JPH0411515B2 - - Google Patents

Info

Publication number
JPH0411515B2
JPH0411515B2 JP62073714A JP7371487A JPH0411515B2 JP H0411515 B2 JPH0411515 B2 JP H0411515B2 JP 62073714 A JP62073714 A JP 62073714A JP 7371487 A JP7371487 A JP 7371487A JP H0411515 B2 JPH0411515 B2 JP H0411515B2
Authority
JP
Japan
Prior art keywords
diamond
substrate
grid
plasma
electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62073714A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63239194A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7371487A priority Critical patent/JPS63239194A/ja
Publication of JPS63239194A publication Critical patent/JPS63239194A/ja
Publication of JPH0411515B2 publication Critical patent/JPH0411515B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP7371487A 1987-03-27 1987-03-27 ダイヤモンドの製造装置 Granted JPS63239194A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7371487A JPS63239194A (ja) 1987-03-27 1987-03-27 ダイヤモンドの製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7371487A JPS63239194A (ja) 1987-03-27 1987-03-27 ダイヤモンドの製造装置

Publications (2)

Publication Number Publication Date
JPS63239194A JPS63239194A (ja) 1988-10-05
JPH0411515B2 true JPH0411515B2 (enrdf_load_stackoverflow) 1992-02-28

Family

ID=13526165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7371487A Granted JPS63239194A (ja) 1987-03-27 1987-03-27 ダイヤモンドの製造装置

Country Status (1)

Country Link
JP (1) JPS63239194A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5094878A (en) * 1989-06-21 1992-03-10 Nippon Soken, Inc. Process for forming diamond film
JP2743514B2 (ja) * 1989-09-29 1998-04-22 株式会社島津製作所 多結晶ダイヤモンド薄膜の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6177697A (ja) * 1984-09-25 1986-04-21 Nec Corp ダイヤモンドの気相合成法とその装置

Also Published As

Publication number Publication date
JPS63239194A (ja) 1988-10-05

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