JPH038430U - - Google Patents

Info

Publication number
JPH038430U
JPH038430U JP6880189U JP6880189U JPH038430U JP H038430 U JPH038430 U JP H038430U JP 6880189 U JP6880189 U JP 6880189U JP 6880189 U JP6880189 U JP 6880189U JP H038430 U JPH038430 U JP H038430U
Authority
JP
Japan
Prior art keywords
chamber
gas
blow
ports
supplying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6880189U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6880189U priority Critical patent/JPH038430U/ja
Publication of JPH038430U publication Critical patent/JPH038430U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP6880189U 1989-06-12 1989-06-12 Pending JPH038430U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6880189U JPH038430U (enrdf_load_html_response) 1989-06-12 1989-06-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6880189U JPH038430U (enrdf_load_html_response) 1989-06-12 1989-06-12

Publications (1)

Publication Number Publication Date
JPH038430U true JPH038430U (enrdf_load_html_response) 1991-01-28

Family

ID=31603550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6880189U Pending JPH038430U (enrdf_load_html_response) 1989-06-12 1989-06-12

Country Status (1)

Country Link
JP (1) JPH038430U (enrdf_load_html_response)

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