JPH0579168B2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] This invention relates to an opener device that injects a solution into a semiconductor (IC) package to expose the chip, and a drain extraction method that removes drain liquid in a ventilation duct. It is related to the device.

[Conventional technology]

Conventionally, when analyzing semiconductor (IC) failures or performing quality checks, a method has been used to expose the chip by applying a dissolving solution, such as heated hot sulfuric acid, to the semiconductor package.

A semiconductor package is placed on a set portion of a work table so that hot sulfuric acid sprayed from a spray nozzle hits the package.

The semiconductor chip is exposed, and the waste liquid that has finished its work is cooled in the waste liquid cooling section and then sent to the waste liquid storage tank.

[Problem that the invention seeks to solve]

As mentioned above, the opener device uses hot sulfuric acid heated to about 290℃, near its boiling point, as the dissolving solution to expose the chip.After the hot sulfuric acid has finished its work, it is cooled to about 100℃ in the drain section. , is sent to the wastewater storage tank section.

The temperature of the hot sulfuric acid in the waste liquid storage tank is around 100°C, and the steam is guided from the place where it is generated to the ventilation duct. There is a risk that the vapor guided into the air duct will solidify due to the cold air and accumulate at the bottom of the air duct, and the liquid that has accumulated at the bottom of the duct is sulfuric acid, making it very troublesome to dispose of it.

Therefore, it is an object of the present invention to make it possible to safely and easily dispose of the sulfuric acid accumulated in the ventilation duct.

[Means for solving problems]

In order to achieve the above object, the present invention provides a cooling trap that cools the waste liquid that has finished its work in a semiconductor opening provided in a blower duct by cooling air passing through the duct, and a cooling trap. In the opener device, the opener device is equipped with a drainage liquid storage tank section for temporarily storing the drainage liquid inside the air duct,
A drain outlet pipe is provided near the bottom of the duct and has a first and a second connection portion with an intake port facing the drain outlet pipe.
The connecting portion is connected to the discharge port of the air pump, and the second connecting portion is connected to the drain liquid storage tank portion.

[Effect]

In such an opener device, the sulfuric acid that has solidified and accumulated in the ventilation duct is taken in through the intake port of the drain pipe. The sulfuric acid taken in from the intake port is sequentially sent out to the waste liquid storage tank section by air discharged from the air pump, making it possible to safely and easily dispose of the waste liquid accumulated in the ventilation duct.

〔Example〕

Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings of FIGS. 1 and 2.

FIG. 1 shows a schematic diagram of the entire device, which includes a storage tank section 1, a preheater section 3, a semiconductor opening section 5, a drain cooling section 7, and a drain reservoir tank section 9. These are located inside the aircraft.

A tank body 11 of the storage tank section 1 is made of an acid-resistant synthetic resin material, and a first electromagnetic valve 13 that is normally closed is provided at the top. In addition, tank body 1
1 communicates with a heater tank 17 of the preheating heater section 3 via a second solenoid valve 16 which is normally closed, and the heater tank 17 is arranged at a lower position than the tank body 11. Thereby, the sulfuric acid in the tank body 11 is folded into the heater tank 17 by the drop.

The heater tank 17 is an air pump 25 which will be described later.
The sulfuric acid in the tank 17 is forcibly sent out by the action of air pressure from the tank 17.
A heat source section 21 such as a nichrome wire is provided in which the sulfuric acid contained therein is managed and controlled at about 250°C.

The first and second solenoid valves 13 and 15 are the heater tank 1
It is controlled to open and close freely by a liquid level sensor 23 provided in the heater tank 17 that detects the presence or absence of sulfuric acid, and opens when the liquid level sensor 23 detects that the sulfuric acid in the heater tank 17 is empty. As a result, the tank body 11 is opened to the atmosphere, while the sulfuric acid in the tank body 11 flows into the heater tank 17 by a drop.

The air pump 25 is driven by a desired driving means, and third, fourth, and fourth electromagnetic valves 27, 29, and 30 are provided in series on the discharge side of the air pump 25.

