JPH0416434Y2 - - Google Patents

Info

Publication number
JPH0416434Y2
JPH0416434Y2 JP1986071184U JP7118486U JPH0416434Y2 JP H0416434 Y2 JPH0416434 Y2 JP H0416434Y2 JP 1986071184 U JP1986071184 U JP 1986071184U JP 7118486 U JP7118486 U JP 7118486U JP H0416434 Y2 JPH0416434 Y2 JP H0416434Y2
Authority
JP
Japan
Prior art keywords
tank
sulfuric acid
semiconductor
steam
workbench
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986071184U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62184741U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986071184U priority Critical patent/JPH0416434Y2/ja
Publication of JPS62184741U publication Critical patent/JPS62184741U/ja
Application granted granted Critical
Publication of JPH0416434Y2 publication Critical patent/JPH0416434Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
JP1986071184U 1986-05-14 1986-05-14 Expired JPH0416434Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986071184U JPH0416434Y2 (enExample) 1986-05-14 1986-05-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986071184U JPH0416434Y2 (enExample) 1986-05-14 1986-05-14

Publications (2)

Publication Number Publication Date
JPS62184741U JPS62184741U (enExample) 1987-11-24
JPH0416434Y2 true JPH0416434Y2 (enExample) 1992-04-13

Family

ID=30913507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986071184U Expired JPH0416434Y2 (enExample) 1986-05-14 1986-05-14

Country Status (1)

Country Link
JP (1) JPH0416434Y2 (enExample)

Also Published As

Publication number Publication date
JPS62184741U (enExample) 1987-11-24

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