JPH0422314Y2 - - Google Patents

Info

Publication number
JPH0422314Y2
JPH0422314Y2 JP1984093073U JP9307384U JPH0422314Y2 JP H0422314 Y2 JPH0422314 Y2 JP H0422314Y2 JP 1984093073 U JP1984093073 U JP 1984093073U JP 9307384 U JP9307384 U JP 9307384U JP H0422314 Y2 JPH0422314 Y2 JP H0422314Y2
Authority
JP
Japan
Prior art keywords
chamber
constant temperature
thermostatic
temperature chamber
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984093073U
Other languages
English (en)
Japanese (ja)
Other versions
JPS619853U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9307384U priority Critical patent/JPS619853U/ja
Publication of JPS619853U publication Critical patent/JPS619853U/ja
Application granted granted Critical
Publication of JPH0422314Y2 publication Critical patent/JPH0422314Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Control Of Temperature (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP9307384U 1984-06-21 1984-06-21 バ−ンイン処理装置 Granted JPS619853U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9307384U JPS619853U (ja) 1984-06-21 1984-06-21 バ−ンイン処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9307384U JPS619853U (ja) 1984-06-21 1984-06-21 バ−ンイン処理装置

Publications (2)

Publication Number Publication Date
JPS619853U JPS619853U (ja) 1986-01-21
JPH0422314Y2 true JPH0422314Y2 (enrdf_load_stackoverflow) 1992-05-21

Family

ID=30650423

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9307384U Granted JPS619853U (ja) 1984-06-21 1984-06-21 バ−ンイン処理装置

Country Status (1)

Country Link
JP (1) JPS619853U (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2511205Y2 (ja) * 1989-06-16 1996-09-25 株式会社藤田製作所 バ―ンイン処理装置
JP7341921B2 (ja) * 2020-02-20 2023-09-11 株式会社東芝 空調装置及びエージング方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4374317A (en) * 1979-07-05 1983-02-15 Reliability, Inc. Burn-in chamber
JPS58196025A (ja) * 1982-05-12 1983-11-15 Hitachi Ltd 半導体等のエ−ジング装置

Also Published As

Publication number Publication date
JPS619853U (ja) 1986-01-21

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