JPH02146341U - - Google Patents
Info
- Publication number
- JPH02146341U JPH02146341U JP5498289U JP5498289U JPH02146341U JP H02146341 U JPH02146341 U JP H02146341U JP 5498289 U JP5498289 U JP 5498289U JP 5498289 U JP5498289 U JP 5498289U JP H02146341 U JPH02146341 U JP H02146341U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- sensor chip
- pressure sensor
- detection device
- pressure detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 5
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 3
- 125000006850 spacer group Chemical group 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 description 2
Description
第１図はこの考案の一実施例による圧力検出装
置の平面図、第２図は第１図の−線の断面図
、第３図はこの考案の他の実施例による圧力検出
装置の断面図、第４図は従来の半導体圧力検出装
置の平面図、第５図は第４図の−線の断面図
である。
１……半導体圧力センサチツプ、３……台座、
４……基板、１２……スペーサ、１３……治具、
１４……Ｏリング。なお、図中、同一符号は同一
、又は相当部分を示す。
FIG. 1 is a plan view of a pressure detection device according to an embodiment of this invention, FIG. 2 is a sectional view taken along the line - in FIG. 1, and FIG. 3 is a sectional view of a pressure detection device according to another embodiment of this invention. , FIG. 4 is a plan view of a conventional semiconductor pressure detection device, and FIG. 5 is a sectional view taken along the - line in FIG. 4. 1... Semiconductor pressure sensor chip, 3... Pedestal,
4...Substrate, 12...Spacer, 13...Jig,
14...O-ring. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.
補正 平２．５．８
実用新案登録請求の範囲を次のように補正する
。Amendment 2.5.8 Hei 2. The scope of claims for utility model registration is amended as follows.
【実用新案登録請求の範囲】
基板上に台座を介して取り付けられ、上記基板
に電気的に接続された圧力センサチツプと、上記
基板上において上記圧力センサチツプの周辺を包
囲するように配置され電子部品を搭載しない環状
のスペースとを備えた圧力検出装置。[Claims for Utility Model Registration] A pressure sensor chip mounted on a substrate via a pedestal and electrically connected to the substrate, and an electronic component arranged on the substrate so as to surround the pressure sensor chip. A pressure detection device equipped with an annular space that is not mounted.
Claims (1)
に電気的に接続された圧力センサチツプと、上記
基板上において上記圧力センサチツプの周辺を包
囲するように配置され電子部品を搭載しない環状
のスペーサとを備えた圧力検出装置。 A pressure sensor chip mounted on a substrate via a pedestal and electrically connected to the substrate, and an annular spacer arranged on the substrate so as to surround the pressure sensor chip and not carrying any electronic components. Pressure detection device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5498289U JPH02146341U (en) | 1989-05-12 | 1989-05-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5498289U JPH02146341U (en) | 1989-05-12 | 1989-05-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02146341U true JPH02146341U (en) | 1990-12-12 |
Family
ID=31577532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5498289U Pending JPH02146341U (en) | 1989-05-12 | 1989-05-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146341U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6136164A (en) * | 1984-07-25 | 1986-02-20 | 京セラ株式会社 | Electroconductive ceramics |
-
1989
- 1989-05-12 JP JP5498289U patent/JPH02146341U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6136164A (en) * | 1984-07-25 | 1986-02-20 | 京セラ株式会社 | Electroconductive ceramics |