JPH0416434Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] This invention relates to a semiconductor opener device that sprays a dissolving liquid onto a semiconductor package to expose the chip.

[Prior Art] Conventionally, when analyzing failures of semiconductors (I, C) or performing quality checks, methods have been used to expose the chips by applying a dissolving solution, such as heated hot sulfuric acid, to the semiconductor package. There is.

A semiconductor package is placed on a set portion of a workbench so that hot sulfuric acid sprayed from a spray nozzle hits the package.

During operation when hot sulfuric acid is being injected, the workbench is covered by a hood.

[Problems to be solved by the invention] As mentioned above, the opener device uses hot sulfuric acid heated to near the boiling point as a dissolving solution to expose the chip, and during operation, a large amount of steam is generated in the dissolving tank of the semiconductor opening. occurs. The generated steam would escape from the workbench when the hood was opened and the semiconductor was removed from the workbench after the work was completed, and there was a risk that the worker would inhale the steam. For this reason, it was not desirable in terms of health management of workers.

Therefore, the object of this invention is to provide a semiconductor opener device that prevents workers from inhaling vapor when replacing semiconductors.

[Means for Solving the Problems] In order to achieve the above object, this invention provides an opener device having a semiconductor opening in which a workbench is covered by a hood that can be opened and closed. The stand is provided with a steam vent pipe for guiding the steam generated in the semiconductor opening to the outside, and a suction device that is turned on when the hood is opened is connected to the steam vent pipe.

[Function] In such an opener device, when the hood is opened after work is completed, the suction device is activated and steam is guided to the outside through the steam vent pipe. Therefore, there is no fear that the worker will inhale steam when removing the semiconductor from the workbench.

[Embodiment] Hereinafter, an embodiment of this invention will be described in detail with reference to the drawings of FIGS. 1 to 3.

FIG. 1 shows a schematic diagram of the entire device, which includes a storage tank section 1, a preheater section 3, a semiconductor opening section 5, a waste liquid cooling section 7, and a waste liquid storage tank section 9. These are located inside the aircraft.

A tank body 11 of the storage tank section 1 is made of an acid-resistant synthetic resin material, and a first electromagnetic valve 13 that is normally closed is provided at the top. In addition, tank body 1
1 communicates with a heater tank 17 of the preheating heater section 3 via a second electromagnetic valve 15 which is normally closed, and the heater tank 17 is arranged at a lower position than the tank body 11. Thereby, the sulfuric acid in the tank body 11 is sent into the heater tank 17 by a drop.

The heater tank 17 is connected to an air pump 25 which will be described later.
The sulfuric acid in the tank 17 is forcibly sent out by the action of air pressure from the tank 17.
A heat source section 21 such as a nichrome wire is provided in which the sulfuric acid contained in the sulfuric acid 7 is controlled to be about 250.degree.

The first and second solenoid valves 13 and 15 are the heater tank 1
It is controlled to open and close freely by a liquid level sensor 23 provided in the heater tank 17 that detects the presence or absence of sulfuric acid, and opens when the liquid level sensor 23 detects that the sulfuric acid in the heater tank 17 is empty. As a result, the tank body 11 is released to the atmosphere, while the sulfuric acid in the tank body 11 flows into the heater tank 17 by a drop.

The air pump 25 is driven by a desired driving means, and third, fourth, and fifth electromagnetic valves 27, 29, and 30 are provided in series on the discharge side of the air pump 25.

The third, fourth, and fifth solenoid valves 27, 29, and 30 are three-way valves that have a normally closed port _P1 and a normally open port _P2 in addition to the intake port P. Port _P2 of valve 30
is in communication with the air pipe 31, and port _P1 is idle.

In addition, the air pipe 31 has a normally open seventh pipe that releases the steam in the dissolution tank 41 to the waste liquid storage tank section 9, which will be described later.
Solenoid valve 53 and port P ₂ of the fifth solenoid valve 30
An air intake port 37 communicating with the dissolving tank 41 and a bypass passage 55 for returning condensed sulfuric acid to the dissolution tank 41 are provided.

The fourth solenoid valve 29 is switched and controlled by a command signal from an electrode sensor 49, which will be described later, the port P communicates with the port _P2 of the third solenoid valve 27, and the port _P1 communicates with the port of the fifth solenoid valve 30. It communicates with P.
Further, port P ₂ of the fourth solenoid valve 29 communicates with the heater tank 17 .

The third solenoid valve 27 is used to open the hood 61, which will be described later.
Switching is controlled by . The sixth solenoid valve 38 provided in the heater tank 17 is normally open and
It functions to release the steam in the liquid storage sensor section 7 to the waste liquid storage sensor section 9, and is controlled to be closed by signals from the temperature sensor 19 and a liquid level sensor 45, which will be described later. This causes air pressure to act within the heater tank 17.

The temperature sensor 19 has a function of suppressing the output of a start command signal even if the start switch is operated when the temperature of the sulfuric acid is about 250° C. or lower.

On the other hand, the semiconductor opening 5 is connected to a workbench 39 on which a DIP type semiconductor W is set, a solution 41 disposed below the workbench 39, and a pump 43 that injects sulfuric acid into the package of the semiconductor W. The dissolution tank 41 is in communication with the heater tank 17.

