JPH037389Y2 - - Google Patents
Info
- Publication number
- JPH037389Y2 JPH037389Y2 JP9157684U JP9157684U JPH037389Y2 JP H037389 Y2 JPH037389 Y2 JP H037389Y2 JP 9157684 U JP9157684 U JP 9157684U JP 9157684 U JP9157684 U JP 9157684U JP H037389 Y2 JPH037389 Y2 JP H037389Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- disk
- movable plate
- opening
- guide rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 18
- 230000008020 evaporation Effects 0.000 claims description 16
- 238000001704 evaporation Methods 0.000 claims description 16
- 239000010409 thin film Substances 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 239000010408 film Substances 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9157684U JPS617568U (ja) | 1984-06-21 | 1984-06-21 | 真空処理装置に於ける基板移動装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9157684U JPS617568U (ja) | 1984-06-21 | 1984-06-21 | 真空処理装置に於ける基板移動装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS617568U JPS617568U (ja) | 1986-01-17 |
| JPH037389Y2 true JPH037389Y2 (enrdf_load_stackoverflow) | 1991-02-25 |
Family
ID=30647587
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9157684U Granted JPS617568U (ja) | 1984-06-21 | 1984-06-21 | 真空処理装置に於ける基板移動装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS617568U (enrdf_load_stackoverflow) |
-
1984
- 1984-06-21 JP JP9157684U patent/JPS617568U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS617568U (ja) | 1986-01-17 |
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