JP3331574B2 - High frequency piezoelectric vibration device - Google Patents
High frequency piezoelectric vibration deviceInfo
- Publication number
- JP3331574B2 JP3331574B2 JP07169494A JP7169494A JP3331574B2 JP 3331574 B2 JP3331574 B2 JP 3331574B2 JP 07169494 A JP07169494 A JP 07169494A JP 7169494 A JP7169494 A JP 7169494A JP 3331574 B2 JP3331574 B2 JP 3331574B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- piezoelectric vibration
- region
- vibration device
- extraction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は通信機器の基準発振源、
あるいはマイクロコンピュータのクロック源として用い
られる水晶振動子、水晶フィルタ等の圧電振動デバイス
に関し、特に薄型で、高周波化に対応した圧電振動デバ
イスに関するものである。The present invention relates to a reference oscillation source for communication equipment,
Also, the present invention relates to a piezoelectric vibrating device such as a quartz oscillator or a quartz filter used as a clock source of a microcomputer, and particularly to a thin piezoelectric vibrating device adapted to a high frequency.
【0002】[0002]
【従来の技術】通信機器の高周波数化、あるいはマイク
ロコンピュータの動作周波数の高周波数化に伴い、水晶
振動子、水晶フィルタ等の圧電振動デバイスも高周波数
化対応が求められている。一般に、高周波数化に対応し
た水晶板として、ATカット水晶板の厚みすべり振動が
よく用いられており、周知のとおりその周波数は厚さで
決定され、周波数と厚さは反比例する。例えば、4.2
MHzの周波数を得ようとする場合、水晶板の厚さは約
0.4mmであるが、20MHzの周波数を得ようとす
る場合、水晶板の厚さは約0.08mmになる。このよ
うに周波数が高くなるとその厚さが薄くなり、切断、研
磨等の水晶板自体の加工が困難になってくる。このよう
な問題を解決するために、水晶板の厚さは基本波の厚さ
で、3倍,5倍等の高次の周波数を得ようとする高調波
発振を用いる場合もあるが、CI値(クリスタルインピ
ーダンス)が高くなり、周辺回路が複雑となりその結果
全体としての小型化が困難である等、適用する電子機器
によっては要求される電気的特性が得られない場合があ
った。2. Description of the Related Art As the frequency of communication equipment and the operating frequency of microcomputers increase, piezoelectric vibrating devices such as quartz oscillators and quartz filters are also required to support higher frequencies. In general, a thickness shear vibration of an AT-cut quartz plate is often used as a quartz plate corresponding to a higher frequency, and as is well known, the frequency is determined by the thickness, and the frequency and the thickness are inversely proportional. For example, 4.2
When trying to obtain a frequency of MHz, the thickness of the quartz plate is about 0.4 mm, but when trying to obtain a frequency of 20 MHz, the thickness of the quartz plate is about 0.08 mm. As the frequency increases, the thickness of the crystal plate decreases, and it becomes difficult to process the quartz plate itself such as cutting and polishing. In order to solve such a problem, the thickness of the quartz plate is the thickness of the fundamental wave, and in some cases, harmonic oscillation is used to obtain higher-order frequencies such as three times and five times. The required electrical characteristics may not be obtained depending on the applied electronic equipment, for example, the value (crystal impedance) becomes high, the peripheral circuit becomes complicated, and it is difficult to reduce the size as a whole.
【0003】このような問題を解決するために、図14
に示すように、水晶板の中央部分に凹部を設け、この凹
部に薄肉加工した振動領域を設定し、その周囲の厚肉部
分で振動領域を補強する構成が発明されている。図14
は従来例を示す内部断面図であり、薄肉化された凹部9
1とその周囲に形成された厚肉部92を有する水晶板9
に、励振電極9aを引出電極9bにより凹部から厚肉部
端部まで引き出した構成である。このような構成を採用
することにより、振動領域を従来よりもかなり薄くする
ことでき、従来では高調波周波数の領域であった40M
Hz以上の周波数を基本波振動で実現している。To solve such a problem, FIG.
As shown in (1), there has been invented a configuration in which a concave portion is provided in the center portion of a quartz plate, a vibration region is formed in the concave portion, and the vibration region is reinforced by a thick portion around the thin region. FIG.
FIG. 9 is an internal cross-sectional view showing a conventional example, in which a thinned recess 9 is shown.
1 and a quartz plate 9 having a thick portion 92 formed therearound
In addition, the configuration is such that the excitation electrode 9a is drawn out from the concave portion to the end of the thick portion by the extraction electrode 9b. By adopting such a configuration, the vibration region can be made considerably thinner than in the past, and the frequency range of 40M, which is conventionally the region of the harmonic frequency,
The frequency of not less than Hz is realized by the fundamental vibration.
【0004】[0004]
【発明が解決しようとする課題】しかしながら、上記構
成では、凹部を有するがゆえに蒸着等による電極形成が
困難で、特に直立する内壁部分に電極材料が形成されに
くく、また薄肉部の励振電極9aから厚肉部へ延びる引
出電極9bは水晶板の鋭利なエッジ部分を通るため、こ
の部分で電極の一部あるいは全部が切断され導通不良を
起こすことがあった。特に高周波数化(すなわち薄肉
化)された水晶振動子には、その励起された振動を極力
減衰させないように電極を通常よりも薄膜化することが
要求され、このような点からも、電極の切断を助長させ
る要因となっていた。However, in the above-described structure, it is difficult to form an electrode by vapor deposition or the like due to the presence of the concave portion. In particular, it is difficult to form an electrode material on the upright inner wall portion, and the thin-walled portion of the excitation electrode 9a Since the extraction electrode 9b extending to the thick portion passes through the sharp edge portion of the quartz plate, a part or all of the electrode may be cut at this portion, causing a conduction failure. In particular, a crystal oscillator having a higher frequency (that is, thinner) is required to make the electrode thinner than usual so as not to attenuate the excited vibration as much as possible. This was a factor that encouraged cutting.
