JPH0418373B2 - - Google Patents

Info

Publication number
JPH0418373B2
JPH0418373B2 JP58183688A JP18368883A JPH0418373B2 JP H0418373 B2 JPH0418373 B2 JP H0418373B2 JP 58183688 A JP58183688 A JP 58183688A JP 18368883 A JP18368883 A JP 18368883A JP H0418373 B2 JPH0418373 B2 JP H0418373B2
Authority
JP
Japan
Prior art keywords
evaporation
base material
opening
substrate
vertical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58183688A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6076024A (ja
Inventor
Kyuzo Nakamura
Yoshifumi Oota
Hiroki Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP18368883A priority Critical patent/JPS6076024A/ja
Publication of JPS6076024A publication Critical patent/JPS6076024A/ja
Publication of JPH0418373B2 publication Critical patent/JPH0418373B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP18368883A 1983-10-01 1983-10-01 垂直磁気記録体の製造装置 Granted JPS6076024A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18368883A JPS6076024A (ja) 1983-10-01 1983-10-01 垂直磁気記録体の製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18368883A JPS6076024A (ja) 1983-10-01 1983-10-01 垂直磁気記録体の製造装置

Publications (2)

Publication Number Publication Date
JPS6076024A JPS6076024A (ja) 1985-04-30
JPH0418373B2 true JPH0418373B2 (cs) 1992-03-27

Family

ID=16140189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18368883A Granted JPS6076024A (ja) 1983-10-01 1983-10-01 垂直磁気記録体の製造装置

Country Status (1)

Country Link
JP (1) JPS6076024A (cs)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0239019B2 (ja) * 1981-07-16 1990-09-03 Matsushita Electric Ind Co Ltd Jikikirokubaitainoseizohoho
JPS5896868A (ja) * 1981-12-02 1983-06-09 Matsushita Electric Ind Co Ltd 反応蒸着装置
JPS58105433A (ja) * 1981-12-18 1983-06-23 Nippon Telegr & Teleph Corp <Ntt> 磁気記録媒体の製造装置
JPS59175036A (ja) * 1983-03-24 1984-10-03 Matsushita Electric Ind Co Ltd 磁気記録媒体の製造方法

Also Published As

Publication number Publication date
JPS6076024A (ja) 1985-04-30

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