JPH0423327Y2 - - Google Patents

Info

Publication number
JPH0423327Y2
JPH0423327Y2 JP1983094273U JP9427383U JPH0423327Y2 JP H0423327 Y2 JPH0423327 Y2 JP H0423327Y2 JP 1983094273 U JP1983094273 U JP 1983094273U JP 9427383 U JP9427383 U JP 9427383U JP H0423327 Y2 JPH0423327 Y2 JP H0423327Y2
Authority
JP
Japan
Prior art keywords
wafer
shaped
comb
wafers
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983094273U
Other languages
English (en)
Japanese (ja)
Other versions
JPS602826U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9427383U priority Critical patent/JPS602826U/ja
Publication of JPS602826U publication Critical patent/JPS602826U/ja
Application granted granted Critical
Publication of JPH0423327Y2 publication Critical patent/JPH0423327Y2/ja
Granted legal-status Critical Current

Links

JP9427383U 1983-06-21 1983-06-21 半導体ウエ−ハ容器 Granted JPS602826U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9427383U JPS602826U (ja) 1983-06-21 1983-06-21 半導体ウエ−ハ容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9427383U JPS602826U (ja) 1983-06-21 1983-06-21 半導体ウエ−ハ容器

Publications (2)

Publication Number Publication Date
JPS602826U JPS602826U (ja) 1985-01-10
JPH0423327Y2 true JPH0423327Y2 (enrdf_load_stackoverflow) 1992-05-29

Family

ID=30225740

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9427383U Granted JPS602826U (ja) 1983-06-21 1983-06-21 半導体ウエ−ハ容器

Country Status (1)

Country Link
JP (1) JPS602826U (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52148043U (enrdf_load_stackoverflow) * 1976-05-06 1977-11-09
JPS5465473A (en) * 1977-11-04 1979-05-26 Zenkiyou Kasei Kougiyou Kk Ic wafer container

Also Published As

Publication number Publication date
JPS602826U (ja) 1985-01-10

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