JPH0363817B2 - - Google Patents

Info

Publication number
JPH0363817B2
JPH0363817B2 JP15187785A JP15187785A JPH0363817B2 JP H0363817 B2 JPH0363817 B2 JP H0363817B2 JP 15187785 A JP15187785 A JP 15187785A JP 15187785 A JP15187785 A JP 15187785A JP H0363817 B2 JPH0363817 B2 JP H0363817B2
Authority
JP
Japan
Prior art keywords
wafer
foreign matter
offset angle
foreign
rotation stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15187785A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6213044A (ja
Inventor
Toshiaki Yanai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP15187785A priority Critical patent/JPS6213044A/ja
Publication of JPS6213044A publication Critical patent/JPS6213044A/ja
Publication of JPH0363817B2 publication Critical patent/JPH0363817B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP15187785A 1985-07-10 1985-07-10 ウエハ異物検査装置 Granted JPS6213044A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15187785A JPS6213044A (ja) 1985-07-10 1985-07-10 ウエハ異物検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15187785A JPS6213044A (ja) 1985-07-10 1985-07-10 ウエハ異物検査装置

Publications (2)

Publication Number Publication Date
JPS6213044A JPS6213044A (ja) 1987-01-21
JPH0363817B2 true JPH0363817B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-10-02

Family

ID=15528155

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15187785A Granted JPS6213044A (ja) 1985-07-10 1985-07-10 ウエハ異物検査装置

Country Status (1)

Country Link
JP (1) JPS6213044A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS6213044A (ja) 1987-01-21

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