The third, fourth, and fifth solenoid valves 27, 29, and ₃₀ have a normally closed port _P1 and a normally open port P2 in addition to the intake port P, and the fifth solenoid valve 30 has a port _P2. communicates with the air pipe 31, and port _P1 communicates with the heater tank 17.
Further, the fifth solenoid valve 30 is switched and controlled by an empty signal from the liquid level sensor 45 of the semiconductor opening 5.

The air pipe 31 includes a normally open seventh solenoid valve 53 that releases steam in the dissolution tank 41 to the waste liquid storage tank section 9, which will be described later, and a port for the fifth solenoid valve 30.
Air intake port 37 communicating with P ₂ and air pipe 31
A bypass passage 33 is provided for returning the sulfuric acid solidified therein to the dissolution tank 41.

The fourth solenoid valve 29 is switched and controlled by a command signal from an electrode sensor 49, which will be described later, the port P communicates with the port _P2 of the third solenoid valve 27, and the port _P1 communicates with the port of the fifth solenoid valve 30. It communicates with P.
Further, the port _P2 of the fourth electromagnetic valve 29 communicates with a drain liquid extraction pipe 77, which will be described later.

The third solenoid valve 27 is switched and controlled when the hood 61 is opened.

The hood 61 can be opened and closed using a hinge as a fulcrum, and when it is closed, it covers the workbench 39 of the semiconductor opening 5, and a detection switch 69 that is turned on when the hood 61 is "open" is provided on the machine body. There is.

The detection switch 69 switches and controls the third solenoid valve 27 . As a result, ports P ₁ and P ₂ are switched and air from the air pump 25 is routed to the aspirator 6.
When the hood 61 is opened, the sulfuric acid vapor accumulated inside the workbench 39 is sucked out to prevent the worker from inhaling the vapor.

Sixth solenoid valve 38 provided in heater tank 17
is normally open and functions to release steam in the heater tank 17 to the waste liquid storage tank section 9, and is controlled to be closed by signals from the temperature sensor 19 and a liquid level sensor 45, which will be described later. This causes air pressure to act within the heater tank 17.

The temperature sensor 19 has a function of suppressing the output of the stat command signal even if the stat switch is activated when the temperature of the sulfuric acid is about 250° C. or lower.

The semiconductor opening 5 consists of a workbench 39 on which a DIP type semiconductor W is set, a dissolution tank 41 disposed below the workbench 39, and a pump 43 that injects sulfuric acid into the package of the semiconductor W. The dissolution tank 41 communicates with the heater tank 17 .

The dissolution tank 41 is provided with the above-mentioned liquid level sensor 45 and a temperature sensor 47 outside the electrode sensor 49, respectively. The liquid level sensor 45 detects the presence or absence of sulfuric acid in the dissolution tank 41.

The temperature sensor 47 has a function of controlling the heat source 51 such as a nichrome wire to maintain the temperature of the sulfuric acid in the melting tank 41 at around 290°C, and when it detects that the temperature of the sulfuric acid in the melting tank 41 has reached about 290°C, it turns on the pump 43. do. Further, the electrode sensor 49 detects the current flowing through the sulfuric acid when the package of the semiconductor W is melted and the internal chip is exposed, and stops driving the pump 43 after a certain period of time by a timer activated after detection. , controls switching of the fourth solenoid valve 29, and closes the normally open sixth solenoid valve 53. As a result, air pressure acts on the dissolution tank 41 via the air pipe 31. The electrode sensor 49 and the chip terminal of the semiconductor W are electrically connected to a holder 57 that holds the semiconductor W, so that an electric circuit is formed via sulfuric acid.

The waste liquid cooling section 7 consists of a cooling trap 71 communicating with the dissolving tank 41 and a cooling fan 73 blowing cooling air to the trap 71.
is equipped with the cooling fan 73 and is provided inside the ventilation duct 75. As the cooling air flows through the blower duct 75, the liquid in the trap 71 is cooled down to about 100°C.

A drain pipe 77 is provided inside the blower duct 75, and an intake port 79 faces a portion near the bottom of the blower duct 79.

The first connection part 81 of the drain liquid extraction pipe 77 is connected and communicated with the port P ₂ of the fourth solenoid valve 29, and the second connection part 83
are connected and communicated with the tank 85 of the drain liquid storage tank section 9, respectively.

