JPH0455001B2 - - Google Patents
Info
- Publication number
- JPH0455001B2 JPH0455001B2 JP60130646A JP13064685A JPH0455001B2 JP H0455001 B2 JPH0455001 B2 JP H0455001B2 JP 60130646 A JP60130646 A JP 60130646A JP 13064685 A JP13064685 A JP 13064685A JP H0455001 B2 JPH0455001 B2 JP H0455001B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- resin
- cavity
- forming material
- resin coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000011347 resin Substances 0.000 claims description 47
- 229920005989 resin Polymers 0.000 claims description 47
- 239000000463 material Substances 0.000 claims description 24
- 239000011248 coating agent Substances 0.000 claims description 18
- 238000000576 coating method Methods 0.000 claims description 18
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 230000003746 surface roughness Effects 0.000 claims description 10
- 239000000945 filler Substances 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 3
- 239000003795 chemical substances by application Substances 0.000 claims description 2
- 230000003449 preventive effect Effects 0.000 claims 1
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 8
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 4
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000010897 surface acoustic wave method Methods 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 239000013008 thixotropic agent Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、例えば弾性表面波やバルク波利用
の圧電フイルタ、圧電共振子等を構成する圧電部
品素子およびそれを用いた圧電部品の製造方法に
関する。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a piezoelectric component element constituting, for example, a piezoelectric filter using surface acoustic waves or bulk waves, a piezoelectric resonator, etc., and a method for manufacturing a piezoelectric component using the same. Regarding.
圧電部品、例えばエネルギー閉じ込め形圧電共
振子の従来の製造方法の一例を第２図を参照しな
がら説明すると、第２図Ａに示す１は、エネルギ
ー閉じ込め形の圧電共振素子であり、例えば圧電
セラミツク等の圧電基板２の両面に相対向する少
なくとも一対の、例えば一対の振動電極４ａ，４
ｂを有している。尚、以下の説明に関係のない引
出し電極、引出しリード等は図示を省略してい
る。そして、当該圧電共振素子１の所定の振動電
極部分に、例えば振動電極４ａを覆うように、例
えばソルダレジスト等の周波数調整用樹脂６を例
えばスクリーン印刷等で付与する（第２図Ｂ）。
こうすることによつて、圧電共振素子１の共振周
波数の微調が可能である。
An example of a conventional manufacturing method for a piezoelectric component, such as an energy trap type piezoelectric resonator, will be explained with reference to FIG. 2. Reference numeral 1 shown in FIG. At least one pair of vibrating electrodes 4a, 4 facing each other on both sides of the piezoelectric substrate 2 such as
It has b. Note that drawing electrodes, drawing leads, etc. that are not related to the following explanation are omitted from illustration. Then, a frequency adjusting resin 6 such as a solder resist is applied to a predetermined vibrating electrode portion of the piezoelectric resonant element 1 by, for example, screen printing or the like so as to cover, for example, the vibrating electrode 4a (FIG. 2B).
By doing so, the resonant frequency of the piezoelectric resonant element 1 can be finely adjusted.
次に周波数調整用樹脂６を乾かした後、圧電共
振素子１の振動領域、即ち振動電極４ａ，４ｂと
その周辺部を覆うように、例えばワツクス、グリ
コール系樹脂等から成り、常温では固形で加熱に
より液状となる空洞形成材８を溶融状態で点滴す
る等して付与する（第２図Ｃ）。そして当該空洞
形成材８が固まつた後、その上に多孔質の例えば
エポキシ系の外装樹脂１０を例えば浸漬塗装、あ
るいは粉体塗装する（第２図Ｄ）。その後全体を
加熱して、外装樹脂１０の硬化と空洞形成材８の
外装樹脂１０中への移行を行わせることにより、
振動電極４ａ，４ｂの上部に振動用の空洞１２を
形成する（第２図Ｅ）。その際、必面に応じて全
体を傾けておいても良い。このようにして圧電振
子が製造される。 Next, after drying the frequency adjustment resin 6, it is made of wax, glycol resin, etc., which is solid at room temperature and heated, so as to cover the vibration region of the piezoelectric resonant element 1, that is, the vibrating electrodes 4a and 4b and their surrounding areas. The cavity forming material 8, which becomes liquid, is applied by dripping or the like in a molten state (FIG. 2C). After the cavity forming material 8 hardens, a porous exterior resin 10 of, for example, epoxy is applied thereon by, for example, dip coating or powder coating (FIG. 2D). Thereafter, by heating the entire body to harden the exterior resin 10 and transfer the cavity forming material 8 into the exterior resin 10,
A vibration cavity 12 is formed above the vibrating electrodes 4a and 4b (FIG. 2E). At that time, the whole may be tilted as necessary. In this way, a piezoelectric pendulum is manufactured.