【0005】本発明は上記問題点を解決するためになさ
れたもので、電極切断等の事故の発生しにくい信頼性の
高い圧電振動デバイスを提供することを目的とするもの
である。また、各電極形成自体を容易にし、歩留まり並
びに生産性を向上させることも目的とする。The present invention has been made to solve the above problems, and an object of the present invention is to provide a highly reliable piezoelectric vibrating device in which accidents such as electrode disconnection do not easily occur. Another object is to facilitate the formation of each electrode itself and to improve the yield and productivity.
【0006】[0006]
【課題を解決するための手段】上記問題点を解決するた
めに、請求項1に示した発明は、圧電板のほぼ中央部分
の表面または裏面または表裏両面に凹部を設けることに
より、薄肉で表裏に少なくとも一対の励振電極が形成さ
れた圧電振動領域と、この圧電振動領域に続いて一体的
にその周囲に設けられた厚肉の補強部を形成した高周波
圧電振動デバイスにおいて、この補強部の一部に前記圧
電振動領域とほぼ同じ厚さの電極引き出し領域を設け、
この電極引き出し領域に前記励振電極と電気的に接続さ
れる引出電極を形成したことを特徴とする高周波圧電振
動デバイスである。In order to solve the above-mentioned problems, the invention according to claim 1 is to provide a thin plate by forming a concave portion on the front surface, the back surface, or both the front and back surfaces of a substantially central portion of the piezoelectric plate. In a high-frequency piezoelectric vibration device in which at least a pair of excitation electrodes are formed, and a thick reinforcing portion integrally formed around the piezoelectric vibrating region is formed following the piezoelectric vibrating region. Provide an electrode lead-out area of substantially the same thickness as the piezoelectric vibration area in the portion,
An extraction electrode electrically connected to the excitation electrode is formed in the electrode extraction region.
【0007】また、請求項2による発明は、前記電極引
き出し領域および前記引出電極が圧電板の外周端部まで
形成され、この引出電極部分で外部と電気的接続されて
いることを特徴とする特許請求項1記載の高周波圧電振
動デバイスである。The invention according to claim 2 is characterized in that the electrode lead region and the lead electrode are formed up to the outer peripheral end of the piezoelectric plate, and the lead electrode portion is electrically connected to the outside. A high-frequency piezoelectric vibration device according to claim 1.
【0008】また、請求項3による発明は、前記電極引
き出し領域および前記引出電極が圧電板の外周端部近傍
まで形成され、この引出電極部分で外部と電気的接続さ
れていることを特徴とする特許請求項1記載の高周波圧
電振動デバイスである。The invention according to claim 3 is characterized in that the electrode extraction region and the extraction electrode are formed up to the vicinity of the outer peripheral end of the piezoelectric plate, and the extraction electrode portion is electrically connected to the outside. A high-frequency piezoelectric vibration device according to claim 1.
【0009】また、請求項4による発明は、前記電極引
き出し領域の少なくとも一部に埋設材を設けたことを特
徴とする特許請求項1乃至3のいずれかに記載の高周波
圧電振動デバイスである。The invention according to claim 4 is the high-frequency piezoelectric vibration device according to any one of claims 1 to 3, wherein a burying material is provided in at least a part of the electrode lead-out region.
【0010】また、請求項5による発明は、埋設材が導
電性接合材であることを特徴とする特許請求項4記載の
高周波圧電振動デバイスである。The invention according to claim 5 is the high-frequency piezoelectric vibration device according to claim 4, wherein the burying material is a conductive bonding material.
【0011】また、請求項6による発明は、前記電極引
き出し領域の少なくとも一部に狭幅部を設け、埋設材の
電極引きだし部外への流出を防止したことを特徴とする
特許請求項4または5記載の高周波圧電振動デバイスで
ある。The invention according to claim 6 is characterized in that a narrow portion is provided in at least a part of the electrode lead-out area to prevent the buried material from flowing out of the electrode lead-out part. A high-frequency piezoelectric vibration device according to item 5.
【0012】また、請求項7による発明は、補強部の少
なくとも一部に導電材料からなる補強部材を設けたこと
を特徴とする特許請求項1乃至6のいずれかに記載の高
周波圧電振動デバイスである。導電性材料は、金,銀等
の金属膜、導電性樹脂材料、あるいはこれらの組み合わ
せ等を例示することができる。The invention according to claim 7 is the high-frequency piezoelectric vibration device according to any one of claims 1 to 6, wherein a reinforcing member made of a conductive material is provided on at least a part of the reinforcing portion. is there. Examples of the conductive material include a metal film such as gold and silver, a conductive resin material, and a combination thereof.
【0013】また、請求項8による発明は、前記補強部
材を補強部にそってほぼ周状に形成したことを特徴とす
る特許請求項7記載の高周波圧電振動デバイスである。The invention according to claim 8 is the high-frequency piezoelectric vibration device according to claim 7, wherein the reinforcing member is formed substantially circumferentially along the reinforcing portion.
【0014】[0014]
【課題を解決するための手段】本発明によれば、補強部
の一部に前記圧電振動領域とほぼ同じ厚さの電極引き出
し領域を設け、この電極引き出し領域に前記励振電極と
電気的に接続される引出電極を形成しているので、引出
電極がエッジ部分を通ることがなく、厚さ方向に屈曲し
ないので、エッジ部分での電極切断のおそれがなくな
る。また、振動領域と補強部で形成される凹部内壁に電
極形成する必要がないので、電極形成自体が容易であ
る。According to the present invention, an electrode lead-out region having substantially the same thickness as the piezoelectric vibration region is provided in a part of the reinforcing portion, and the electrode lead-out region is electrically connected to the excitation electrode. Since the extraction electrode is formed, the extraction electrode does not pass through the edge portion and does not bend in the thickness direction, so that there is no risk of electrode cutting at the edge portion. In addition, since it is not necessary to form an electrode on the inner wall of the concave portion formed by the vibration region and the reinforcing portion, the electrode itself can be easily formed.
【0015】請求項4に示した発明によれば、電極引き
出し領域に設けられた埋設材が薄肉部分を一体となって
補強する。According to the fourth aspect of the present invention, the burying material provided in the electrode lead-out region integrally reinforces the thin portion.