A tank section 85 of the drained liquid storage tank section 9 communicates with the cooling trap 71 and is made of a synthetic resin material such as fluororesin (Teflon), and a pair of liquid level sensors 87 provided in the tank section 85 touch the liquid surface. This causes an electric current to flow through the drain, letting you know when it's full. As a result, even if the start switch is turned on, the function remains in a stopped state.

Note that the full tank section 85 can be detached from the bellows 89 and replaced with a new tank section.

In the opener device constructed in this way, the hot sulfuric acid that has finished its work in the semiconductor opening 5 is transferred to the fourth
Air flows into the air pipe 31 when the port P ₁ of the solenoid valve 29 is opened. As a result, the hot sulfuric acid in the dissolution tank 41 is sent to the cooling trap 71 by air pressure, and after being cooled down to about 100° C. in the trap 71, it is sent into the tank 85 of the waste liquid storage tank section 9.

The steam generated from the tank 85 of the waste liquid storage tank section 9 is sent into the ventilation duct, but at this time, solidified sulfuric acid accumulates at the bottom of the ventilation duct 75 over time.

When the sulfuric acid accumulated at the bottom of the ventilation duct 75 reaches a certain amount, it flows through the intake port 79 of the drain pipe 77.

At this time, when air from the pump 25 is sent into the drain pipe 77 via the fourth electromagnetic valve 29, many bubbles are generated because the hot sulfuric acid flowing in from the intake port 79 is viscous. These bubbles grow and are pushed upward by the air that is successively introduced. Thereafter, due to the generation of bubbles, the hot sulfuric acid in the drain liquid take-out pipe 77 is sent to the drain liquid storage tank section 9 and is constantly discharged to the position of the intake port 79.

In this case, a pressure adjustment port 90 is provided on the first connection portion 81 side of the drain liquid extraction pipe 77, and by adjusting this adjustment port 90, the pressure can be set to the optimum pressure state where air bubbles can be generated. can be taken out.

As shown in FIG. 2, the drain pipe 77 is provided with a conduit 93 having an intake port 79 in the main pair 91 of the drain pipe and a nozzle 95 that continues to the first connecting part 81. It is also possible to create a negative pressure section 97 inside the main body 91 by using the negative pressure, and to use the negative pressure as an aspirator to suck out the drained liquid. In this case, the second connecting portion 83 is connected and communicated with the drain liquid storage tank portion 9, and the first connecting portion 81 is connected and communicated with the discharge port of the pump 25 via the fourth electromagnetic valve 29.

As a result, the liquid in the ventilation duct 75 is drained from the conduit 9.
After being sucked up into the main body 91 through the waste liquid storage tank 9, the waste liquid is reliably sent to the waste liquid storage tank section 9.

Incidentally, since the pump 25 is used for treating waste liquid, the cost can be reduced and the layout is also favorable.

〔Effect of the invention〕

As explained above, according to the present invention, when sulfuric acid vapor solidifies and accumulates in the ventilation duct, it can be easily taken out through the drain pipe, making it possible to safely process sulfuric acid. It becomes like this.

[Brief explanation of the drawing]

Figure 1 is an overall schematic explanatory diagram of the opener device;
FIG. 2 is a sectional view of the drain fluid extraction device, and FIG. 3 is a sectional view similar to FIG. 2, showing another embodiment of the drainage fluid extraction device. Explanation of main drawing symbols, 5...Semiconductor opening, 9
... Drainage storage tank section, 25 ... Pump, 71 ...
...Cooling trap, 75...Blower duct, 77...
Drainage outlet pipe, 79...intake port, 81, 83...first and second connection parts.

Claims (1)

[Claims] 1 A cooling trap provided in the ventilation duct that cools the waste liquid that has finished its work at the semiconductor opening by cooling air passing through the duct, and a waste liquid storage tank that temporarily stores the waste liquid in the cooling trap. In the opener device, the air blower duct includes first and second intake ports, each of which has an intake port facing a portion near the bottom of the duct.
Inside a blower duct of an opener device, characterized in that a drain outlet pipe is provided with a connecting portion, and the first connecting portion is connected to a discharge port of an air pump, and the second connecting portion is connected to a drain fluid storage tank portion. drainage extraction device.