JPH0413769B2 - - Google Patents

Info

Publication number
JPH0413769B2
JPH0413769B2 JP56150919A JP15091981A JPH0413769B2 JP H0413769 B2 JPH0413769 B2 JP H0413769B2 JP 56150919 A JP56150919 A JP 56150919A JP 15091981 A JP15091981 A JP 15091981A JP H0413769 B2 JPH0413769 B2 JP H0413769B2
Authority
JP
Japan
Prior art keywords
substrate
evaporation source
vapor
incident
oxygen gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56150919A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5853027A (ja
Inventor
Kyuzo Nakamura
Yoshifumi Oota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP15091981A priority Critical patent/JPS5853027A/ja
Publication of JPS5853027A publication Critical patent/JPS5853027A/ja
Publication of JPH0413769B2 publication Critical patent/JPH0413769B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/85—Coating a support with a magnetic layer by vapour deposition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
JP15091981A 1981-09-24 1981-09-24 磁気記録体の製造装置 Granted JPS5853027A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15091981A JPS5853027A (ja) 1981-09-24 1981-09-24 磁気記録体の製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15091981A JPS5853027A (ja) 1981-09-24 1981-09-24 磁気記録体の製造装置

Publications (2)

Publication Number Publication Date
JPS5853027A JPS5853027A (ja) 1983-03-29
JPH0413769B2 true JPH0413769B2 (enrdf_load_stackoverflow) 1992-03-10

Family

ID=15507264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15091981A Granted JPS5853027A (ja) 1981-09-24 1981-09-24 磁気記録体の製造装置

Country Status (1)

Country Link
JP (1) JPS5853027A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6080137A (ja) * 1983-10-07 1985-05-08 Ulvac Corp 垂直磁気記録体の製造装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5419199A (en) * 1977-07-12 1979-02-13 Matsushita Electric Ind Co Ltd Magnetic recording medium porcess
JPS5634148A (en) * 1979-08-25 1981-04-06 Hitachi Maxell Ltd Manufacture of magnetic recording medium
JPS5638812A (en) * 1979-09-05 1981-04-14 Matsushita Electric Ind Co Ltd Manufacture of corrosion resistive magnetic thin film

Also Published As

Publication number Publication date
JPS5853027A (ja) 1983-03-29

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