【0016】請求項5に示した発明によれば、埋設材が
導電性接合材であるので、補強効果とともに、引出電極
と外部との電気的接続を援助する。According to the fifth aspect of the present invention, since the buried material is a conductive bonding material, it assists the electrical connection between the extraction electrode and the outside together with the reinforcing effect.
【0017】請求項6に示した発明によれば、引き出し
領域の少なくとも一部に設けられた狭幅部により、埋設
材の電極引きだし部外への流出を防止する。According to the sixth aspect of the present invention, the buried material is prevented from flowing out of the electrode lead-out portion by the narrow portion provided in at least a part of the lead-out region.
【0018】請求項7に示した発明によれば、補強部に
より圧電振動デバイスが補強されるとともに、補強部に
おける外部との接続箇所を自由に設定できる。According to the seventh aspect of the present invention, the piezoelectric vibrating device is reinforced by the reinforcing portion, and the connecting portion of the reinforcing portion with the outside can be set freely.
【0019】請求項8に示した発明によれば、補強部材
に導電性材料を用い、補強部にそってほぼ周状に形成し
ているので、補強作用とともに補強部における外部との
接続箇所を自由に設定できる。According to the eighth aspect of the present invention, since the reinforcing member is made of a conductive material and is formed in a substantially circumferential shape along the reinforcing portion, the connecting portion between the reinforcing portion and the outside is formed in the reinforcing portion. Can be set freely.
【0020】[0020]
【実施例】本発明の第1の実施例について水晶振動子を
例にとり、図面を参照して説明する。図1は本発明の第
1の実施例を示す分解斜視図であり、図2は図1の各構
成部分を収納し、蓋板で気密封止した状態を示す断面図
である。圧電体である水晶板1は、全体としてその板面
の中央部分の表裏両面が凹んだ凹形状を有している。凹
形の中央部分は薄肉で圧電振動領域11とされており、
表裏面に対向してアルミニウム等の励振電極11a,1
1aが設けられている。圧電振動領域11の外周部には
圧電振動領域に比較して数倍厚肉の補強部12が設けら
れるとともに、前記薄肉の圧電振動領域が外周部の対向
する2角部分(表面の一方の角と裏面の他方の角)に溝
状に延びた電極引きだし領域13,13が設けられてい
る。この電極引きだし領域13,13には、それぞれ引
出電極11b,11bが外周端部にまで形成されてい
る。なお、各部分の厚さは例えば90MHzの周波数を
得る場合、圧電振動領域の厚さは18μm,補強部の厚
さは80μmである。このように凹形の圧電振動領域あ
るいは溝状の電極引きだし領域はウェットエッチング
法、ドライエッチング法、あるいはサンドブラスト法等
により形成することができ、電極形成は真空蒸着法等に
より形成することができる。なお、各電極材料にはアル
ミニウム、銀等が用いられる。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described with reference to the drawings, taking a quartz oscillator as an example. FIG. 1 is an exploded perspective view showing a first embodiment of the present invention, and FIG. 2 is a sectional view showing a state in which the components of FIG. 1 are housed and hermetically sealed with a lid plate. The quartz plate 1, which is a piezoelectric body, has a concave shape in which both front and back surfaces at the center of the plate surface are depressed as a whole. The central part of the concave shape is thin and is a piezoelectric vibration region 11,
Excitation electrodes 11a, 1 made of aluminum or the like facing the front and back surfaces
1a is provided. An outer peripheral portion of the piezoelectric vibration region 11 is provided with a reinforcing portion 12 having a thickness several times larger than that of the piezoelectric vibration region, and the thin piezoelectric vibration region is formed by two opposite corner portions of the outer peripheral portion (one corner of the surface). And the other corner of the rear surface) are provided with electrode lead-out regions 13 extending in a groove shape. In the electrode extraction regions 13, extraction electrodes 11 b, 11 b are formed up to the outer peripheral end, respectively. When a frequency of, for example, 90 MHz is obtained for each portion, the thickness of the piezoelectric vibration region is 18 μm, and the thickness of the reinforcing portion is 80 μm. The concave piezoelectric vibration region or the groove-like electrode lead-out region can be formed by a wet etching method, a dry etching method, a sand blast method, or the like, and the electrodes can be formed by a vacuum evaporation method or the like. In addition, aluminum, silver, etc. are used for each electrode material.
【0021】水晶板1を収納するパッケージPはアルミ
ナ等のセラミックスからなり、水晶板収納部から外部へ
電極を導出する導出電極P1が設けられている。水晶板
をパッケージ内に収納し、引出電極13と導出電極P1
とを導電性接合材Sにて導電接合し、蓋板Cにてパッケ
ージ上面と気密接合して表面実装型の水晶振動子を得る
ことができる。なお、この実施例では溝状の電極引きだ
し領域には埋設材として導電性接合材S1が充填されて
おり、水晶板1全体の機械的強度を向上させている。ま
た、この電極引きだし領域は機械的強度が確保できれ
ば、表裏両面に設けても差し支えない。The package P for accommodating the quartz plate 1 is made of ceramics such as alumina, and is provided with a lead-out electrode P1 for leading an electrode from the quartz plate accommodating portion to the outside. The quartz plate is housed in the package, and the extraction electrode 13 and the extraction electrode P1
Are electrically conductively bonded by a conductive bonding material S, and airtightly bonded to the upper surface of the package by a cover plate C to obtain a surface-mount type crystal unit. In this embodiment, the groove-shaped electrode lead-out region is filled with a conductive bonding material S1 as a burying material, thereby improving the mechanical strength of the entire quartz plate 1. The electrode lead-out area may be provided on both front and back surfaces as long as mechanical strength can be secured.
