Pending JPH03243011A (en) 1990-02-20 1990-02-20 Piezo-electric resonator

Country Status (1)

Country Link
JP (1) JPH03243011A (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5011639A (en) * 1973-06-01 1975-02-06
JPS57118419A (en) * 1981-01-14 1982-07-23 Fujitsu Ltd Flat pack type oscillating circuit parts
JPS61164316A (en) * 1985-01-16 1986-07-25 Murata Mfg Co Ltd Manufacture of piezoelectric resonator
JPS6369296A (en) * 1986-09-10 1988-03-29 株式会社村田製作所 Electronic parts and manufacture of the same
JPS63248211A (en) * 1987-04-03 1988-10-14 Murata Mfg Co Ltd Electronic component and its manufacture

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5011639A (en) * 1973-06-01 1975-02-06
JPS57118419A (en) * 1981-01-14 1982-07-23 Fujitsu Ltd Flat pack type oscillating circuit parts
JPS61164316A (en) * 1985-01-16 1986-07-25 Murata Mfg Co Ltd Manufacture of piezoelectric resonator
JPS6369296A (en) * 1986-09-10 1988-03-29 株式会社村田製作所 Electronic parts and manufacture of the same
JPS63248211A (en) * 1987-04-03 1988-10-14 Murata Mfg Co Ltd Electronic component and its manufacture

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