JPH04116694U - Protection member for vacuum pump - Google Patents

Abstract

(57) [Summary] [Purpose] The present invention improves the strength of the vacuum pump protection member, so that even if foreign matter should fly into the vacuum pump, the vacuum pump protection member The purpose is to prevent the material from being easily torn. [Structure] The vacuum pump protection member 13 of the present invention includes a pore portion 13b formed so that pores are evenly distributed,
A reinforcing member 13c extending in the radial direction of the pore and fixed to the pore part 13b is provided, or the thickness of the wall between adjacent pores is such that the thickness of the pore part forming uniformly distributed pores is provided. The structure is such that the size of the pore in the depth direction is larger than the size of the pore. [Effect] According to the present invention, the rod-shaped reinforcing member is fixedly provided in the pore, and the thickness of the pore forming the pore is set to be smaller than the wall thickness between adjacent pores. By forming the dimension in the depth direction to be larger, the strength of the vacuum pump protection member can be improved.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

This invention is used in the suction port of a vacuum pump that evacuates a vacuum chamber, etc. The present invention relates to a protection member for a vacuum pump.

0002

[Conventional technology]

Conventionally, when manufacturing IC products, for example, each process was performed in each work room. When one process is completed in one work room, the workpiece is passed through a gate valve. It is being transported to the next work room. Here, in one work room, make this room a vacuum. (vacuum chamber), in which case the semiconductor manufacturing equipment has a vacuum port. I was using a amp.

0003 As such a vacuum pump, for example, a composite turbo molecular pump as shown in Fig. 9 is used. There is a pump. In the figure, reference numeral 101 is a casing, and this casing 1 A suction port 102 is formed in the casing 101, and a rotor 104 is formed inside the casing 101. It is equipped. The rotor 104 has a rotor rotor facing the inner peripheral wall surface of the casing 101. A spiral threaded groove portion 108 (including a threaded groove and a threaded thread) is formed. Opposed to the rotor blades 105 and threaded grooves 108, the stator blades 106 and A stator 109 is attached to the inner peripheral wall surface of the casing 101. Rotor 10 4 is rotationally driven by a motor 107 housed in a casing 101. As a result, the rotor blades 105 and the threaded grooves 108 are connected to the stator blades 106 and the stator. Rotates at high speed relative to 109.

0004 In this way, when the rotor 104 is rotationally driven by the motor 107, the rotor The blades 105 and threaded grooves 108 are compatible with the stator blades 106 and stator 109. In contrast, the rotor blade 105 and the thread groove 108 and the stator blade 1 rotate at high speed. 06 and the stator 109, the semiconductor in the working chamber (vacuum chamber) Molecules such as process gas during manufacturing are sucked in through the suction port 102. sucked in The molecules pass between the stator 109 and the threaded groove 108, and further pass through the casing 1. 01 through the communication path 111 in the base 110, and from the discharge port 103. It's out.

[0005] Further, such a vacuum pump has a protective member 1 at the suction port 102 of the casing 101. 13 is provided, and this protective member 113 is connected to the inlet 10 as shown in FIG. An annular portion 113a that fits into the inner peripheral portion of the casing 101 forming the It consists of a wire mesh section 113b stretched inside the section 113a. This protection part The material 113 prevents foreign matter from entering the vacuum pump and damaging internal parts. established for the purpose of Further, such a protective member has the wire mesh portion 113b as described above. In addition to the ones used, as shown by reference numeral 114 in FIG. Some use a metal plate formed so that 14a is evenly distributed throughout. .

[0006]

[Problem that the idea aims to solve]

By the way, in such conventional vacuum pump protection members, the vacuum pump The conductance (suction) of the suction port 102 of the casing 101 is related to performance. In order to maximize the probability of passage of molecules passing through the wire mesh portion 113b, A thin plate is used for the metal plate used to reduce the wire diameter of the wire used or to perform etching to create pores. It is common to For this reason, the strength of the vacuum pump protection member decreases, and in the unlikely event that If a foreign object flies into the vacuum pump, the foreign object may cause the The protective member for the empty pump may be torn and unable to fulfill its original role. And vice versa, If the rotor in a vacuum pump that is rotating at high speed breaks down for some reason, Fragments of the destroyed rotor broke through the vacuum pump protection member, causing the vacuum pump to become damaged. There is a danger that it will jump out from the inside to the outside. Other protective materials for vacuum pumps In large vacuum pumps, the strength of the valve attached to the suction port is Vacuum pump protection that is farther from the periphery than the periphery of the empty pump protection member The center of the member may sag and the vacuum pump protection member may come into contact with the rotating rotor. There is a problem that there is a risk of damage. Therefore, this invention aims to solve such problems. The task is to solve the following points.