【0022】本発明の第2の実施例について図面を参照
して説明する。図3は本発明の第2の実施例を示す斜視
図である。圧電体である水晶板1は、全体としてその板
面の中央部分の表裏両面が凹んだ凹形状を有している。
凹形の中央部分は薄肉で圧電振動領域14とされてお
り、表裏面に対向してアルミニウム等の励振電極14
a,14aが設けられている。圧電振動領域14の外周
部には圧電振動領域に比較して数倍厚肉の補強部15が
設けられるとともに、前記薄肉の圧電振動領域が外周部
の対向する2辺に(表面の一方の辺と裏面の他方の辺)
に溝状に延びた電極引きだし領域16,16が設けられ
ている。この電極引きだし領域16,16には、それぞ
れ引出電極14b,14bが外周端部にまで形成されて
いる。このように対向する辺に電極引きだし領域を形成
することにより、水晶板の機械的強度が向上する。ま
た、上記実施例のように電極引きだし領域に埋設材を充
填してもよい。A second embodiment of the present invention will be described with reference to the drawings. FIG. 3 is a perspective view showing a second embodiment of the present invention. The quartz plate 1, which is a piezoelectric body, has a concave shape in which both front and back surfaces at the center of the plate surface are depressed as a whole.
The central portion of the concave shape is a thin-walled piezoelectric vibrating region 14, which is opposed to the front and back surfaces of the excitation electrode 14 made of aluminum or the like.
a, 14a are provided. An outer peripheral portion of the piezoelectric vibration region 14 is provided with a reinforcing portion 15 having a thickness several times larger than that of the piezoelectric vibration region, and the thin piezoelectric vibration region is provided on two opposite sides of the outer peripheral portion (one side of the surface). And the other side of the back)
Are provided with electrode lead regions 16 extending in a groove shape. In the electrode lead-out areas 16, 16, lead-out electrodes 14b, 14b are formed up to the outer peripheral end, respectively. By forming the electrode lead-out region on the opposite side in this way, the mechanical strength of the quartz plate is improved. Also, as in the above embodiment, the buried material may be filled in the electrode lead-out region.
【0023】本発明の第3の実施例について図面を参照
して説明する。図4は本発明の第3の実施例を示す斜視
図であり、図5は図4のA−A断面図である。この実施
例は特許請求項6を説明するものであり、電極引き出し
領域に形成された狭幅部の例を示している。圧電体であ
る水晶板2は、全体としてその板面の中央部分の片面の
みが凹んだ凹形状を有している。凹形の中央部分は薄肉
で圧電振動領域21とされており、表裏面に対向してア
ルミニウム等の励振電極21a,21aが設けられてい
る。圧電振動領域21の外周部には圧電振動領域に比較
して数倍厚肉の補強部22が設けられるとともに、前記
薄肉の圧電振動領域が外周部の対向する2角部分に溝状
に延びた電極引きだし領域23,24が設けられてい
る。この電極引きだし領域23,24には、それぞれ引
出電極21b,21bが外周端部にまで形成されてい
る。電極引きだし領域23には、外周端部寄りと圧電振
動領域寄りにそれぞれ対向して突起部23aと23b,
23cと23dが設けられ、狭幅部を形成している。こ
の各突起部の形成は、水晶板加工時に一体的に形成して
もよいし、加工後に接合材等を塗布し形成してもよい。
電極引きだし領域24は、電極引きだし領域23より狭
幅に形成されており、その中央部分に埋設材等が溜まる
溜まり部24aが形成されている。これらそれぞれの狭
幅部の形成により、埋設材あるいはパッケージへの接合
の際に用いる導電性接合材が電極引きだし領域から外へ
の流出を阻止することができ、圧電振動を阻害すること
等を防止する。A third embodiment of the present invention will be described with reference to the drawings. FIG. 4 is a perspective view showing a third embodiment of the present invention, and FIG. 5 is a sectional view taken along line AA of FIG. This embodiment is for describing claim 6 and shows an example of a narrow portion formed in an electrode lead-out region. Quartz plate 2, which is a piezoelectric body, has a concave shape in which only one surface at the center of the plate surface is concave as a whole. The central portion of the concave shape is thin and forms a piezoelectric vibration region 21, and excitation electrodes 21a, 21a made of aluminum or the like are provided facing the front and back surfaces. The outer peripheral portion of the piezoelectric vibration region 21 is provided with a reinforcing portion 22 having a thickness several times larger than that of the piezoelectric vibration region, and the thin piezoelectric vibration region extends in a groove shape at two opposite corners of the outer peripheral portion. Electrode extraction regions 23 and 24 are provided. In the electrode extraction regions 23 and 24, extraction electrodes 21b and 21b are formed up to the outer peripheral end, respectively. The protruding portions 23a and 23b are opposed to the electrode extraction region 23 near the outer peripheral end and the piezoelectric vibration region, respectively.
23c and 23d are provided to form a narrow portion. The projections may be formed integrally during crystal plate processing, or may be formed by applying a bonding material or the like after the processing.
The electrode lead-out region 24 is formed to have a width smaller than that of the electrode lead-out region 23, and a pool portion 24a for storing a buried material or the like is formed in a central portion thereof. The formation of each of these narrow portions can prevent the conductive bonding material used for bonding to the buried material or package from flowing out of the electrode lead-out area, preventing the piezoelectric vibration from being hindered, etc. I do.
【0024】本発明の第4の実施例について図面を参照
して説明する。図6は本発明の第4の実施例を示す斜視
図である。この実施例は特許請求項3を説明するもので
あり、パッケージQとの接続関係についても言及してい
る。圧電体である水晶板3は、全体としてその板面の中
央部分の表裏両面が凹んだ凹形状を有している。凹形の
中央部分は薄肉で圧電振動領域31が形成されており、
表裏面に対向してアルミニウム等の励振電極31a,3
1aが設けられている。圧電振動領域31の外周部には
圧電振動領域に比較して数倍厚肉の補強部32が設けら
れるとともに、前記薄肉の圧電振動領域が外周部の対向
する2辺に向かって溝状に延びた電極引きだし領域3
3,33が設けられている。この電極引きだし領域3
3,33は外周端部手前まで形成されており、それぞれ
引出電極31b,31bが形成されている。なお、図示
していないが裏面においても励振電極、引出電極が形成
されている。ただし、電極引きだし領域は水晶板全体の
強度を確保するために表面に形成した方向に直交する方
向に延在させるとよい。また、裏面の電極引きだし領域
は上述の実施例に示した構成と同じように外周端部まで
延長して形成してもよい。この場合、パッケージとの電
気的接続を導電性接合材で行う場合作業性が向上する等
の利点がある。水晶板3の表面の引出電極31bとパッ
ケージQの電極パッドQ1との電気的接続はボンディン
グワイヤWを介して行い、裏面においては前述のとおり
導電性接合材により導電接合すればよい。A fourth embodiment of the present invention will be described with reference to the drawings. FIG. 6 is a perspective view showing a fourth embodiment of the present invention. This embodiment explains claim 3 and also mentions the connection relationship with the package Q. The quartz plate 3, which is a piezoelectric body, has a concave shape in which both front and back surfaces at the center of the plate surface are depressed as a whole. The center part of the concave shape is thin and the piezoelectric vibration region 31 is formed.