なお、上記周波数調整用樹脂６は、その最大の
目的は前述したように圧電共振素子１の周波数調
整用であるが、周波数調整と同時に、圧電共振素
子１のスプリアスを抑圧する働きや、圧電共振素
子１の振動電極に半田が付着するのを防止する働
きもする。 The main purpose of the frequency adjustment resin 6 is to adjust the frequency of the piezoelectric resonant element 1 as described above, but at the same time as adjusting the frequency, it also has the function of suppressing spurious of the piezoelectric resonant element 1 and controlling the piezoelectric resonance. It also serves to prevent solder from adhering to the vibrating electrode of the element 1.
上述した周波数調整用樹脂６としては、従来、
着色剤やチクソ剤が少量入つたものが使用されて
いた。しかしながら、第３図に模式的に示すよう
に、このような周波数調整用樹脂６の表面粗さは
小さく、一般に空洞形成材８として使用されるワ
ツクスやグリコール系樹脂との表面エネルギー差
が大きいため、空洞１２の形成後も空洞形成材８
の一部分が周波数調整用樹脂６の表面に残留する
場合がある（第２図Ｅ参照）。
Conventionally, as the above-mentioned frequency adjustment resin 6,
It contained small amounts of colorants and thixotropic agents. However, as schematically shown in FIG. 3, the surface roughness of such frequency adjustment resin 6 is small, and the difference in surface energy from wax or glycol resin that is generally used as the cavity forming material 8 is large. , even after the cavity 12 is formed, the cavity forming material 8
A part of it may remain on the surface of the frequency adjustment resin 6 (see FIG. 2E).
そして上記のようにして残留した空洞形成材
は、圧電部品の挿入損失や共振抵抗等の電気的特
性を悪化させると共に、高温下での発振レベル等
を不安定にして、信頼性の面での高温特性も悪化
させる。 The remaining cavity forming material as described above not only deteriorates the electrical characteristics such as insertion loss and resonance resistance of the piezoelectric component, but also makes the oscillation level etc. unstable at high temperatures, which reduces reliability. It also deteriorates high temperature properties.
そこでこの発明は、圧電素子に形成された周波
数調整用の樹脂被膜表面に付着した空洞形成材が
圧電部品製造時に樹脂被膜表面に残留するのを防
止することができる圧電部品素子およびそれを用
いた圧電部品の製造方法を提供することを目的と
する。 Therefore, the present invention provides a piezoelectric component element that can prevent the cavity forming material attached to the surface of the resin coating for frequency adjustment formed on the piezoelectric element from remaining on the surface of the resin coating during the manufacture of the piezoelectric component, and a piezoelectric component using the same. The purpose of the present invention is to provide a method for manufacturing piezoelectric components.
この発明の圧電部品素子は、前述したような周
波数調整用の樹脂被膜に、その表面粗さを大きく
して空洞形成時の空洞形成材の当該樹脂被膜表面
への残留を防止する働きをする充填剤を含有させ
ていることを特徴とする。
In the piezoelectric component element of the present invention, a resin coating for frequency adjustment as described above is filled with a filling material that increases the surface roughness and prevents a cavity forming material from remaining on the surface of the resin coating when forming a cavity. It is characterized by containing an agent.
