JPH04116694U - 真空ポンプ用保護部材 - Google Patents

真空ポンプ用保護部材

Info

Publication number
JPH04116694U
JPH04116694U JP1952591U JP1952591U JPH04116694U JP H04116694 U JPH04116694 U JP H04116694U JP 1952591 U JP1952591 U JP 1952591U JP 1952591 U JP1952591 U JP 1952591U JP H04116694 U JPH04116694 U JP H04116694U
Authority
JP
Japan
Prior art keywords
vacuum pump
pore
protection member
pores
pump protection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1952591U
Other languages
English (en)
Japanese (ja)
Inventor
恵子 吉江
Original Assignee
セイコー精機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコー精機株式会社 filed Critical セイコー精機株式会社
Priority to JP1952591U priority Critical patent/JPH04116694U/ja
Publication of JPH04116694U publication Critical patent/JPH04116694U/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
JP1952591U 1991-03-28 1991-03-28 真空ポンプ用保護部材 Pending JPH04116694U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1952591U JPH04116694U (ja) 1991-03-28 1991-03-28 真空ポンプ用保護部材

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1952591U JPH04116694U (ja) 1991-03-28 1991-03-28 真空ポンプ用保護部材

Publications (1)

Publication Number Publication Date
JPH04116694U true JPH04116694U (ja) 1992-10-19

Family

ID=31905788

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1952591U Pending JPH04116694U (ja) 1991-03-28 1991-03-28 真空ポンプ用保護部材

Country Status (1)

Country Link
JP (1) JPH04116694U (zh)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005344512A (ja) * 2004-05-31 2005-12-15 Osaka Vacuum Ltd 分子ポンプ
JP2006299968A (ja) * 2005-04-21 2006-11-02 Shimadzu Corp 異物侵入防止板、回転真空ポンプおよび真空システム
WO2014049728A1 (ja) * 2012-09-26 2014-04-03 株式会社島津製作所 真空ポンプ用保護ネット、その製造方法および真空ポンプ
US8727708B2 (en) * 2005-03-02 2014-05-20 Tokyo Electron Limited Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
EP3051145A1 (de) * 2015-01-28 2016-08-03 Pfeiffer Vacuum Gmbh Vakuumpumpe

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005344512A (ja) * 2004-05-31 2005-12-15 Osaka Vacuum Ltd 分子ポンプ
JP4504102B2 (ja) * 2004-05-31 2010-07-14 株式会社大阪真空機器製作所 分子ポンプ
US8727708B2 (en) * 2005-03-02 2014-05-20 Tokyo Electron Limited Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
JP2006299968A (ja) * 2005-04-21 2006-11-02 Shimadzu Corp 異物侵入防止板、回転真空ポンプおよび真空システム
WO2014049728A1 (ja) * 2012-09-26 2014-04-03 株式会社島津製作所 真空ポンプ用保護ネット、その製造方法および真空ポンプ
JPWO2014049728A1 (ja) * 2012-09-26 2016-08-22 株式会社島津製作所 真空ポンプ用保護ネット、その製造方法および真空ポンプ
EP3051145A1 (de) * 2015-01-28 2016-08-03 Pfeiffer Vacuum Gmbh Vakuumpumpe

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