Excitation electrodes 31a, 3 made of aluminum etc.
1a is provided. An outer peripheral portion of the piezoelectric vibration region 31 is provided with a reinforcing portion 32 several times thicker than the piezoelectric vibration region, and the thin piezoelectric vibration region extends in a groove shape toward two opposing sides of the outer peripheral portion. Electrode extraction area 3
3, 33 are provided. This electrode lead-out area 3
Reference numerals 3 and 33 are formed up to the outer peripheral end, and lead electrodes 31b and 31b are formed respectively. Although not shown, an excitation electrode and an extraction electrode are also formed on the back surface. However, the electrode lead-out region is preferably extended in a direction perpendicular to the direction formed on the surface in order to secure the strength of the whole quartz plate. Further, the electrode lead-out region on the back surface may be formed to extend to the outer peripheral end similarly to the configuration shown in the above embodiment. In this case, there is an advantage that the workability is improved when the electrical connection with the package is made by a conductive bonding material. The electrical connection between the extraction electrode 31b on the front surface of the quartz plate 3 and the electrode pad Q1 of the package Q is made via the bonding wire W, and the back surface may be conductively bonded with the conductive bonding material as described above.
【0025】本発明の第5の実施例について図面を参照
して説明する。図7は本発明の第5の実施例を示すモノ
リシック水晶フィルタの斜視図であり、図8は図7のB
−B断面図である。圧電体である水晶板4は、全体とし
てその板面の中央部分の片面のみが凹んだ凹形状を有し
ている。凹形の中央部分は薄肉で圧電振動領域41とさ
れており、表面には入力電極45aと出力電極46aが
並列して形成されており、裏面にはこれら各電極に対応
した共通電極47aが形成されている。圧電振動領域4
1の外周部には圧電振動領域に比較して数倍厚肉の補強
部42が設けられるとともに、前記薄肉の圧電振動領域
が外周部の対向する2辺に向かって溝状に延びた電極引
きだし領域43,44が設けられている。この電極引き
だし領域43,44には、それぞれ引出電極45b,4
6bが外周端部まで形成されている。また、図示してい
ないが、裏面の共通電極47が前述の引出電極45b,
46bが引き出された以外の辺に引出電極47bにより
引き出されている。これら各引出電極により外部との電
気的接続を行う。A fifth embodiment of the present invention will be described with reference to the drawings. FIG. 7 is a perspective view of a monolithic crystal filter showing a fifth embodiment of the present invention, and FIG.
It is -B sectional drawing. The quartz plate 4, which is a piezoelectric body, has a concave shape in which only one surface at the center of the plate surface is concave as a whole. The central portion of the concave shape is thin and serves as a piezoelectric vibration region 41. An input electrode 45a and an output electrode 46a are formed in parallel on the front surface, and a common electrode 47a corresponding to each of these electrodes is formed on the back surface. Have been. Piezoelectric vibration area 4
1 is provided with a reinforcing portion 42 which is several times thicker than the piezoelectric vibrating region in the outer peripheral portion, and the thinner piezoelectric vibrating region extends in a groove shape toward two opposing sides of the outer peripheral portion. Regions 43 and 44 are provided. The extraction electrodes 45b, 4 are provided in the electrode extraction regions 43, 44, respectively.
6b is formed up to the outer peripheral end. Although not shown, the common electrode 47 on the back surface is connected to the extraction electrode 45b,
46b is led out to the side other than the side from which the lead-out electrode 47b is pulled out. Electrical connection to the outside is made by each of these extraction electrodes.
【0026】本発明の第6の実施例について図面を参照
して説明する。図9は本発明の第6の実施例を示すモノ
リシック水晶フィルタの斜視図である。圧電体である水
晶板4は、凹部が表裏両面に形成されていることと電極
引きだし位置が異なっている以外は第5の実施例とほぼ
同じであるので、同じ構造部分の説明は割愛する。電極
引きだし領域48,49は第5の実施例と異なって外周
の各辺と平行な直線上に位置しないようにずらせて設定
している。また、裏面の電極引きだし領域50も前記各
領域48,49とは異なる辺に設定している。このよう
な設定により、薄肉部分が一部分に偏ることがないの
で、水晶板の機械的強度が低下しない。A sixth embodiment of the present invention will be described with reference to the drawings. FIG. 9 is a perspective view of a monolithic quartz crystal filter according to a sixth embodiment of the present invention. The quartz plate 4 which is a piezoelectric body is almost the same as the fifth embodiment except that the concave portions are formed on the front and back surfaces and the positions where the electrodes are pulled out are different. Therefore, the description of the same structural portions is omitted. Unlike the fifth embodiment, the electrode lead-out areas 48 and 49 are set so as not to be located on straight lines parallel to the respective sides of the outer periphery. The electrode lead-out region 50 on the back surface is also set to a different side from the regions 48 and 49. With such a setting, the thin portion is not biased to a part, so that the mechanical strength of the quartz plate does not decrease.
