JPH0414185B2 - - Google Patents
Info
- Publication number
- JPH0414185B2 JPH0414185B2 JP60224960A JP22496085A JPH0414185B2 JP H0414185 B2 JPH0414185 B2 JP H0414185B2 JP 60224960 A JP60224960 A JP 60224960A JP 22496085 A JP22496085 A JP 22496085A JP H0414185 B2 JPH0414185 B2 JP H0414185B2
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- molten
- vapor
- ejecting
- metal plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010438 heat treatment Methods 0.000 claims description 24
- 239000012768 molten material Substances 0.000 claims description 16
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 14
- 239000000126 substance Substances 0.000 claims description 12
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- 239000010409 thin film Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000011133 lead Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22496085A JPS6286154A (ja) | 1985-10-11 | 1985-10-11 | 溶融物質の蒸気噴出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22496085A JPS6286154A (ja) | 1985-10-11 | 1985-10-11 | 溶融物質の蒸気噴出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6286154A JPS6286154A (ja) | 1987-04-20 |
| JPH0414185B2 true JPH0414185B2 (zh) | 1992-03-12 |
Family
ID=16821895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22496085A Granted JPS6286154A (ja) | 1985-10-11 | 1985-10-11 | 溶融物質の蒸気噴出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6286154A (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160012710A (ko) * | 2014-07-25 | 2016-02-03 | 현대중공업 주식회사 | 엔진의 푸시로드 커버 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5842159A (ja) * | 1981-09-08 | 1983-03-11 | Mini Pairo Denki:Kk | 片口金型放電ランプ |
-
1985
- 1985-10-11 JP JP22496085A patent/JPS6286154A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5842159A (ja) * | 1981-09-08 | 1983-03-11 | Mini Pairo Denki:Kk | 片口金型放電ランプ |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160012710A (ko) * | 2014-07-25 | 2016-02-03 | 현대중공업 주식회사 | 엔진의 푸시로드 커버 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6286154A (ja) | 1987-04-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0414185B2 (zh) | ||
| JPS57155369A (en) | High vacuum ion plating method and apparatus | |
| JPH04228562A (ja) | 薄膜形成装置 | |
| JPS63472A (ja) | 真空成膜装置 | |
| JPH0543784B2 (zh) | ||
| JPH0364454A (ja) | 蒸気発生源用るつぼ | |
| JPS62122209A (ja) | 薄膜形成装置 | |
| JPS62118517A (ja) | 溶融物質の蒸気噴出装置 | |
| JPH01119663A (ja) | 薄膜形成装置 | |
| JPS6286155A (ja) | 溶融物質の蒸気噴出装置 | |
| JPH0343228Y2 (zh) | ||
| JPS61279668A (ja) | 薄膜形成装置 | |
| JPS60116771A (ja) | クラスタイオンビ−ム蒸発源装置 | |
| JPH06158301A (ja) | スパッタリング装置 | |
| JPH03158458A (ja) | クラスターイオンビーム装置 | |
| JPS62177175A (ja) | 溶融物質の蒸気噴出装置 | |
| JPH062939B2 (ja) | 薄膜生成方法 | |
| JPH02270959A (ja) | 蒸発源用坩堝 | |
| JP3223740B2 (ja) | 半導体製造装置および半導体装置の製造方法 | |
| JPS58100672A (ja) | 薄膜形成法及びその装置 | |
| JPS61279115A (ja) | 薄膜形成装置 | |
| JPS62287617A (ja) | 薄膜形成装置 | |
| JPH06122965A (ja) | イオン蒸着膜形成装置 | |
| JPS5674836A (en) | Production of magnetic recording medium | |
| JPS60116770A (ja) | クラスタイオンビ−ム蒸発源装置 |