JPH0416427Y2 - - Google Patents

Description

[Detailed description of the invention] [Industrial application field] This invention relates to a waste liquid storage tank that temporarily stores used waste liquid in an opener device that can be used for inspection or quality check during failure analysis of semiconductors. It is something.

[Prior Art] Conventionally, in order to expose a semiconductor chip sealed in plastic, a common method is to expose the chip by applying sulfuric acid to the package using the bench-lily effect produced by running tap water to dissolve the chip. It is carried out in

[Problems to be solved by the invention] With such means, it is troublesome to dispose of the used waste liquid.

Therefore, the object of this invention is to provide a waste liquid storage tank for an opener device that facilitates waste liquid treatment.

[Means for Solving the Problems] In order to achieve the above-mentioned object, an opener device is provided with a drained liquid storage tank whose socket is located below the drained liquid nozzle. The tank body is stored so as to be freely pulled out from the tank housing part, and a flexible body that can be expanded and contracted up and down is brought into elastic contact with the upper surface of the tank body to seal the area around the socket and to control the amount of liquid drained in the tank body. This is detected by a detection means.

[Function] In such a wastewater storage tank, the wastewater that has finished its work is discharged from the wastewater nozzle and collected in the wastewater storage tank from the socket. The amount of drained liquid in the drained liquid storage tank is detected by a detection means, and when it is detected that the tank is full, the tank body is pulled out and the empty tank body is set in the tank storage section. When the tank is full, the liquid is drained by repeatedly replacing it with an empty tank.

[Example] Hereinafter, an example of this invention will be described in detail based on the accompanying drawings.

The drawing shows a schematic diagram of the entire device, which includes a storage tank section 1, a preheating heater section 3, a semiconductor opening process section 5, a waste liquid cooling section 7, and a waste liquid storage tank 9. These are housed in a main body case (not shown).

The tank 7 main body 11 of the storage tank section 1 is made of acid-resistant synthetic resin material, and has a normally closed first tank at the top.
A solenoid valve 13 is provided. Further, the tank body 11 communicates with a heater tank 17 of the preheating heater section 3 via a second solenoid valve 15 which is normally closed, and the heater tank 17 is arranged at a lower position than the tank body 11. Thereby, the sulfuric acid in the tank body 11 is sent into the heater tank 17 by a drop.

The sulfuric acid in the tank 17 is forcibly delivered to the heater tank 17 by the action of air pressure from an air pump, which will be described later.
A heat source section 21 such as a nichrome wire controlled at 250° C. is provided.

The first and second solenoid valves 13 and 15 are the heater tank 1
It is controlled to open and close freely by a liquid level sensor 23 provided in the heater tank 17 that detects the presence or absence of sulfuric acid, and opens when the liquid level sensor 23 detects that the sulfuric acid in the heater tank 17 is empty. As a result, the tank body 11 is opened to the atmosphere, while the sulfuric acid inside the tank body flows into the heater tank 17 by a drop.

The air pump 25 is driven by a desired driving means, and a normally closed third air pump is provided on the discharge side of the pump 25.
A solenoid valve 27 and a fourth solenoid valve 29 are provided in series with the solenoid valve 27 . The fourth solenoid valve 29 is a three-way valve having ports P, P ₁ and P _2.
P1 communicates with the heater tank 17, port _P2 communicates with the semiconductor opening process section 5, and the third solenoid valve 2
Port P communicating with port P 7 communicates with port P ₂ which is normally open.

The third solenoid valve 27 is opened by a signal from a start switch (not shown) and the liquid level sensor 23, and at the same time, port _P1 of the fourth solenoid valve 29 communicates with port P, and the fifth solenoid valve, which is always open, is opened. 38 is controlled to be closed.
Note that the fifth solenoid valve 38 is provided in the heater tank 17 to release steam to the atmosphere.

Additionally, the third solenoid valve 27 is connected to an electrode sensor 4 which will be described later.
It is controlled to open by a command signal from 9. The temperature sensor 19 has a function of suppressing the output of a start command signal even if the start switch is operated when the temperature of the sulfuric acid is about 250° C. or lower.

On the other hand, the semiconductor opening process section 5 includes a work table 39 on which a DIP type semiconductor 37 is set, and a work table 39 on which a DIP type semiconductor 37 is set.
9 and the semiconductor 3
Pump 4 that injects sulfuric acid to the package 37a of 7.
3, the dissolution tank 41 communicates with the heater tank 17 via a workbench 39, and the workbench 39 includes:
It is exposed from the main body case (not shown).

The sulfuric acid in the dissolution tank 41 is forcibly sent to the waste liquid cooling section 7 side by the air pressure acting inside the dissolution tank 41. A liquid level sensor 4 is installed in the dissolution tank 41.
5, a temperature sensor 47, and an electrode sensor 49, respectively. The liquid level sensor 45 is connected to the dissolving tank 41
Detects the presence or absence of sulfuric acid in the liquid.

The temperature sensor 47 has a function of controlling the heat source section 51 such as a nichrome wire to maintain the temperature of the sulfuric acid in the melting tank 41 at around 290°C, and when it detects that the temperature of the sulfuric acid in the melting tank 41 has reached about 290°C, it turns on the pump 43. do. Further, the electrode sensor 49 detects the current flowing through the sulfuric acid when the package 37a is opened and the internal chip is exposed, and a timer that is activated after detection stops the drive of the pump 43 after a certain period of time has elapsed.
The third solenoid valve 27 is opened, and the sixth solenoid valve 55, which will be described later, is closed. Note that the electrode sensor 47 and the chip terminal of the semiconductor 37 are electrically connected to a holder (not shown) that holds the semiconductor 47, so that an electric circuit can be formed via sulfuric acid.