【0027】本発明の第7の実施例について図面を参照
して説明する。図10は本発明の第7の実施例を示す斜
視図である。圧電体である水晶板5は、全体としてその
板面の中央部分の表裏両面が凹んだ凹形状を有してい
る。凹形の中央部分は薄肉で圧電振動領域51とされて
おり、表裏面に対向してアルミニウム等の励振電極51
a,51aが設けられている。圧電振動領域51の外周
部には圧電振動領域に比較して数倍厚肉の補強部52が
設けられるとともに、前記薄肉の圧電振動領域が外周部
の1辺に向かって溝状に延びた電極引きだし領域53が
設けられている。この電極引きだし領域53には引出電
極51bが形成されている。また、補強部上にも電極パ
ッド52a,52bが形成されている。なお、図示して
いないが裏面においても励振電極51a、引出電極51
bが形成されている。電極引きだし領域には導電性接合
材S2が充填されるとともに、この導電性接合材S2と
電気的に接続され、かつ前記電極パッド52a,52b
上をとおって前記補強部上を周状に導電性接合材S3が
塗布されている。この導電性接合材S2,S3は例え
ば、ポリイミド系の導電接合材を用いる。ポリイミド系
樹脂は、耐熱性が高く熱膨張係数が小さいので、圧電体
に歪を与えにくく堅固で安定した補強が可能となる。こ
のような構成により、補強部の機械的強度を向上させる
とともに、補強部上の任意の位置に形成された電極パッ
ドから、例えば金属弾性薄板W1等により電極を外部に導
出することができる。A seventh embodiment of the present invention will be described with reference to the drawings. FIG. 10 is a perspective view showing a seventh embodiment of the present invention. The quartz plate 5, which is a piezoelectric body, has a concave shape in which both the front and back surfaces at the center of the plate surface are depressed as a whole. The central portion of the concave shape is a thin piezoelectric vibration region 51, and the excitation electrode 51 made of aluminum or the like is opposed to the front and back surfaces.
a, 51a are provided. An outer peripheral portion of the piezoelectric vibration region 51 is provided with a reinforcing portion 52 which is several times thicker than the piezoelectric vibration region, and the thin piezoelectric vibration region extends in a groove shape toward one side of the outer peripheral portion. A lead-out area 53 is provided. An extraction electrode 51b is formed in the electrode extraction region 53. The electrode pads 52a and 52b are also formed on the reinforcing portion. Although not shown, the excitation electrode 51a and the extraction electrode 51 are also provided on the back surface.
b is formed. The electrode lead-out region is filled with a conductive bonding material S2, is electrically connected to the conductive bonding material S2, and is connected to the electrode pads 52a and 52b.
An electrically conductive bonding material S3 is applied on the reinforcing portion in a circumferential shape over the upper portion. As the conductive bonding materials S2 and S3, for example, a polyimide-based conductive bonding material is used. Since the polyimide-based resin has high heat resistance and a small coefficient of thermal expansion, it is hard to apply distortion to the piezoelectric body, and rigid and stable reinforcement is possible. With such a configuration, the mechanical strength of the reinforcing portion can be improved, and the electrode can be led out of the electrode pad formed at an arbitrary position on the reinforcing portion by, for example, the metal elastic thin plate W1.
【0028】本発明の第8の実施例について図面を参照
して説明する。図11は本発明の第8の実施例を示すモ
ノリシック水晶フィルタの斜視図であり、図12は図1
1について裏面からみた斜視図であり、図13は図11
において補強材G2を樹脂接着材G1で接合した状態のC−
C断面図である。圧電体である水晶板6は、全体として
その板面の中央部分の片面のみが凹んだ凹形状を有して
いる。凹形の中央部分は薄肉で圧電振動領域61とされ
ており、表面には入力電極65aと出力電極66aが並
列して形成されており、裏面の凹部にはこれら各電極に
対応した共通電極67aが形成されている。入力電極と
出力電極からは各々引出電極65b,66bが外周端部
に引き出されている。圧電振動領域61の外周部には圧
電振動領域に比較して数倍厚肉の補強部62が設けられ
るとともに、裏面においては前記薄肉の圧電振動領域が
外周部の対向する2辺に向かって溝状に延びた電極引き
だし領域63,64が設けられている。この電極引きだ
し領域63,64には、それぞれ引出電極67b,67
bが外周端部にまで形成されている。なお、図示してい
ないが、この電極引きだし領域に樹脂等の埋設材を設け
て機械的強度向上をはかってもよい。そして、表面の補
強部には周状に絶縁性の樹脂接着材G1(例えばポリイミ
ド系の樹脂等)が塗布され、その上部に周状の補強部材
G2(ガラス、水晶、金属、樹脂等)が接合されている。
これにより補強効果がさらに向上する。なお、補強部材
G2は周状でなくてもよく、棒状、薄板状等であっても前
記薄肉部分を補強する効果を有するものであればよい。
上記樹脂接着材G1および補強部材G2はいずれも補強部材
に該当する。An eighth embodiment of the present invention will be described with reference to the drawings. FIG. 11 is a perspective view of a monolithic crystal filter showing an eighth embodiment of the present invention, and FIG.
13 is a perspective view from the back side of FIG.
C- in a state where the reinforcing material G2 is joined with the resin adhesive G1 in
It is C sectional drawing. The quartz plate 6, which is a piezoelectric body, has a concave shape in which only one surface at the center of the plate surface is concave as a whole. The central portion of the concave shape is a thin piezoelectric vibration region 61, the input electrode 65a and the output electrode 66a are formed in parallel on the front surface, and the common electrode 67a corresponding to each of these electrodes is formed in the concave portion on the back surface. Are formed. Extraction electrodes 65b and 66b are extended to the outer peripheral end from the input electrode and the output electrode, respectively. A reinforcing portion 62 having a thickness several times as large as that of the piezoelectric vibration region is provided on the outer peripheral portion of the piezoelectric vibration region 61, and the thin piezoelectric vibration region is formed on the back surface by grooves toward two opposing sides of the outer peripheral portion. Electrode extraction regions 63 and 64 extending in the shape of a circle are provided. The electrode extraction regions 63 and 64 have extraction electrodes 67b and 67, respectively.
b is formed up to the outer peripheral end. Although not shown, a buried material such as a resin may be provided in the electrode lead-out region to improve the mechanical strength. Then, an insulating resin adhesive G1 (for example, a polyimide resin) is circumferentially applied to the reinforcing portion on the surface, and a circumferential reinforcing member is provided on an upper portion thereof.
