JPH0411975B2 - - Google Patents
Info
- Publication number
- JPH0411975B2 JPH0411975B2 JP60210002A JP21000285A JPH0411975B2 JP H0411975 B2 JPH0411975 B2 JP H0411975B2 JP 60210002 A JP60210002 A JP 60210002A JP 21000285 A JP21000285 A JP 21000285A JP H0411975 B2 JPH0411975 B2 JP H0411975B2
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- ionization
- heater
- furnaces
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001704 evaporation Methods 0.000 claims description 54
- 230000008020 evaporation Effects 0.000 claims description 49
- 150000002500 ions Chemical class 0.000 claims description 44
- 239000007787 solid Substances 0.000 claims description 19
- 239000007788 liquid Substances 0.000 claims description 17
- 238000010438 heat treatment Methods 0.000 claims description 11
- 230000008016 vaporization Effects 0.000 claims 2
- 239000007789 gas Substances 0.000 description 13
- 238000005468 ion implantation Methods 0.000 description 7
- 238000010884 ion-beam technique Methods 0.000 description 7
- 238000000605 extraction Methods 0.000 description 5
- 230000005284 excitation Effects 0.000 description 4
- 229910052785 arsenic Inorganic materials 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- -1 arsenic ions Chemical class 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60210002A JPS6271147A (ja) | 1985-09-25 | 1985-09-25 | 蒸発炉付イオン源 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60210002A JPS6271147A (ja) | 1985-09-25 | 1985-09-25 | 蒸発炉付イオン源 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5089645A Division JP2643763B2 (ja) | 1993-04-16 | 1993-04-16 | イオン打込み方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6271147A JPS6271147A (ja) | 1987-04-01 |
| JPH0411975B2 true JPH0411975B2 (ru) | 1992-03-03 |
Family
ID=16582223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60210002A Granted JPS6271147A (ja) | 1985-09-25 | 1985-09-25 | 蒸発炉付イオン源 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6271147A (ru) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0821352B2 (ja) * | 1986-04-30 | 1996-03-04 | 九州日本電気株式会社 | 半導体基板イオン注入装置 |
| JP4289837B2 (ja) | 2002-07-15 | 2009-07-01 | アプライド マテリアルズ インコーポレイテッド | イオン注入方法及びｓｏｉウエハの製造方法 |
| JP4328067B2 (ja) | 2002-07-31 | 2009-09-09 | アプライド マテリアルズ インコーポレイテッド | イオン注入方法及びｓｏｉウエハの製造方法、並びにイオン注入装置 |
-
1985
- 1985-09-25 JP JP60210002A patent/JPS6271147A/ja active Granted
Non-Patent Citations (2)
| Title |
|---|
| NUCLEAR INSTRUMENTS AND METHODS=1963 * |
| SERIES3 A AND X HIGH CURRENT IMPLANTERS=1980 * |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6271147A (ja) | 1987-04-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |