JPH0411342B2 - - Google Patents

Info

Publication number
JPH0411342B2
JPH0411342B2 JP60095743A JP9574385A JPH0411342B2 JP H0411342 B2 JPH0411342 B2 JP H0411342B2 JP 60095743 A JP60095743 A JP 60095743A JP 9574385 A JP9574385 A JP 9574385A JP H0411342 B2 JPH0411342 B2 JP H0411342B2
Authority
JP
Japan
Prior art keywords
fluid
plate
flat part
discharge pipe
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60095743A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6216924A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP60095743A priority Critical patent/JPS6216924A/ja
Priority to EP86303061A priority patent/EP0201240B1/en
Priority to DE8686303061T priority patent/DE3686781D1/de
Priority to US06/855,375 priority patent/US4735449A/en
Priority to KR1019860003372A priority patent/KR900009005B1/ko
Publication of JPS6216924A publication Critical patent/JPS6216924A/ja
Publication of JPH0411342B2 publication Critical patent/JPH0411342B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP60095743A 1985-05-04 1985-05-04 流体によつて板状体を無接触状態で懸垂浮遊させる方法 Granted JPS6216924A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP60095743A JPS6216924A (ja) 1985-05-04 1985-05-04 流体によつて板状体を無接触状態で懸垂浮遊させる方法
EP86303061A EP0201240B1 (en) 1985-05-04 1986-04-23 Apparatus for supporting and/or conveying a plate with fluid without physical contact
DE8686303061T DE3686781D1 (de) 1985-05-04 1986-04-23 Vorrichtung zum halten und/oder foerdern einer platte mittels eines fluids ohne koerperliche beruehrung.
US06/855,375 US4735449A (en) 1985-05-04 1986-04-24 Method of supporting and/or conveying a plate with fluid without physical contact
KR1019860003372A KR900009005B1 (ko) 1985-05-04 1986-04-30 유체에 의하여 판상체(板狀體)를 무접촉상태로서 부유반송시키는 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60095743A JPS6216924A (ja) 1985-05-04 1985-05-04 流体によつて板状体を無接触状態で懸垂浮遊させる方法

Publications (2)

Publication Number Publication Date
JPS6216924A JPS6216924A (ja) 1987-01-26
JPH0411342B2 true JPH0411342B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-02-28

Family

ID=14145971

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60095743A Granted JPS6216924A (ja) 1985-05-04 1985-05-04 流体によつて板状体を無接触状態で懸垂浮遊させる方法

Country Status (1)

Country Link
JP (1) JPS6216924A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0256590U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1988-06-30 1990-04-24
JPH0359189U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1989-10-11 1991-06-11
JP2006160434A (ja) * 2004-12-06 2006-06-22 Nippon Dempa Kogyo Co Ltd 非接触搬送装置
JP5444820B2 (ja) * 2009-04-27 2014-03-19 村田機械株式会社 物品保持装置
JP5198551B2 (ja) * 2010-12-23 2013-05-15 日本特殊陶業株式会社 配線基板の非接触搬送装置、配線基板の製造方法
IT202000005893A1 (it) * 2020-03-19 2021-09-19 Quarrata Forniture S R L Dispositivo di presa di elementi lastriformi

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58141536A (ja) * 1982-02-17 1983-08-22 Sanyo Electric Co Ltd 半導体ウエハ−の吸着ヘツド
JPS5918435U (ja) * 1982-07-27 1984-02-04 日本電気ホームエレクトロニクス株式会社 非接触型ウエ−ハチヤツク

Also Published As

Publication number Publication date
JPS6216924A (ja) 1987-01-26

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