また、この発明の圧電部品の製造方法は、前述
したような圧電部品素子の周波数調整用の樹脂被
膜に、その表面粗さを大きくして空洞形成時の空
洞形成材の当該樹脂表面への残留を防止する働き
をする充填剤を含有させておくことを特徴とす
る。 In addition, the method for manufacturing a piezoelectric component of the present invention includes increasing the surface roughness of the resin coating for frequency adjustment of the piezoelectric component element as described above, so that when a cavity is formed, the cavity forming material remains on the resin surface. It is characterized by containing a filler that works to prevent this.
上記のようにすれば、樹脂被膜の表面粗さが大
きいため、当該樹脂被膜上に来る空洞形成材の表
面粗張力が分散され、空洞形成材が玉状になつて
残りにくくなり、空洞形成時の空洞形成材は当該
樹脂表面からほぼ完全に除去されるようになる。
By doing the above, since the surface roughness of the resin coating is large, the surface roughness of the cavity forming material that comes on the resin coating is dispersed, and the cavity forming material becomes beaded and difficult to remain, so that when forming the cavity, The cavity forming material is almost completely removed from the resin surface.
第１図は、この実施例に係る周波数調整用樹脂
を付与した状態の圧電共振素子の拡大断面図であ
り、上記第３図に相当する。尚、以下においては
上述した従来の製造方法との相違点を主に説明す
る。
FIG. 1 is an enlarged sectional view of a piezoelectric resonant element to which a frequency adjustment resin according to this embodiment is applied, and corresponds to FIG. 3 above. In the following, differences from the conventional manufacturing method described above will be mainly explained.
この実施例においては、圧電共振素子１の周波
数調整用樹脂１６として、充填剤を数％以上含有
するものを用いて、第１図に模式的に示すよう
に、その表面粗さを大きくしている。より具体的
には、周波数調整用樹脂１６としては、従来から
使用されているような周波数調整用樹脂に、充填
材として、例えばアモルフアスシリカ、溶融シリ
カ、タルク、酸化チタン等を数％以上添加したも
のを用いても良いし、あるいは、予め数％以上充
填剤が添加されている樹脂、例えば充填剤入り接
着剤、レジスト等を用いても良い。樹脂１６の被
覆形成方法としては、印刷やスプレー塗布等の方
法が挙げられる。充填剤の粒径は、適用する圧電
部品に応じて考慮される。例えば弾性表面波デバ
イスでは5μｍ以下が好ましい。 In this embodiment, as the frequency adjusting resin 16 of the piezoelectric resonant element 1, a material containing several percent or more of filler is used, and as schematically shown in FIG. 1, the surface roughness is increased. There is. More specifically, the frequency adjustment resin 16 is made by adding several percent or more of amorphous silica, fused silica, talc, titanium oxide, etc. as a filler to a conventionally used frequency adjustment resin. Alternatively, resins to which a few percent or more of fillers are added in advance, such as filler-containing adhesives, resists, etc., may be used. Examples of methods for forming the resin 16 coating include methods such as printing and spray coating. The particle size of the filler is considered depending on the piezoelectric component to which it is applied. For example, in surface acoustic wave devices, the thickness is preferably 5 μm or less.
上述のような周波数調整用樹脂１６において
は、その表面粗さが大きいために空洞形成材８と
して用いられるワツクスやグリコール系樹脂との
表面エネルギーの差が小さくなつており、そのた
め空洞形成時の溶融した空洞形成材８は当該周波
数調整用樹脂１６の表面からほぼ完全に除去され
る。これは、一般に、粗い表面に液体を流したよ
うな場合は、表面が滑らかな場合に比べて、表面
張力が分散され、終わりの方の液体がその表面に
玉状になつて残る作用が弱くなるからである。そ
の結果、周波数調整用樹脂１６の表面への空洞形
成材８の残留をほぼ完全に防止することができ
る。 Since the frequency adjustment resin 16 described above has a large surface roughness, the difference in surface energy from the wax or glycol resin used as the cavity forming material 8 is small, and therefore the melting during cavity formation is The cavity forming material 8 is almost completely removed from the surface of the frequency adjusting resin 16. This is because, in general, when a liquid is poured over a rough surface, the surface tension is more dispersed than when the surface is smooth, and the liquid towards the end is less likely to remain in the form of beads on the surface. Because it will be. As a result, it is possible to almost completely prevent the cavity forming material 8 from remaining on the surface of the frequency adjustment resin 16.
