JPS62184741U - - Google Patents

Info

Publication number
JPS62184741U
JPS62184741U JP7118486U JP7118486U JPS62184741U JP S62184741 U JPS62184741 U JP S62184741U JP 7118486 U JP7118486 U JP 7118486U JP 7118486 U JP7118486 U JP 7118486U JP S62184741 U JPS62184741 U JP S62184741U
Authority
JP
Japan
Prior art keywords
semiconductor
workbench
hood
opened
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7118486U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0416434Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7118486U priority Critical patent/JPH0416434Y2/ja
Publication of JPS62184741U publication Critical patent/JPS62184741U/ja
Application granted granted Critical
Publication of JPH0416434Y2 publication Critical patent/JPH0416434Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
JP7118486U 1986-05-14 1986-05-14 Expired JPH0416434Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7118486U JPH0416434Y2 (enExample) 1986-05-14 1986-05-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7118486U JPH0416434Y2 (enExample) 1986-05-14 1986-05-14

Publications (2)

Publication Number Publication Date
JPS62184741U true JPS62184741U (enExample) 1987-11-24
JPH0416434Y2 JPH0416434Y2 (enExample) 1992-04-13

Family

ID=30913507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7118486U Expired JPH0416434Y2 (enExample) 1986-05-14 1986-05-14

Country Status (1)

Country Link
JP (1) JPH0416434Y2 (enExample)

Also Published As

Publication number Publication date
JPH0416434Y2 (enExample) 1992-04-13

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