The dissolution tank 41 is provided with a liquid level sensor 45, a temperature sensor 47, and an electrode sensor 49, respectively. The liquid level sensor 45 detects the presence or absence of sulfuric acid in the dissolution tank 41.

The temperature sensor 47 has a function of controlling the heat source 51 such as a nichrome wire to maintain the temperature of the sulfuric acid in the melting tank 41 at around 290°C, and when it detects that the temperature of the sulfuric acid in the melting tank 41 has reached about 290°C, it turns on the pump 43. do. Further, the electrode sensor 49 detects the current flowing through the sulfuric acid when the package of the semiconductor W is melted and the internal chip is exposed, and a timer that is activated after the detection stops the drive of the pump 43 after a certain period of time has elapsed. , controls the switching of the fourth solenoid valve 29, and closes the normally open seventh solenoid valve 53. As a result, air pressure acts on the dissolution tank 41. The electrode sensor 49 and the chip terminal of the semiconductor W are electrically connected to the holder 57 that holds the semiconductor W, so that an electric circuit is formed via sulfuric acid.

A steam vent pipe 59 facing above the melting tank 41 is attached to the workbench 39, and the steam vent pipe 59
is the aspirator 6 that operates when the hood 61 is opened.
It is connected and communicated with a suction device 65 such as No. 3. The aspirator 63 functions to suction steam by the negative pressure generated when air is blown out from the nozzle 67 and to release the suctioned steam to the drain liquid storage tank section 9. Further, the nozzle 67 communicates with the port _P1 of the third electromagnetic valve 27 and has a spiral shape. This makes it possible to obtain strong negative pressure.

The hood 61 can be opened and closed using a hinge as a fulcrum, and covers the workbench 39 when closed, and is provided with a detection switch 69 on the body that is turned on when the hood 61 is opened.

The detection switch 69 switches and controls the third solenoid valve 3. As a result, port P ₁ is opened, allowing air from air pump 25 to flow into nozzle 67 of aspirator 63.

The drained liquid cooling section 7 consists of a cooling trap 71 communicating with the dissolving tank 41 and a cooling fan 73 that blows cooling air to the trap 71. The cooling fan 73 cools the drained liquid in the trap 71 to about 100°C. It will be cooled down to.

The drained liquid storage tank section 9 communicates with the cooling trap 71 and is made of a synthetic resin material such as fluororesin (Teflon), and drains when a pair of liquid level sensors 77 provided in the tank section 75 touch the liquid surface. A current flows through it, allowing you to know when it's full. As a result, even if the start switch is turned on, the function remains in a stopped state.

Note that the full tank section 75 can be detached from the bellows 81 and can be replaced with a new tank section.

In the opener device configured as described above, the semiconductor W is set on the workbench 39 and the start switch is turned on. As a result, tank body 1
The sulfuric acid in the heater tank 17 is sent into the heater tank 17 when the first and second solenoid valves 13 and 15 are opened. The sulfuric acid in the heater tank 17 is heated to about 250° C. by the heat source section 21. When the sulfuric acid reaches approximately 250°C, the sixth solenoid valve 38 closes and the air pressure reaches the heater tank 1.
7. As a result, the hot sulfuric acid in the heater tank 17 is sent into the dissolution tank 41.

The hot sulfuric acid in the melting tank 41 is heated by the heat source 41 to approximately
Raised to 290℃. When the temperature sensor 47 detects that the temperature has reached approximately 290°C, the pump 43 is turned on and hot sulfuric acid is injected into the semiconductor W package. Thereafter, injection continues until the package melts and the chip is exposed. When the chip is exposed, the electrode sensor 49 detects the current flowing through the sulfuric acid, and after a certain period of time has elapsed since the detection, the pump 43 is stopped and the fourth and seventh electromagnetic valves 29 are controlled. As a result, air pressure acts within the dissolution tank 41,
The waste liquid that has completed its work in the dissolution tank 41 is sent to a cooling trap 71. Then, after being cooled to about 100° C., it is discharged to the tank section 75.

Next, when the hood 61 is opened to replace the semiconductor W, the detection switch 69 is turned on and the port _P1 of the third solenoid valve 27 is opened. As a result, the vapor in the dissolution tank 41 is sucked by the asvilator 63 and released to the drain liquid storage tank section 9. As a result, the worker does not inhale steam when replacing the semiconductor W.

[Effects of the invention] As explained above, according to the opener device of this invention, when the hood is opened, steam is sucked in, so it is possible to prevent the worker from inhaling the steam when replacing semiconductors, making it easier to work. This is highly desirable in terms of human health management.

[Brief explanation of the drawing]

FIG. 1 is an overall schematic explanatory diagram of the opener device of this invention, FIG. 2 is a sectional view of the suction device, and FIG. 3 is a partial sectional view of the workbench. Explanation of main drawing symbols, 5...Semiconductor opening,
39...Workbench, 59...Steam release pipe, 61...
Hood, 65...suction device.

Claims (1)

[Scope of utility model registration request] In an opener device equipped with a semiconductor opening whose workbench is covered by a hood that can be opened and closed, the workbench is provided with a steam vent pipe that guides the steam generated in the semiconductor opening to the outside, A semiconductor opener device characterized in that a suction device that is turned on when the hood is opened is connected to the pipe.