JPH037767Y2 - - Google Patents

Info

Publication number
JPH037767Y2
JPH037767Y2 JP1984081559U JP8155984U JPH037767Y2 JP H037767 Y2 JPH037767 Y2 JP H037767Y2 JP 1984081559 U JP1984081559 U JP 1984081559U JP 8155984 U JP8155984 U JP 8155984U JP H037767 Y2 JPH037767 Y2 JP H037767Y2
Authority
JP
Japan
Prior art keywords
mirror
drive signal
timing signal
signal
measurement data
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984081559U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60193406U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8155984U priority Critical patent/JPS60193406U/ja
Publication of JPS60193406U publication Critical patent/JPS60193406U/ja
Application granted granted Critical
Publication of JPH037767Y2 publication Critical patent/JPH037767Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP8155984U 1984-06-01 1984-06-01 表面欠陥計測装置 Granted JPS60193406U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8155984U JPS60193406U (ja) 1984-06-01 1984-06-01 表面欠陥計測装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8155984U JPS60193406U (ja) 1984-06-01 1984-06-01 表面欠陥計測装置

Publications (2)

Publication Number Publication Date
JPS60193406U JPS60193406U (ja) 1985-12-23
JPH037767Y2 true JPH037767Y2 (zh) 1991-02-26

Family

ID=30628448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8155984U Granted JPS60193406U (ja) 1984-06-01 1984-06-01 表面欠陥計測装置

Country Status (1)

Country Link
JP (1) JPS60193406U (zh)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59182411A (ja) * 1983-04-01 1984-10-17 Minolta Camera Co Ltd 自動焦点調節装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59182411A (ja) * 1983-04-01 1984-10-17 Minolta Camera Co Ltd 自動焦点調節装置

Also Published As

Publication number Publication date
JPS60193406U (ja) 1985-12-23

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