そのため、上記のような圧電部品素子およびそ
れを用いた圧電部品の製造方法によれば、圧電部
品の挿入損失や共振抵抗等の電気的特性を改善す
ることができると共に、信頼性の面での高温特性
も改善することができる。例えば、電気的特性と
しては、フイルタにおける挿入損失が1dB前後に
抑えられ、発振子における共振抵抗も数Ω〜数＋
Ωに抑えられる。また高温特性としては、従来は
50〜80℃付近の残留ワツクスやグリコール系樹脂
が溶融する温度範囲で、発振レベルが著しく低下
したり周波数が変動したりしていたけれども、こ
の発明によればそのような不具合もなくなる。 Therefore, according to the piezoelectric component element and the manufacturing method of the piezoelectric component using the same as described above, it is possible to improve the electrical characteristics such as insertion loss and resonance resistance of the piezoelectric component, and also improve reliability. High temperature properties can also be improved. For example, in terms of electrical characteristics, the insertion loss in the filter is suppressed to around 1 dB, and the resonant resistance in the oscillator ranges from several Ω to several +
It can be suppressed to Ω. In addition, in terms of high-temperature characteristics, conventional
In the temperature range of around 50 to 80 degrees Celsius, where residual wax and glycol resin melt, the oscillation level drops significantly and the frequency fluctuates, but this invention eliminates such problems.
以上のようにこの発明によれば、圧電部品素子
の周波数調整用の樹脂被膜に充填剤を含有させて
当該樹脂被膜の表面粗さを大きくしておくので、
空洞形成時の樹脂被膜表面への空洞形成材の残留
が防止される。その結果、製造された圧電部品の
電気的特性や信頼性等が改善される。
As described above, according to the present invention, the resin coating for frequency adjustment of the piezoelectric component element contains a filler to increase the surface roughness of the resin coating.
This prevents the cavity forming material from remaining on the surface of the resin coating during cavity formation. As a result, the electrical characteristics, reliability, etc. of the manufactured piezoelectric component are improved.
第１図は、この実施例に係る周波数調整用樹脂
を付与した状態の圧電共振素子の拡大断面図であ
る。第２図Ａ〜Ｅは、圧電共振部品の従来の製造
方法の一例を説明するための断面図である。第３
図は、第２図Ｂの拡大断面図である。
１…圧電共振素子、２…圧電基板、４ａ，４ｂ
…振動電極、６，１６…周波数調整用樹脂、８…
空洞形成材、１０…外装樹脂、１２…空洞。
FIG. 1 is an enlarged sectional view of a piezoelectric resonant element to which a frequency adjustment resin according to this embodiment is applied. FIGS. 2A to 2E are cross-sectional views for explaining an example of a conventional manufacturing method of a piezoelectric resonant component. Third
The figure is an enlarged sectional view of FIG. 2B. 1... Piezoelectric resonant element, 2... Piezoelectric substrate, 4a, 4b
... Vibration electrode, 6, 16... Frequency adjustment resin, 8...
Cavity forming material, 10...Exterior resin, 12...Cavity.
