JPS6056346A - 半導体露光装置 - Google Patents

半導体露光装置

Info

Publication number
JPS6056346A
JPS6056346A JP58164107A JP16410783A JPS6056346A JP S6056346 A JPS6056346 A JP S6056346A JP 58164107 A JP58164107 A JP 58164107A JP 16410783 A JP16410783 A JP 16410783A JP S6056346 A JPS6056346 A JP S6056346A
Authority
JP
Japan
Prior art keywords
cathode
sealing
outer diameter
cone
arc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58164107A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0373984B2 (https=
Inventor
Takehiro Kira
健裕 吉良
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Ushio Inc
Original Assignee
Ushio Denki KK
Ushio Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK, Ushio Inc filed Critical Ushio Denki KK
Priority to JP58164107A priority Critical patent/JPS6056346A/ja
Publication of JPS6056346A publication Critical patent/JPS6056346A/ja
Publication of JPH0373984B2 publication Critical patent/JPH0373984B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/073—Main electrodes for high-pressure discharge lamps
    • H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Discharge Lamp (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP58164107A 1983-09-08 1983-09-08 半導体露光装置 Granted JPS6056346A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58164107A JPS6056346A (ja) 1983-09-08 1983-09-08 半導体露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58164107A JPS6056346A (ja) 1983-09-08 1983-09-08 半導体露光装置

Publications (2)

Publication Number Publication Date
JPS6056346A true JPS6056346A (ja) 1985-04-01
JPH0373984B2 JPH0373984B2 (https=) 1991-11-25

Family

ID=15786887

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58164107A Granted JPS6056346A (ja) 1983-09-08 1983-09-08 半導体露光装置

Country Status (1)

Country Link
JP (1) JPS6056346A (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02304857A (ja) * 1989-05-19 1990-12-18 Ushio Inc ショートアーク型高圧水銀蒸気ランプ
JPH03225742A (ja) * 1990-01-30 1991-10-04 Ushio Inc ショートアーク放電灯
JPH10261383A (ja) * 1997-03-18 1998-09-29 Ushio Inc ショートアーク型放電ランプ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02304857A (ja) * 1989-05-19 1990-12-18 Ushio Inc ショートアーク型高圧水銀蒸気ランプ
JPH03225742A (ja) * 1990-01-30 1991-10-04 Ushio Inc ショートアーク放電灯
JPH10261383A (ja) * 1997-03-18 1998-09-29 Ushio Inc ショートアーク型放電ランプ

Also Published As

Publication number Publication date
JPH0373984B2 (https=) 1991-11-25

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