JPH0373984B2 - - Google Patents
Info
- Publication number
- JPH0373984B2 JPH0373984B2 JP58164107A JP16410783A JPH0373984B2 JP H0373984 B2 JPH0373984 B2 JP H0373984B2 JP 58164107 A JP58164107 A JP 58164107A JP 16410783 A JP16410783 A JP 16410783A JP H0373984 B2 JPH0373984 B2 JP H0373984B2
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- mercury lamp
- columnar
- arc type
- type mercury
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007789 sealing Methods 0.000 claims description 27
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 26
- 229910052753 mercury Inorganic materials 0.000 claims description 26
- 239000004065 semiconductor Substances 0.000 claims description 17
- 230000017525 heat dissipation Effects 0.000 claims description 12
- 230000003287 optical effect Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Discharge Lamp (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58164107A JPS6056346A (ja) | 1983-09-08 | 1983-09-08 | 半導体露光装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58164107A JPS6056346A (ja) | 1983-09-08 | 1983-09-08 | 半導体露光装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6056346A JPS6056346A (ja) | 1985-04-01 |
| JPH0373984B2 true JPH0373984B2 (https=) | 1991-11-25 |
Family
ID=15786887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58164107A Granted JPS6056346A (ja) | 1983-09-08 | 1983-09-08 | 半導体露光装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6056346A (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02304857A (ja) * | 1989-05-19 | 1990-12-18 | Ushio Inc | ショートアーク型高圧水銀蒸気ランプ |
| JPH03225742A (ja) * | 1990-01-30 | 1991-10-04 | Ushio Inc | ショートアーク放電灯 |
| JP3298453B2 (ja) * | 1997-03-18 | 2002-07-02 | ウシオ電機株式会社 | ショートアーク型放電ランプ |
-
1983
- 1983-09-08 JP JP58164107A patent/JPS6056346A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6056346A (ja) | 1985-04-01 |
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