[0007]

[Means to solve the problem]

In order to solve the above problems, the vacuum pump protection member of the present invention is A pore portion is arranged at the suction port of the pump and is formed so that the pores are evenly distributed; and a rod-shaped reinforcing member extending in the radial direction of the pore and fixed to the pore portion. It is also placed at the inlet of the vacuum pump to ensure that the pores are evenly distributed. It has a pore portion formed like a cloth, and a flesh portion of the pore portion forming the pore, The depth dimension of the pores was larger than the wall thickness between adjacent pores. It is composed of these things.

[0008] According to the vacuum pump protection member having such a configuration, the rod extending in the radial direction of the pore A reinforcing member of the shape may be fixed to the pore, or the flesh of the pore forming the pore may be The depth dimension of the pores should be larger than the wall thickness between adjacent pores. This improves the strength of the vacuum pump protection member, so if the vacuum Even if a foreign object jumps into the pump, the foreign object will create a vacuum. It is possible to prevent the pump protection member from being easily torn. Conversely, high speed Even if the rotor inside the vacuum pump that is rotating is destroyed for some reason, the To prevent broken rotor fragments from breaking through this vacuum pump protection member. I can do that. In addition, in large vacuum pumps, the valve attached to the suction port Vacuum pump protection that is farther from the periphery than the periphery of the empty pump protection member This prevents the central part of the member from sagging and prevents the vacuum pump protection member from rotating. It can also prevent damage caused by contact with the data.

[0009]

【Example】

Embodiments of the present invention will be described below based on the drawings. Figure 1 shows the results according to the present invention. FIG. 2 is a diagram showing a first embodiment of a vacuum pump protection member. For the vacuum pump shown in the same figure The protective member 13 is attached to the suction port of the vacuum pump (not shown, corresponding to the reference numeral 102 in FIG. 9). A casing that is placed and used and constitutes the suction port of a vacuum pump. (not shown, corresponding to the reference numeral 101 in FIG. 9). It has a wire mesh part 13b (pore part) stretched inside the annular part 13a, and this wire mesh part In 13b, pores (wire mesh) are evenly distributed throughout. Furthermore, this truth The empty pump protection member 13 is a rod extending in a cross shape in the inner radial direction of the annular portion 13a. A reinforcing member 13c is provided, and this reinforcing member 13c is fixed to the wire mesh portion 13b. ing. That is, the reinforcing member 13c extends in the radial direction of the mesh of the wire mesh portion 13b, and As shown in FIG. 2, it is fixed to the wire mesh portion 13b by welding 15 or the like.

0010 According to such a vacuum pump protection member 13, the radial direction of the pores (wire mesh) A rod-shaped reinforcing member 13c extending in the hole portion (wire mesh portion 13b) may be fixedly provided. As a result, the strength of the vacuum pump protection member 13 can be improved. - Even if a foreign object jumps into the vacuum pump, the foreign object Therefore, it is possible to prevent the vacuum pump protection member 13 from being easily torn. Also Conversely, if the rotor in a vacuum pump that is rotating at high speed breaks down for some reason. However, the pieces of the broken rotor could easily penetrate this vacuum pump protection member 13. It can prevent it from breaking. Furthermore, in large vacuum pumps, the suction Farther away from the periphery than the periphery of the vacuum pump protection member attached to the inlet. This prevents the central part of the vacuum pump protection member from sagging and protects the vacuum pump from sagging. It is also possible to prevent the protective member 13 from coming into contact with the rotating rotor and being damaged. Ru.

[0011] FIG. 3 shows a second embodiment of the invention. In the first embodiment, true The empty pump protection member 13 is a rod extending in a cross shape in the inner radial direction of the annular portion 13a. Although the reinforcing member 13c was provided in the form of a reinforcing member 13c, the vacuum pump The protective member 14 is a rod-shaped reinforcing member that extends in a Y-shape in the inner radial direction of the annular portion 14a. 14c is provided. This second embodiment also has the same characteristics as the first embodiment. effect can be obtained. In addition, a reinforcing member provided in the inner radial direction of the annular portion It may have any shape.

0012 FIG. 4 shows a third embodiment of the present invention. In the first and second embodiments, The vacuum pump protection members 13 and 14 are entirely inside the annular parts 13a and 14a. The wire mesh portion 13b (pore portion) in which the pores (mesh of the wire mesh) are evenly distributed is stretched. However, the vacuum pump protection member 15 according to the third embodiment has an annular portion 15a. A metal with etched pores 15b so as to be evenly distributed throughout the inside of the metal. A plate (pore area) is attached. A cross is formed in the inner radial direction of the annular portion 15a. A rod-shaped reinforcing member 15c extending in the shape of a rod is provided and fixed to the pore portion. this Even with the third embodiment, the same effects as those of the first and second embodiments can be obtained. can.

