JPH037959Y2 - - Google Patents
Info
- Publication number
- JPH037959Y2 JPH037959Y2 JP9938984U JP9938984U JPH037959Y2 JP H037959 Y2 JPH037959 Y2 JP H037959Y2 JP 9938984 U JP9938984 U JP 9938984U JP 9938984 U JP9938984 U JP 9938984U JP H037959 Y2 JPH037959 Y2 JP H037959Y2
- Authority
- JP
- Japan
- Prior art keywords
- refrigerant
- semiconductor device
- chamber
- container
- liquid cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003507 refrigerant Substances 0.000 claims description 36
- 239000004065 semiconductor Substances 0.000 claims description 29
- 238000001816 cooling Methods 0.000 claims description 25
- 239000007788 liquid Substances 0.000 claims description 20
- 238000007654 immersion Methods 0.000 claims description 16
- 238000009835 boiling Methods 0.000 description 8
- 238000011109 contamination Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- 239000000356 contaminant Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Cooling Or The Like Of Electrical Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9938984U JPS6113948U (ja) | 1984-06-29 | 1984-06-29 | 半導体装置の冷却構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9938984U JPS6113948U (ja) | 1984-06-29 | 1984-06-29 | 半導体装置の冷却構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6113948U JPS6113948U (ja) | 1986-01-27 |
| JPH037959Y2 true JPH037959Y2 (enrdf_load_stackoverflow) | 1991-02-27 |
Family
ID=30658896
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9938984U Granted JPS6113948U (ja) | 1984-06-29 | 1984-06-29 | 半導体装置の冷却構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6113948U (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022179901A (ja) * | 2021-05-24 | 2022-12-06 | 株式会社オートネットワーク技術研究所 | 電気機器 |
-
1984
- 1984-06-29 JP JP9938984U patent/JPS6113948U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6113948U (ja) | 1986-01-27 |