JPH0414933Y2 - - Google Patents
Info
- Publication number
- JPH0414933Y2 JPH0414933Y2 JP19544787U JP19544787U JPH0414933Y2 JP H0414933 Y2 JPH0414933 Y2 JP H0414933Y2 JP 19544787 U JP19544787 U JP 19544787U JP 19544787 U JP19544787 U JP 19544787U JP H0414933 Y2 JPH0414933 Y2 JP H0414933Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- needle
- support frame
- contact
- pellet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000008188 pellet Substances 0.000 claims description 23
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000005259 measurement Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 238000007689 inspection Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000005336 cracking Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19544787U JPH0414933Y2 (pt) | 1987-12-22 | 1987-12-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19544787U JPH0414933Y2 (pt) | 1987-12-22 | 1987-12-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0197551U JPH0197551U (pt) | 1989-06-29 |
JPH0414933Y2 true JPH0414933Y2 (pt) | 1992-04-03 |
Family
ID=31486125
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19544787U Expired JPH0414933Y2 (pt) | 1987-12-22 | 1987-12-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0414933Y2 (pt) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012141197A (ja) * | 2010-12-28 | 2012-07-26 | Advantest Corp | 試験装置 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5489356B2 (ja) * | 2010-10-20 | 2014-05-14 | 株式会社日本マイクロニクス | 半導体測定装置 |
JP5599341B2 (ja) * | 2011-02-21 | 2014-10-01 | 株式会社シバソク | 試験装置 |
JP5562320B2 (ja) * | 2011-12-08 | 2014-07-30 | 三菱電機株式会社 | 半導体試験装置および半導体試験方法 |
JP2015049137A (ja) * | 2013-09-02 | 2015-03-16 | 三菱電機株式会社 | 半導体チップ試験装置及び方法 |
-
1987
- 1987-12-22 JP JP19544787U patent/JPH0414933Y2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012141197A (ja) * | 2010-12-28 | 2012-07-26 | Advantest Corp | 試験装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0197551U (pt) | 1989-06-29 |
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