[0013] FIG. 5 shows a fourth embodiment of the present invention. In the third embodiment, true The empty pump protection member 15 is a rod extending in a cross shape in the inner radial direction of the annular portion 15a. Although the reinforcing member 15c was provided in the form of a reinforcing member 15c, the vacuum pump The protection member 16 is provided with a bar-shaped reinforcing member 15c extending in a criss-cross pattern. Avoiding the same position 16b as the rod-shaped reinforcing member extending in a cross shape, The pores 16a are etched so that they are distributed over the entire device, and the remaining band-shaped portion 1 6b is used as a reinforcing member. Even with such a fourth embodiment, the above The same effects as in the third embodiment can be obtained.

[0014] 6 to 8 show a fifth embodiment of the present invention. In the above embodiment The protective member for the vacuum pump has pores distributed evenly throughout the inside of the annular part. The metal mesh part 13b is stretched or the pores are etched. The vacuum pump according to the fifth embodiment was constructed with a plate (pore part) stretched. As shown in FIG. A honeycomb structure 17c (pore portion) in which hexagonal pores 17b are distributed is provided. It is. As shown in FIG. 8, this honeycomb structure 17c has fleshy parts adjacent to each other. The depth dimension H of the pores 17b is larger than the wall thickness dimension t between the pores 17b. It is formed. Therefore, the strength of the vacuum pump protection member 17 is also improved. Therefore, the same effect as in the above embodiment can be obtained.

[0015]

[Effect of the idea]

As explained above, according to the present invention, the strength of the protective member for a vacuum pump can be improved. Therefore, even if a foreign object should fly into the vacuum pump, it can be removed. Prevents the vacuum pump protection member from being easily torn by foreign objects that fly in. be able to. Conversely, the rotor inside a vacuum pump that is rotating at high speed is somehow Even if the rotor is destroyed for some reason, the pieces of the broken rotor will remain in this protective part for the vacuum pump. This prevents the material from being easily penetrated. Furthermore, a large vacuum pump the outer edge of the vacuum pump protection member attached to the suction port. Prevents the center of the vacuum pump protection member from sagging as it moves away from the periphery. , also prevents the vacuum pump protection member from coming into contact with the rotating rotor and being damaged. be able to.

[Brief explanation of drawings]

FIG. 1 is a plan view of a first embodiment of a protection member for a vacuum pump according to the present invention.

FIG. 2 is a sectional view taken along line II-II in FIG. 1 of the first embodiment of the vacuum pump protection member according to the present invention.

FIG. 3 is a plan view of a second embodiment of a protection member for a vacuum pump according to the present invention;

FIG. 4 is a plan view of a third embodiment of a protection member for a vacuum pump according to the present invention.

FIG. 5 is a plan view of a fourth embodiment of a protection member for a vacuum pump according to the present invention.

FIG. 6 is a plan view of a fifth embodiment of a protection member for a vacuum pump according to the present invention.

FIG. 7 is a partially enlarged view of a fifth embodiment of a protection member for a vacuum pump according to the present invention.

8 is a cross-sectional view taken along line VIII-VIII in FIG. 7 of a fifth embodiment of the protection member for a vacuum pump according to the present invention.

FIG. 9 is a sectional view of a vacuum pump showing a state in which a conventional vacuum pump protection member is assembled.

FIG. 10 is a plan view showing a conventional vacuum pump protection member.

FIG. 11 is a plan view showing another conventional protection member for a vacuum pump.

[Explanation of symbols]

13, 14, 15, 16, 17 Protection member for vacuum pump 13b Wire mesh part (pore part) 13c, 14c, 15c, 16b reinforcing member 15b, 16a, 17b pores 17c Honeycomb structure (pores)

Claims (2)

[Scope of utility model registration request] 1. A pore portion disposed at an inlet of a vacuum pump and formed to have pores evenly distributed; and a rod-shaped rod extending in the radial direction of the pore and fixed to the pore portion. A protective member for a vacuum pump, comprising a reinforcing member. 2. A pore portion disposed at an inlet of a vacuum pump and formed so that pores are evenly distributed, wherein the flesh of the pore portion forming the pore is adjacent to the adjacent pore. A protective member for a vacuum pump, characterized in that the dimension in the depth direction of the pores is larger than the thickness dimension between the pores.