JPH0412838B2 - - Google Patents

Info

Publication number
JPH0412838B2
JPH0412838B2 JP60051661A JP5166185A JPH0412838B2 JP H0412838 B2 JPH0412838 B2 JP H0412838B2 JP 60051661 A JP60051661 A JP 60051661A JP 5166185 A JP5166185 A JP 5166185A JP H0412838 B2 JPH0412838 B2 JP H0412838B2
Authority
JP
Japan
Prior art keywords
base
members
moving
fine movement
moving member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60051661A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61210904A (ja
Inventor
Kazuyoshi Sugihara
Tooru Tojo
Susumu Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP60051661A priority Critical patent/JPS61210904A/ja
Publication of JPS61210904A publication Critical patent/JPS61210904A/ja
Publication of JPH0412838B2 publication Critical patent/JPH0412838B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP60051661A 1985-03-15 1985-03-15 回転微動機構 Granted JPS61210904A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60051661A JPS61210904A (ja) 1985-03-15 1985-03-15 回転微動機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60051661A JPS61210904A (ja) 1985-03-15 1985-03-15 回転微動機構

Publications (2)

Publication Number Publication Date
JPS61210904A JPS61210904A (ja) 1986-09-19
JPH0412838B2 true JPH0412838B2 (show.php) 1992-03-05

Family

ID=12893056

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60051661A Granted JPS61210904A (ja) 1985-03-15 1985-03-15 回転微動機構

Country Status (1)

Country Link
JP (1) JPS61210904A (show.php)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5167031B2 (ja) * 2008-08-26 2013-03-21 中央精機株式会社 圧電アクチュエータ
CN106297900B (zh) * 2016-08-04 2019-01-04 苏州大学 一种z轴微旋转平台
CN114829023A (zh) * 2020-01-30 2022-07-29 株式会社村田制作所 直线振动电机、使用该直线振动电机的电子设备、振子和振子的制造方法

Also Published As

Publication number Publication date
JPS61210904A (ja) 1986-09-19

Similar Documents

Publication Publication Date Title
JP2601834B2 (ja) テーブル装置
US10491140B2 (en) Piezo ceramic planar motor and driving method thereof
US4600854A (en) Piezoelectric stepping rotator
US6441536B2 (en) Wobble motor
JP2002529038A (ja) 多方向モータ
JPH0373236B2 (show.php)
EP0143549A1 (en) Precise rotation mechanism for slightly rotating an object
JPH0412838B2 (show.php)
JPH0527034Y2 (show.php)
JPS61159349A (ja) 微小変位移動装置
JPH10260277A (ja) パラレルリンクステージ機構
JP2000009867A (ja) ステージ移動装置
JPS6044838B2 (ja) 回転微動機構
JPH0381119B2 (show.php)
JP2004257844A (ja) 高精度微小移動装置
JP3581433B2 (ja) 角度変位機構
US20050242258A1 (en) Symmetric spindle design
JPH0432633Y2 (show.php)
JPS60145613A (ja) 回転微動機構
JP2524603Y2 (ja) 回転体の支持機構
JPH01217982A (ja) 圧電リニアアクチュエータ
JPS6279645A (ja) 回転微動ステ−ジ
JP2642415B2 (ja) 回転テーブル装置
JPH06795Y2 (ja) 微動回転ステージ
JPS60130124A (ja) 回転微動機構