JPH0421973U - - Google Patents
Info
- Publication number
- JPH0421973U JPH0421973U JP6343990U JP6343990U JPH0421973U JP H0421973 U JPH0421973 U JP H0421973U JP 6343990 U JP6343990 U JP 6343990U JP 6343990 U JP6343990 U JP 6343990U JP H0421973 U JPH0421973 U JP H0421973U
- Authority
- JP
- Japan
- Prior art keywords
- board
- body plate
- inspection
- jig main
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 12
- 239000000758 substrate Substances 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
Landscapes
- Measuring Leads Or Probes (AREA)
Description
第1図Aは、本考案の一実施例に係る基板検査
装置の平面図、第1図Bは、第1図Aに示す検査
ユニツトの拡大図、第1図Cは、第1図Aに示す
治具本体プレートの伸縮の構造を示す図、第2図
は本考案の一実施例に係る基板検査装置及び液晶
基板の側面図、第3図Aは、従来の基板検査装置
の底面図、第3図Bは、第3図Aに示すプローブ
ブロツク部分の側面の拡大断面図である。
2a,2b……治具本体プレート、4……プロ
ーブ、8Xθ,8Y……調整用マイクロメータ、
10……液晶基板、10P……パツド、81,8
2……検査ユニツト。
1A is a plan view of a board inspection apparatus according to an embodiment of the present invention, FIG. 1B is an enlarged view of the inspection unit shown in FIG. 1A, and FIG. 1C is a plan view of the inspection unit shown in FIG. 1A. 2 is a side view of a substrate inspection device and a liquid crystal substrate according to an embodiment of the present invention, and FIG. 3A is a bottom view of a conventional substrate inspection device. FIG. 3B is an enlarged side sectional view of the probe block portion shown in FIG. 3A. 2a, 2b...Jig body plate, 4...Probe, 8Xθ, 8Y...Adjustment micrometer,
10...Liquid crystal board, 10P...Pad, 81,8
2...Inspection unit.
Claims (1)
端子であつて、検査対象である基板の導通パター
ンの所定の箇所に接触する複数の接触端子、 を備えた基板検査装置において、 治具本体プレート上に二以上の検査ユニツトを
脱着可能なように備え、 前記接触子を分割して各検査ユニツトに備え、 検査ユニツトに備えられる調整具であつて、治
具本体プレート上における検査ユニツトの位置を
調整し、接触端子を検査対象である基板の微細な
導通パターンの所定の箇所に接触させる為の調整
具を備えている、 ことを特徴とする基板検査装置。[Scope of Utility Model Registration Claims] A jig main body plate, a plurality of contact terminals provided on the jig main body plate that contact predetermined locations of a conductive pattern of a board to be inspected; In a board inspection apparatus equipped with a jig body plate, two or more inspection units are removably provided on a jig main body plate, the contactor is divided and provided in each inspection unit, and an adjustment tool provided in the inspection unit. A board characterized in that it is equipped with an adjustment tool for adjusting the position of the inspection unit on the jig main plate and bringing the contact terminal into contact with a predetermined location of a fine conductive pattern on the board to be inspected. Inspection equipment.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6343990U JPH0421973U (en) | 1990-06-14 | 1990-06-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6343990U JPH0421973U (en) | 1990-06-14 | 1990-06-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0421973U true JPH0421973U (en) | 1992-02-24 |
Family
ID=31593490
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6343990U Pending JPH0421973U (en) | 1990-06-14 | 1990-06-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0421973U (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008544283A (en) * | 2005-06-24 | 2008-12-04 | フォームファクター, インコーポレイテッド | Method and apparatus for adjusting a multi-substrate probe structure |
JP2010540941A (en) * | 2007-09-26 | 2010-12-24 | フォームファクター, インコーポレイテッド | Assembly and alignment of components |
JP2017194388A (en) * | 2016-04-21 | 2017-10-26 | 日本電子材料株式会社 | Probe card |
WO2023248595A1 (en) * | 2022-06-22 | 2023-12-28 | ヤマハファインテック株式会社 | Method for manufacturing probe unit, probe unit, probe mounting body, and electrical inspection device |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS519260A (en) * | 1974-07-11 | 1976-01-24 | Mitsubishi Rayon Co | |
JPS5623470B2 (en) * | 1976-12-20 | 1981-05-30 | ||
JPH03218472A (en) * | 1990-01-23 | 1991-09-26 | Nippon Maikuronikusu:Kk | Probe for display panel |
JPH046475A (en) * | 1990-04-24 | 1992-01-10 | Canon Inc | Fixed state tester for electronic component |
-
1990
- 1990-06-14 JP JP6343990U patent/JPH0421973U/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS519260A (en) * | 1974-07-11 | 1976-01-24 | Mitsubishi Rayon Co | |
JPS5623470B2 (en) * | 1976-12-20 | 1981-05-30 | ||
JPH03218472A (en) * | 1990-01-23 | 1991-09-26 | Nippon Maikuronikusu:Kk | Probe for display panel |
JPH046475A (en) * | 1990-04-24 | 1992-01-10 | Canon Inc | Fixed state tester for electronic component |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008544283A (en) * | 2005-06-24 | 2008-12-04 | フォームファクター, インコーポレイテッド | Method and apparatus for adjusting a multi-substrate probe structure |
JP2010540941A (en) * | 2007-09-26 | 2010-12-24 | フォームファクター, インコーポレイテッド | Assembly and alignment of components |
JP2017194388A (en) * | 2016-04-21 | 2017-10-26 | 日本電子材料株式会社 | Probe card |
WO2023248595A1 (en) * | 2022-06-22 | 2023-12-28 | ヤマハファインテック株式会社 | Method for manufacturing probe unit, probe unit, probe mounting body, and electrical inspection device |
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