JPH0381301B2 - - Google Patents

Info

Publication number
JPH0381301B2
JPH0381301B2 JP1232791A JP23279189A JPH0381301B2 JP H0381301 B2 JPH0381301 B2 JP H0381301B2 JP 1232791 A JP1232791 A JP 1232791A JP 23279189 A JP23279189 A JP 23279189A JP H0381301 B2 JPH0381301 B2 JP H0381301B2
Authority
JP
Japan
Prior art keywords
bonding
wire
load
cam
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1232791A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02119149A (ja
Inventor
Juzo Taniguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1232791A priority Critical patent/JPH02119149A/ja
Publication of JPH02119149A publication Critical patent/JPH02119149A/ja
Publication of JPH0381301B2 publication Critical patent/JPH0381301B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78Apparatus for connecting with wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78Apparatus for connecting with wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78Apparatus for connecting with wire connectors
    • H01L2224/7825Means for applying energy, e.g. heating means
    • H01L2224/783Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78301Capillary
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78Apparatus for connecting with wire connectors
    • H01L2224/7825Means for applying energy, e.g. heating means
    • H01L2224/783Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78343Means for applying energy, e.g. heating means by means of pressure by ultrasonic vibrations
    • H01L2224/78344Eccentric cams
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01033Arsenic [As]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01039Yttrium [Y]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)
JP1232791A 1989-09-11 1989-09-11 ワイヤボンディング装置 Granted JPH02119149A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1232791A JPH02119149A (ja) 1989-09-11 1989-09-11 ワイヤボンディング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1232791A JPH02119149A (ja) 1989-09-11 1989-09-11 ワイヤボンディング装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP62001601A Division JPS62247538A (ja) 1987-01-09 1987-01-09 ワイヤボンデイング装置

Publications (2)

Publication Number Publication Date
JPH02119149A JPH02119149A (ja) 1990-05-07
JPH0381301B2 true JPH0381301B2 (enrdf_load_stackoverflow) 1991-12-27

Family

ID=16944810

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1232791A Granted JPH02119149A (ja) 1989-09-11 1989-09-11 ワイヤボンディング装置

Country Status (1)

Country Link
JP (1) JPH02119149A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH02119149A (ja) 1990-05-07

Similar Documents

Publication Publication Date Title
US4653681A (en) Voice coil actuated fine wire clamp
JPS60223137A (ja) 増加したボンデイング表面積を有するリ−ドワイヤボンデイング
JPH0450039B2 (enrdf_load_stackoverflow)
JPS6350856B2 (enrdf_load_stackoverflow)
JPH0381301B2 (enrdf_load_stackoverflow)
JPS60257747A (ja) 巻線機
US3940047A (en) Bonding apparatus utilizing pivotally mounted bonding arm
JPH0783039B2 (ja) ワイヤボンデイング装置
JPS6243336B2 (enrdf_load_stackoverflow)
JP2575066B2 (ja) 半導体組立装置
JP2860650B2 (ja) ワイヤボンディング方法
JPS5826524Y2 (ja) ハンドウタイワイヤボンダソウチ
JPS6221234A (ja) ワイヤボンダ
JPH0927511A (ja) ワイヤクランプ機構及びこれを具備したワイヤボンディング装置
JP2940259B2 (ja) ボンディング方法
JPS61177732A (ja) 製造装置
JP2725102B2 (ja) ワイヤボンディング方法
JP3221191B2 (ja) ボンディング装置及びボンディング方法
JPH0693471B2 (ja) ワイヤボンデイング装置
JPH0779113B2 (ja) ワイヤボンディング装置
KR920010689B1 (ko) 본딩장치
JPH05278943A (ja) 巻線のテンション制御装置
JPH0153505B2 (enrdf_load_stackoverflow)
JPS6219345Y2 (enrdf_load_stackoverflow)
JP2950724B2 (ja) ワイヤボンディング装置および該装置を用いたワークタッチ検出方法