JPH0414882B2 - - Google Patents

Info

Publication number
JPH0414882B2
JPH0414882B2 JP59245625A JP24562584A JPH0414882B2 JP H0414882 B2 JPH0414882 B2 JP H0414882B2 JP 59245625 A JP59245625 A JP 59245625A JP 24562584 A JP24562584 A JP 24562584A JP H0414882 B2 JPH0414882 B2 JP H0414882B2
Authority
JP
Japan
Prior art keywords
vibration
piezoelectric
mechanical vibrating
thin film
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59245625A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61123211A (ja
Inventor
Takeshi Nakamura
Ikuo Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP59245625A priority Critical patent/JPS61123211A/ja
Priority to US06/798,026 priority patent/US4658173A/en
Publication of JPS61123211A publication Critical patent/JPS61123211A/ja
Publication of JPH0414882B2 publication Critical patent/JPH0414882B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0595—Holders or supports the holder support and resonator being formed in one body

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP59245625A 1984-11-19 1984-11-19 圧電振動子および圧電振動子の振動周波数調整方法 Granted JPS61123211A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP59245625A JPS61123211A (ja) 1984-11-19 1984-11-19 圧電振動子および圧電振動子の振動周波数調整方法
US06/798,026 US4658173A (en) 1984-11-19 1985-11-14 Piezoelectric vibrator and method of adjusting vibrating frequency thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59245625A JPS61123211A (ja) 1984-11-19 1984-11-19 圧電振動子および圧電振動子の振動周波数調整方法

Publications (2)

Publication Number Publication Date
JPS61123211A JPS61123211A (ja) 1986-06-11
JPH0414882B2 true JPH0414882B2 (en:Method) 1992-03-16

Family

ID=17136462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59245625A Granted JPS61123211A (ja) 1984-11-19 1984-11-19 圧電振動子および圧電振動子の振動周波数調整方法

Country Status (2)

Country Link
US (1) US4658173A (en:Method)
JP (1) JPS61123211A (en:Method)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5187458A (en) * 1989-09-21 1993-02-16 Nihon Musen Kabushiki Kaisha Composite longitudinal vibration mechanical filter having central frequency deviation elimination means and method of manufacturing same
US5369862A (en) * 1990-02-26 1994-12-06 Murata Manufacturing Co., Ltd. Method of producing a piezoelectric device
US7769417B2 (en) * 2002-12-08 2010-08-03 Immersion Corporation Method and apparatus for providing haptic feedback to off-activating area
US8513863B2 (en) 2009-06-11 2013-08-20 Qualcomm Mems Technologies, Inc. Piezoelectric resonator with two layers
JP2013258519A (ja) * 2012-06-12 2013-12-26 Nippon Dempa Kogyo Co Ltd 圧電振動片及び圧電デバイス
TWI718368B (zh) * 2015-10-08 2021-02-11 日商村田製作所股份有限公司 水晶振動元件及具備該水晶振動元件之水晶振動子
FI127940B (en) 2016-07-01 2019-05-31 Teknologian Tutkimuskeskus Vtt Oy Micromechanical resonator and method for trimming micromechanical resonator

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2870521A (en) * 1955-02-24 1959-01-27 Gulton Ind Inc Method of adjusting the resonant frequency of a vibrating system
JPS50123268U (en:Method) * 1974-03-22 1975-10-08
JPS5469986A (en) * 1977-11-15 1979-06-05 Seiko Instr & Electronics Ltd Piezoelectric vibrator
JPS5752213A (en) * 1980-09-12 1982-03-27 Seiko Instr & Electronics Ltd Gt-cut quartz oscillator
JPS58119218A (ja) * 1982-01-07 1983-07-15 Murata Mfg Co Ltd 圧電振動装置
JPS59212A (ja) * 1982-06-25 1984-01-05 Murata Mfg Co Ltd 圧電共振素子とその製造方法
JPS5984921U (ja) * 1982-11-27 1984-06-08 株式会社村田製作所 振動子支持構造
US4532451A (en) * 1982-12-28 1985-07-30 Murata Manufacturing Co., Ltd. Terminals and mounting for piezoelectric resonators

Also Published As

Publication number Publication date
US4658173A (en) 1987-04-14
JPS61123211A (ja) 1986-06-11

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term