JPS617568U - 真空処理装置に於ける基板移動装置 - Google Patents

真空処理装置に於ける基板移動装置

Info

Publication number
JPS617568U
JPS617568U JP9157684U JP9157684U JPS617568U JP S617568 U JPS617568 U JP S617568U JP 9157684 U JP9157684 U JP 9157684U JP 9157684 U JP9157684 U JP 9157684U JP S617568 U JPS617568 U JP S617568U
Authority
JP
Japan
Prior art keywords
substrate
vacuum processing
opening
movable plate
processing equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9157684U
Other languages
English (en)
Japanese (ja)
Other versions
JPH037389Y2 (enrdf_load_stackoverflow
Inventor
洋一 加藤
Original Assignee
日本真空技術株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP9157684U priority Critical patent/JPS617568U/ja
Publication of JPS617568U publication Critical patent/JPS617568U/ja
Application granted granted Critical
Publication of JPH037389Y2 publication Critical patent/JPH037389Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9157684U 1984-06-21 1984-06-21 真空処理装置に於ける基板移動装置 Granted JPS617568U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9157684U JPS617568U (ja) 1984-06-21 1984-06-21 真空処理装置に於ける基板移動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9157684U JPS617568U (ja) 1984-06-21 1984-06-21 真空処理装置に於ける基板移動装置

Publications (2)

Publication Number Publication Date
JPS617568U true JPS617568U (ja) 1986-01-17
JPH037389Y2 JPH037389Y2 (enrdf_load_stackoverflow) 1991-02-25

Family

ID=30647587

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9157684U Granted JPS617568U (ja) 1984-06-21 1984-06-21 真空処理装置に於ける基板移動装置

Country Status (1)

Country Link
JP (1) JPS617568U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH037389Y2 (enrdf_load_stackoverflow) 1991-02-25

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