JPS619853U - バ−ンイン処理装置 - Google Patents

バ−ンイン処理装置

Info

Publication number
JPS619853U
JPS619853U JP9307384U JP9307384U JPS619853U JP S619853 U JPS619853 U JP S619853U JP 9307384 U JP9307384 U JP 9307384U JP 9307384 U JP9307384 U JP 9307384U JP S619853 U JPS619853 U JP S619853U
Authority
JP
Japan
Prior art keywords
burn
thermostatic
chamber
oven
thermostatic chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9307384U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0422314Y2 (enrdf_load_stackoverflow
Inventor
禮三 三ツ井
Original Assignee
株式会社 藤田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社 藤田製作所 filed Critical 株式会社 藤田製作所
Priority to JP9307384U priority Critical patent/JPS619853U/ja
Publication of JPS619853U publication Critical patent/JPS619853U/ja
Application granted granted Critical
Publication of JPH0422314Y2 publication Critical patent/JPH0422314Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Control Of Temperature (AREA)
JP9307384U 1984-06-21 1984-06-21 バ−ンイン処理装置 Granted JPS619853U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9307384U JPS619853U (ja) 1984-06-21 1984-06-21 バ−ンイン処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9307384U JPS619853U (ja) 1984-06-21 1984-06-21 バ−ンイン処理装置

Publications (2)

Publication Number Publication Date
JPS619853U true JPS619853U (ja) 1986-01-21
JPH0422314Y2 JPH0422314Y2 (enrdf_load_stackoverflow) 1992-05-21

Family

ID=30650423

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9307384U Granted JPS619853U (ja) 1984-06-21 1984-06-21 バ−ンイン処理装置

Country Status (1)

Country Link
JP (1) JPS619853U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0310272U (enrdf_load_stackoverflow) * 1989-06-16 1991-01-31
JP2021131318A (ja) * 2020-02-20 2021-09-09 株式会社東芝 空調装置及びエージング方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5611372A (en) * 1979-07-05 1981-02-04 Reliability Inc Burn-in chamber
JPS58196025A (ja) * 1982-05-12 1983-11-15 Hitachi Ltd 半導体等のエ−ジング装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5611372A (en) * 1979-07-05 1981-02-04 Reliability Inc Burn-in chamber
JPS58196025A (ja) * 1982-05-12 1983-11-15 Hitachi Ltd 半導体等のエ−ジング装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0310272U (enrdf_load_stackoverflow) * 1989-06-16 1991-01-31
JP2021131318A (ja) * 2020-02-20 2021-09-09 株式会社東芝 空調装置及びエージング方法

Also Published As

Publication number Publication date
JPH0422314Y2 (enrdf_load_stackoverflow) 1992-05-21

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