JPS62170631U - - Google Patents
Info
- Publication number
- JPS62170631U JPS62170631U JP5763986U JP5763986U JPS62170631U JP S62170631 U JPS62170631 U JP S62170631U JP 5763986 U JP5763986 U JP 5763986U JP 5763986 U JP5763986 U JP 5763986U JP S62170631 U JPS62170631 U JP S62170631U
- Authority
- JP
- Japan
- Prior art keywords
- groove
- set portion
- opener device
- solution
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 239000007921 spray Substances 0.000 claims 2
- 238000005530 etching Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5763986U JPH0416428Y2 (enExample) | 1986-04-18 | 1986-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5763986U JPH0416428Y2 (enExample) | 1986-04-18 | 1986-04-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62170631U true JPS62170631U (enExample) | 1987-10-29 |
| JPH0416428Y2 JPH0416428Y2 (enExample) | 1992-04-13 |
Family
ID=30887533
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5763986U Expired JPH0416428Y2 (enExample) | 1986-04-18 | 1986-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0416428Y2 (enExample) |
-
1986
- 1986-04-18 JP JP5763986U patent/JPH0416428Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0416428Y2 (enExample) | 1992-04-13 |