JPH0418462U - - Google Patents
Info
- Publication number
- JPH0418462U JPH0418462U JP5975590U JP5975590U JPH0418462U JP H0418462 U JPH0418462 U JP H0418462U JP 5975590 U JP5975590 U JP 5975590U JP 5975590 U JP5975590 U JP 5975590U JP H0418462 U JPH0418462 U JP H0418462U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- anodic bonding
- pressure sensor
- sensor device
- semiconductor pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000011521 glass Substances 0.000 claims description 2
Description
第１図はこの考案の一実施例である半導体圧力
センサー装置の断面図、第２図は第１図の半導体
圧力センサー装置の平面図、第３図は従来の半導
体圧力センサー装置の断面図、第４図は第４図の
半導体圧力センサー装置の平面図である。
図において、１はガラス、２は半導体センサー
チツプ、３は陽極接合、４は真空室、５は半導体
ＩＣチツプを示す。なお、図中、同一符号は同一
、または相当部分を示す。
FIG. 1 is a sectional view of a semiconductor pressure sensor device which is an embodiment of this invention, FIG. 2 is a plan view of the semiconductor pressure sensor device of FIG. 1, and FIG. 3 is a sectional view of a conventional semiconductor pressure sensor device. 4 is a plan view of the semiconductor pressure sensor device of FIG. 4. FIG. In the figure, 1 is glass, 2 is a semiconductor sensor chip, 3 is anodic bonding, 4 is a vacuum chamber, and 5 is a semiconductor IC chip. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.
Claims (1)
センサー装置において、陽極接合を行うガラス上
に複数個の半導体ＩＣチツプを搭載したことを特
徴とする半導体圧力センサー装置。 1. A semiconductor pressure sensor device having a vacuum chamber formed by anodic bonding, characterized in that a plurality of semiconductor IC chips are mounted on glass to which the anodic bonding is performed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5975590U JPH0418462U (en) | 1990-06-06 | 1990-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5975590U JPH0418462U (en) | 1990-06-06 | 1990-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0418462U true JPH0418462U (en) | 1992-02-17 |
Family
ID=31586534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5975590U Pending JPH0418462U (en) | 1990-06-06 | 1990-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418462U (en) |
-
1990
- 1990-06-06 JP JP5975590U patent/JPH0418462U/ja active Pending