JPH0416428Y2 - - Google Patents

Info

Publication number
JPH0416428Y2
JPH0416428Y2 JP1986057639U JP5763986U JPH0416428Y2 JP H0416428 Y2 JPH0416428 Y2 JP H0416428Y2 JP 1986057639 U JP1986057639 U JP 1986057639U JP 5763986 U JP5763986 U JP 5763986U JP H0416428 Y2 JPH0416428 Y2 JP H0416428Y2
Authority
JP
Japan
Prior art keywords
solution
groove
sulfuric acid
opener device
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986057639U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62170631U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986057639U priority Critical patent/JPH0416428Y2/ja
Publication of JPS62170631U publication Critical patent/JPS62170631U/ja
Application granted granted Critical
Publication of JPH0416428Y2 publication Critical patent/JPH0416428Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
JP1986057639U 1986-04-18 1986-04-18 Expired JPH0416428Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986057639U JPH0416428Y2 (enExample) 1986-04-18 1986-04-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986057639U JPH0416428Y2 (enExample) 1986-04-18 1986-04-18

Publications (2)

Publication Number Publication Date
JPS62170631U JPS62170631U (enExample) 1987-10-29
JPH0416428Y2 true JPH0416428Y2 (enExample) 1992-04-13

Family

ID=30887533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986057639U Expired JPH0416428Y2 (enExample) 1986-04-18 1986-04-18

Country Status (1)

Country Link
JP (1) JPH0416428Y2 (enExample)

Also Published As

Publication number Publication date
JPS62170631U (enExample) 1987-10-29

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