G2 (glass, crystal, metal, resin, etc.) is bonded.
This further enhances the reinforcing effect. The reinforcing member
G2 need not be circumferential, and may be rod-shaped, thin-plate-shaped, or the like as long as it has an effect of reinforcing the thin-walled portion.
Both the resin adhesive G1 and the reinforcing member G2 correspond to the reinforcing member.
【0029】なお、この補強部材は上記実施例に限定さ
れるものではなく、金属材料を蒸着形成してもよいし、
またこの蒸着形成された金属面上に、低融点ガラスある
いは樹脂材料を形成してもよい。さらに、上記各実施例
で圧電体として水晶板を用いたが、タンタル酸リチウム
等の他の単結晶圧電体でもよく、あるいは加工技術が制
限されるが圧電セラミックスを用いてもよい。また、振
動モードとして厚みすべり振動を例示したが、厚み振動
等圧電体の厚さに周波数が依存する振動モードで有れば
本発明に適用できる。The reinforcing member is not limited to the above embodiment, and a metal material may be formed by vapor deposition.
Further, a low melting point glass or a resin material may be formed on the metal surface formed by vapor deposition. Further, although a quartz plate is used as the piezoelectric body in each of the above embodiments, another single crystal piezoelectric body such as lithium tantalate may be used, or a piezoelectric ceramic may be used, although the processing technique is limited. Although the thickness shear vibration is exemplified as the vibration mode, any vibration mode whose frequency depends on the thickness of the piezoelectric body, such as thickness vibration, can be applied to the present invention.
【0030】[0030]
【発明の効果】本発明によれば、補強部の一部に前記圧
電振動領域とほぼ同じ厚さの電極引き出し領域を設け、
この電極引き出し領域に前記励振電極と電気的に接続さ
れる引出電極を形成しているので、引出電極がエッジ部
分を通ることがなく、厚さ方向に屈曲させなくてもよい
ので、エッジ部分での電極切断のおそれがなくなり、経
時変化のない信頼性の高い高周波圧電振動デバイスを得
ることができる。また、振動領域と補強部で形成される
凹部内壁に電極形成する必要がないので、電極形成自体
が容易であり、歩留まり並びに生産性を向上させること
ができる。According to the present invention, an electrode lead-out region having substantially the same thickness as the piezoelectric vibration region is provided in a part of the reinforcing portion,
Since the extraction electrode electrically connected to the excitation electrode is formed in the electrode extraction region, the extraction electrode does not pass through the edge portion and does not have to be bent in the thickness direction. This eliminates the risk of electrode disconnection, and a highly reliable high-frequency piezoelectric vibration device that does not change over time can be obtained. Further, since it is not necessary to form an electrode on the inner wall of the concave portion formed by the vibrating region and the reinforcing portion, the electrode formation itself is easy, and the yield and productivity can be improved.
【0031】請求項4に示した発明によれば、電極引き
出し領域に設けられた埋設材が薄肉部分を一体となって
補強するので、機械的強度に優れた高周波圧電振動デバ
イスを得ることができる。According to the fourth aspect of the present invention, since the burying material provided in the electrode lead-out region integrally reinforces the thin portion, a high-frequency piezoelectric vibration device having excellent mechanical strength can be obtained. .
【0032】請求項5に示した発明によれば、埋設材が
導電性接合材であるので、補強効果とともに、引出電極
と外部との電気的接続を援助する。According to the fifth aspect of the present invention, since the buried material is a conductive bonding material, it assists the electrical connection between the extraction electrode and the outside together with the reinforcing effect.
【0033】請求項6に示した発明によれば、引き出し
領域の少なくとも一部に設けられた狭幅部により、埋設
材の電極引きだし部外への流出を防止する。パッケージ
への接合の際に用いる導電性接合材が電極引きだし領域
から外への流出を阻止することができ、振動を阻害する
こと等を防止する。According to the sixth aspect of the present invention, the buried material is prevented from flowing out of the electrode lead-out portion by the narrow portion provided in at least a part of the lead-out region. The conductive bonding material used for bonding to the package can be prevented from flowing out of the electrode lead-out region to the outside, thereby preventing vibration and the like.
【0034】請求項7に示した発明によれば、補強部材
により圧電振動デバイスが補強されるとともに、補強部
における外部との接続箇所を自由に設定できる。According to the seventh aspect of the present invention, the piezoelectric vibration device is reinforced by the reinforcing member, and the connecting portion between the reinforcing portion and the outside can be set freely.
【0035】請求項8に示した発明によれば、補強部材
に導電性樹脂を用い、補強部にそってほぼ周状に形成し
ているので、補強作用とともに補強部における外部との
接続箇所を自由に設定できる。According to the eighth aspect of the present invention, since the reinforcing member is made of a conductive resin and is formed in a substantially circumferential shape along the reinforcing portion, the connecting portion between the reinforcing portion and the outside in the reinforcing portion is formed. Can be set freely.
【図1】本発明の第1の実施例を示す分解斜視図。FIG. 1 is an exploded perspective view showing a first embodiment of the present invention.
【図2】図1の組み込み後の断面図。FIG. 2 is a cross-sectional view after the assembly of FIG. 1;
【図3】本発明の第2の実施例を示す斜視図。FIG. 3 is a perspective view showing a second embodiment of the present invention.
【図4】本発明の第3の実施例を示す斜視図。FIG. 4 is a perspective view showing a third embodiment of the present invention.
【図5】図4のA−A断面図。FIG. 5 is a sectional view taken along line AA of FIG. 4;
【図6】本発明の第4の実施例を示す斜視図。FIG. 6 is a perspective view showing a fourth embodiment of the present invention.
【図7】本発明の第5の実施例を示す斜視図。FIG. 7 is a perspective view showing a fifth embodiment of the present invention.