The melting tank 41 is provided with a trap 53 that returns the condensate to the melting tank 41 when the steam condenses, and the trap 53 continues to a sixth solenoid valve 55, which is always open and releases the steam to the atmosphere.

The drained liquid cooling section 7 consists of a cooling trap 57 that communicates with the dissolving tank 41 and a cooling fan 59 that blows cooling air to the trap 57. The cooling fan 59 cools the drained liquid in the trap 57 to about 100°C. It will be cooled down to. A drain nozzle 61 extending from the drain cooling unit 7 is connected to a socket 65 of the drain liquid storage tank 63.
It is facing upward.

The drain liquid storage tank 9 is formed of a synthetic resin material whose inner surface is treated with fluororesin (Teflon), and can be freely pulled out into a tank storage section 69 closed by a door 67 that can be opened and closed using a hinge 65 as a fulcrum. It is stored in a set.

The floor plate 71 of the tank storage section 69 is supported at two points by a support spring 73 on the entrance/exit side and hinges 75, 75 on the tip side so as to be able to move up and down. Descend to the state shown by the chain line. Further, when the amount of drained liquid accumulates in the tank body 63, the support spring 73 becomes bent due to the weight thereof. This causes the tank body 63 to descend.

On the other hand, a weight sensor 75 is arranged on the upper surface of the tank storage section 63. The weight sensor 75 is turned on by the tank body 63 descending when the drained liquid in the tank body 63 becomes full, and functions to light up a warning indicator lamp (not shown).

Further, a bellows-shaped flexible body 77 that is vertically expandable and retractable is in elastic contact 79 with the upper surface of the tank body 63 so as to surround the socket 65 . The flexible body 77 is connected to the bracket 8
1, the peripheral portion of the socket 65 is kept airtight. An electrode sensor 83 is provided on the bracket 81, and when it detects that the liquid is full by touching the liquid level, the bracket 81 remains in a non-functional state even if the start switch is turned on.

Note that 85 is a duct for releasing steam from the socket 65 to the cooling tank 57, and 87 is a restraint device that restrains the door 67 when the door is closed, with a protrusion 89 on the door 67 side and a protrusion 89 on the case side. The structure is such that a clamping portion 91 is provided respectively.

In the opener device configured in this way,
When the semiconductor 37 is set on the work table 39 and the start switch is turned on, the sulfuric acid in the tank body 11 is sent into the heater tank 17 by opening the first and second electromagnetic valves 13 and 15. The sulfuric acid in the heat tank 17 is heated to about 250° C. by the heat source section 21.
When the sulfuric acid is heated, the third electrode valve 27 opens and the fourth electrode valve 27 opens.
Port P ₁ of the solenoid valve 29 communicates with port P, and air pressure acts on the heater tank 17 . As a result, the hot sulfuric acid in the heater tank 17 is sent into the dissolution tank 41.

The hot sulfuric acid in the melting tank 41 is heated by the heat source 51 to approximately
Raised to 290℃. When the temperature sensor 47 detects that the temperature has reached approximately 290°C, the pump 43 is turned on and hot sulfuric acid is injected into the package 37a. Thereafter, the injection is continued until the package 47a is dissolved and the chip is exposed. When the chip is exposed, the electrode sensor 49 detects the current flowing through the sulfuric acid, and after a certain period of time has elapsed since the detection, the pump 43 is stopped and the third electromagnetic valve 27 is opened. As a result, air pressure acts within the melting tank 41 and the melting tank 41 is sent to the cooling trap 57. After being cooled down to approximately 100°C in this cooling trap 57, the tank body 63
It will be discharged to When the drainage liquid accumulates and becomes full, the weight sensor 75 operates and lights up a warning indicator lamp (not shown) to notify the operator that the tank is full.

Next, the full tank main body 63 is pulled out by opening the door and taken out from the tank storage section 69. After taking it out, place the empty tank body in the tank storage part 69.
By inserting it into the machine and closing the door 67, the next operation becomes possible.

[Effects of the invention] As explained above, according to this invention, when the used drainage liquid becomes full, it can be easily detected by the detection means. In addition, it becomes easy to replace the tank with an empty tank, and waste liquid can be disposed of safely and efficiently.

[Brief explanation of drawings]

Fig. 1 is an overall schematic explanatory diagram of the opener device of this invention, Fig. 2 is a cutaway side view of the drain liquid storage tank,
FIG. 3 is a cutaway side view of the tank main body taken out from the tank storage section. Explanation of main drawing symbols, 9...Drainage storage tank, 27...Flexible body, 61...Drainage nozzle, 65
... Socket, 63 ... Tank body, 69 ... Tank storage section, 75 ... Weight sensor (detection means).

Claims (1)

[Scope of utility model registration request] In an opener device equipped with a drained liquid storage tank with a socket facing below the drained liquid nozzle, the tank body of the drained liquid storage tank is stored and set so as to be freely pulled out from the tank storage part, and can be expanded and contracted up and down on the upper surface of the tank body. 1. A drain liquid storage tank for an opener device, characterized in that a flexible body is brought into elastic contact to seal the periphery of the socket, and the amount of drained liquid in the tank body is detected by a detection means.