JPH0375053B2 - - Google Patents
Info
- Publication number
- JPH0375053B2 JPH0375053B2 JP60140141A JP14014185A JPH0375053B2 JP H0375053 B2 JPH0375053 B2 JP H0375053B2 JP 60140141 A JP60140141 A JP 60140141A JP 14014185 A JP14014185 A JP 14014185A JP H0375053 B2 JPH0375053 B2 JP H0375053B2
- Authority
- JP
- Japan
- Prior art keywords
- foreign object
- foreign
- inspected
- wafer
- microprocessor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60140141A JPS6211146A (ja) | 1985-06-28 | 1985-06-28 | 異物検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60140141A JPS6211146A (ja) | 1985-06-28 | 1985-06-28 | 異物検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6211146A JPS6211146A (ja) | 1987-01-20 |
| JPH0375053B2 true JPH0375053B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-11-28 |
Family
ID=15261828
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60140141A Granted JPS6211146A (ja) | 1985-06-28 | 1985-06-28 | 異物検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6211146A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3364390B2 (ja) * | 1995-12-30 | 2003-01-08 | 東京エレクトロン株式会社 | 検査装置 |
| JP4649051B2 (ja) * | 2001-03-21 | 2011-03-09 | オリンパス株式会社 | 検査画面の表示方法及び基板検査システム |
-
1985
- 1985-06-28 JP JP60140141A patent/JPS6211146A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6211146A (ja) | 1987-01-20 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
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| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| R371 | Transfer withdrawn |
Free format text: JAPANESE INTERMEDIATE CODE: R371 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |