JPH0416429Y2 - - Google Patents

Info

Publication number
JPH0416429Y2
JPH0416429Y2 JP1986070605U JP7060586U JPH0416429Y2 JP H0416429 Y2 JPH0416429 Y2 JP H0416429Y2 JP 1986070605 U JP1986070605 U JP 1986070605U JP 7060586 U JP7060586 U JP 7060586U JP H0416429 Y2 JPH0416429 Y2 JP H0416429Y2
Authority
JP
Japan
Prior art keywords
tank
air
semiconductor
sulfuric acid
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986070605U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62182543U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986070605U priority Critical patent/JPH0416429Y2/ja
Publication of JPS62182543U publication Critical patent/JPS62182543U/ja
Application granted granted Critical
Publication of JPH0416429Y2 publication Critical patent/JPH0416429Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
JP1986070605U 1986-05-13 1986-05-13 Expired JPH0416429Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986070605U JPH0416429Y2 (enExample) 1986-05-13 1986-05-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986070605U JPH0416429Y2 (enExample) 1986-05-13 1986-05-13

Publications (2)

Publication Number Publication Date
JPS62182543U JPS62182543U (enExample) 1987-11-19
JPH0416429Y2 true JPH0416429Y2 (enExample) 1992-04-13

Family

ID=30912393

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986070605U Expired JPH0416429Y2 (enExample) 1986-05-13 1986-05-13

Country Status (1)

Country Link
JP (1) JPH0416429Y2 (enExample)

Also Published As

Publication number Publication date
JPS62182543U (enExample) 1987-11-19

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