【図8】図7のB−B断面図。FIG. 8 is a sectional view taken along line BB of FIG. 7;
【図9】本発明の第6の実施例を示す斜視図。FIG. 9 is a perspective view showing a sixth embodiment of the present invention.
【図10】本発明の第7の実施例を示す斜視図。FIG. 10 is a perspective view showing a seventh embodiment of the present invention.
【図11】本発明の第8の実施例を示す斜視図。FIG. 11 is a perspective view showing an eighth embodiment of the present invention.
【図12】図11の裏面斜視図。FIG. 12 is a rear perspective view of FIG. 11;
【図13】図11のC−C断面図。FIG. 13 is a sectional view taken along line CC of FIG. 11;
【図14】従来例を示す図FIG. 14 shows a conventional example.
1,2,3,4,5,6,9 水晶板(圧電体) 11,14,21,31,41,51,61,91 圧
電振動領域 12,15,22,32,42,52,62,92 補
強部 13,16,23,33,43,53,63 電極引き
だし領域 11a,14a,21a,31a,41a,51a,6
1a,9a 励振電極 P,Q パッケージ S,S1,S2,S3 導電性接合材1,2,3,4,5,6,9 Quartz plate (piezoelectric body) 11,14,21,31,41,51,61,91 Piezoelectric vibration region 12,15,22,32,42,52,62 , 92 Reinforcement parts 13, 16, 23, 33, 43, 53, 63 Electrode extraction areas 11a, 14a, 21a, 31a, 41a, 51a, 6
1a, 9a Excitation electrode P, Q Package S, S1, S2, S3 Conductive bonding material
Claims (8)
または表裏両面に凹部を設けることにより、薄肉で表裏
に少なくとも一対の励振電極が形成された圧電振動領域
と、この圧電振動領域に続いて一体的にその周囲に設け
られた厚肉の補強部を形成した高周波圧電振動デバイス
において、この補強部の一部に前記圧電振動領域とほぼ
同じ厚さの電極引き出し領域を設け、この電極引き出し
領域に前記励振電極と電気的に接続される引出電極を形
成したことを特徴とする高周波圧電振動デバイス1. The front or back surface of a substantially central portion of a piezoelectric plate
Alternatively, by providing concave portions on both front and rear surfaces, a thin piezoelectric vibration region in which at least a pair of excitation electrodes are formed on the front and back, and a thick reinforcing portion integrally provided therearound following the piezoelectric vibration region are provided. In the formed high-frequency piezoelectric vibration device, an electrode extraction region having substantially the same thickness as the piezoelectric vibration region is provided in a part of the reinforcing portion, and an extraction electrode electrically connected to the excitation electrode is formed in the electrode extraction region. -Frequency piezoelectric vibration device characterized by the following:
極が圧電板の外周端部まで形成され、この引出電極部分
で外部と電気的接続されていることを特徴とする特許請
求項1記載の高周波圧電振動デバイス。2. The high-frequency piezoelectric device according to claim 1, wherein the electrode extraction region and the extraction electrode are formed up to the outer peripheral end of the piezoelectric plate, and the extraction electrode portion is electrically connected to the outside. Vibration device.
極が圧電板の外周端部近傍まで形成され、この引出電極
部分で外部と電気的接続されていることを特徴とする特
許請求項1記載の高周波圧電振動デバイス。3. The high frequency device according to claim 1, wherein said electrode lead-out region and said lead-out electrode are formed up to the vicinity of an outer peripheral end of said piezoelectric plate, and are electrically connected to the outside at said lead-out electrode portion. Piezoelectric vibration device.
に埋設材を設けたことを特徴とする特許請求項1乃至3
のいずれかに記載の高周波圧電振動デバイス。4. A buried material is provided in at least a part of the electrode lead-out region.
The high frequency piezoelectric vibration device according to any one of the above.
とする特許請求項4記載の高周波圧電振動デバイス。5. The high-frequency piezoelectric vibration device according to claim 4, wherein the burying material is a conductive bonding material.
に狭幅部を設け、埋設材の電極引きだし部外への流出を
防止したことを特徴とする特許請求項4または5記載の
高周波圧電振動デバイス。6. The high-frequency piezoelectric vibration device according to claim 4, wherein a narrow portion is provided in at least a part of the electrode lead-out region to prevent the buried material from flowing out of the electrode lead-out portion. .
らなる補強部材を設けたことを特徴とする特許請求項1
乃至6のいずれかに記載の高周波圧電振動デバイス。7. At least a part of the reinforcing portion is made of a conductive material.
2. The method according to claim 1, wherein a reinforcing member is provided.
7. The high-frequency piezoelectric vibration device according to any one of claims 6 to 6.
に形成したことを特徴とする特許請求項7記載の高周波
圧電振動デバイス。 8. The high-frequency piezoelectric vibration device according to claim 7, wherein said reinforcing member is formed in a substantially circumferential shape along the reinforcing portion.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP07169494A JP3331574B2 (en) | 1994-03-15 | 1994-03-15 | High frequency piezoelectric vibration device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP07169494A JP3331574B2 (en) | 1994-03-15 | 1994-03-15 | High frequency piezoelectric vibration device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH07254837A JPH07254837A (en) | 1995-10-03 |
JP3331574B2 true JP3331574B2 (en) | 2002-10-07 |
Family
ID=13467913
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP07169494A Expired - Lifetime JP3331574B2 (en) | 1994-03-15 | 1994-03-15 | High frequency piezoelectric vibration device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3331574B2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4614566B2 (en) * | 2001-03-29 | 2011-01-19 | 太平洋セメント株式会社 | Piezoelectric transformer |
JP2010074840A (en) * | 2009-11-06 | 2010-04-02 | Seiko Epson Corp | Piezoelectric vibrating piece, and method of manufacturing the same |
US9722167B2 (en) | 2012-07-06 | 2017-08-01 | Daishinku Corporation | Piezoelectric vibration piece and piezoelectric vibration device using same |
-
1994
- 1994-03-15 JP JP07169494A patent/JP3331574B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH07254837A (en) | 1995-10-03 |
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