JPH0413096B2 - - Google Patents

Info

Publication number
JPH0413096B2
JPH0413096B2 JP58063445A JP6344583A JPH0413096B2 JP H0413096 B2 JPH0413096 B2 JP H0413096B2 JP 58063445 A JP58063445 A JP 58063445A JP 6344583 A JP6344583 A JP 6344583A JP H0413096 B2 JPH0413096 B2 JP H0413096B2
Authority
JP
Japan
Prior art keywords
polishing
thin piece
pressurizing
polished
shafts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58063445A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59192452A (ja
Inventor
Shoji Yamamori
Osamu Yamamoto
Kazunori Teramoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Mitsubishi Chemical Corp
Mitsubishi Kasei Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Chemical Corp, Mitsubishi Kasei Corp filed Critical Mitsubishi Chemical Corp
Priority to JP58063445A priority Critical patent/JPS59192452A/ja
Publication of JPS59192452A publication Critical patent/JPS59192452A/ja
Publication of JPH0413096B2 publication Critical patent/JPH0413096B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
    • B24B37/107—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement in a rotary movement only, about an axis being stationary during lapping

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP58063445A 1983-04-11 1983-04-11 薄片研磨方法及び装置 Granted JPS59192452A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58063445A JPS59192452A (ja) 1983-04-11 1983-04-11 薄片研磨方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58063445A JPS59192452A (ja) 1983-04-11 1983-04-11 薄片研磨方法及び装置

Publications (2)

Publication Number Publication Date
JPS59192452A JPS59192452A (ja) 1984-10-31
JPH0413096B2 true JPH0413096B2 (enrdf_load_stackoverflow) 1992-03-06

Family

ID=13229451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58063445A Granted JPS59192452A (ja) 1983-04-11 1983-04-11 薄片研磨方法及び装置

Country Status (1)

Country Link
JP (1) JPS59192452A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2580169B2 (ja) * 1987-05-27 1997-02-12 スピ−ドファム株式会社 加工圧制御機構付き平面研磨装置
JPH0624475U (ja) * 1992-08-31 1994-04-05 千寿製薬株式会社 釣用仕掛具

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5932349U (ja) * 1982-08-23 1984-02-28 スピ−ドフアム株式会社 平面研削装置におけるワ−クの装脱機構

Also Published As

Publication number Publication date
JPS59192452A (ja) 1984-10-31

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