Claims (1)
る圧電素子の少なくとも一つの電極上を含む部分
に、当該圧電素子の周波数調整用の樹脂被膜が形
成されており、この樹脂被膜上に常温では固形で
加熱により液状となる空洞形成材が付与される圧
電部品素子において、前記樹脂被膜に、その表面
粗さを大きくして空洞形成時の空洞形成材の当該
樹脂被膜表面への残留を防止する働きをする充填
剤を含有させていることを特徴とする圧電部品素
子。 ２ 圧電体の表面に少なくとも一対の電極を有す
る圧電素子の少なくとも一つの電極上を含む部分
に、当該圧電素子の周波数調整用の樹脂被膜が形
成された圧電部品素子を用意し、この樹脂被膜上
で常温では固形で加熱により液状となる空洞形成
材を付与し、その上に外装樹脂を付与し、その後
全体を加熱して外装樹脂の硬化と空洞形成材の外
装樹脂中への移行を行わせることにより少なくと
も電極の上部に空洞を形成する圧電部品の製造方
法において、前記圧電部品素子の樹脂被膜に、そ
の表面粗さを大きくして空洞形成時の空洞形成材
の当該樹脂表面への残留を防止する働きをする充
填剤を含有させておくことを特徴とする圧電部品
の製造方法。[Claims] 1. A piezoelectric element having at least one pair of electrodes on the surface of the piezoelectric body, a resin coating for frequency adjustment of the piezoelectric element is formed on a portion including at least one electrode, and this resin coating In a piezoelectric component element to which a cavity forming material is applied which is solid at room temperature and becomes liquid upon heating, the surface roughness of the resin coating is increased so that the cavity forming material is applied to the surface of the resin coating during cavity formation. A piezoelectric component element characterized by containing a filler that acts to prevent residue. 2. Prepare a piezoelectric component element in which a resin coating for frequency adjustment of the piezoelectric element is formed on a portion including at least one electrode of a piezoelectric element having at least one pair of electrodes on the surface of the piezoelectric body, and A cavity-forming material that is solid at room temperature and becomes liquid upon heating is applied, and then an exterior resin is applied on top of it, and then the whole is heated to harden the exterior resin and transfer the cavity-forming material into the exterior resin. In a method of manufacturing a piezoelectric component in which a cavity is formed at least above an electrode, the surface roughness of the resin coating of the piezoelectric component element is increased to prevent a cavity forming material from remaining on the resin surface when the cavity is formed. A method for manufacturing a piezoelectric component, characterized by containing a filler that acts as a preventive agent.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13064685A JPS61288506A (en) | 1985-06-14 | 1985-06-14 | Piezoelectric parts element and manufacture of piezoelectric parts using it |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13064685A JPS61288506A (en) | 1985-06-14 | 1985-06-14 | Piezoelectric parts element and manufacture of piezoelectric parts using it |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61288506A JPS61288506A (en) | 1986-12-18 |
| JPH0455001B2 true JPH0455001B2 (en) | 1992-09-02 |
Family
ID=15039231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13064685A Granted JPS61288506A (en) | 1985-06-14 | 1985-06-14 | Piezoelectric parts element and manufacture of piezoelectric parts using it |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61288506A (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2931592B2 (en) * | 1987-08-20 | 1999-08-09 | ティーディーケイ株式会社 | Energy trapping type piezoelectric vibrator and method of manufacturing the same |
| JP2954233B2 (en) * | 1989-04-12 | 1999-09-27 | ティーディーケイ株式会社 | Adjustment method of resonance frequency of piezoelectric vibrator |
| JP3261922B2 (en) * | 1994-07-26 | 2002-03-04 | 株式会社村田製作所 | Manufacturing method of piezoelectric resonance component |
| JP5036215B2 (en) * | 2006-05-19 | 2012-09-26 | 日本碍子株式会社 | Piezoelectric thin film resonator and method for adjusting resonance frequency of piezoelectric thin film resonator |
| US9338558B2 (en) * | 2012-12-25 | 2016-05-10 | Kyocera Corporation | Acoustic generator, acoustic generation device, and electronic device |
| FR3053532B1 (en) * | 2016-06-30 | 2018-11-16 | Soitec | HYBRID STRUCTURE FOR ACOUSTIC SURFACE WAVE DEVICE |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5642415A (en) * | 1979-09-14 | 1981-04-20 | Tdk Corp | Manufacture of piezoelectric resonator |
-
1985
- 1985-06-14 JP JP13064685A patent/JPS61288506A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5642415A (en) * | 1979-09-14 | 1981-04-20 | Tdk Corp | Manufacture of piezoelectric resonator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61288506A (en) | 1986-12-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |