JPS617568U - Substrate moving device in vacuum processing equipment - Google Patents
Substrate moving device in vacuum processing equipmentInfo
- Publication number
- JPS617568U JPS617568U JP9157684U JP9157684U JPS617568U JP S617568 U JPS617568 U JP S617568U JP 9157684 U JP9157684 U JP 9157684U JP 9157684 U JP9157684 U JP 9157684U JP S617568 U JPS617568 U JP S617568U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- vacuum processing
- opening
- movable plate
- processing equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の実施例の截断側面図、第２図はその平
面図、第３図は第２図の正面図、第４図は第２図のＩＶ
−ＴＶ線部分の截断面図である。
１・・・真空室、２・・・蒸発源、３・・・基板、４・
・・ディスク、５！・・室内、６・・・開口、７・・・
移動板、８・・・案内杆。Fig. 1 is a cutaway side view of an embodiment of the present invention, Fig. 2 is a plan view thereof, Fig. 3 is a front view of Fig. 2, and Fig. 4 is an IV of Fig. 2.
- It is a sectional view of a TV line part. DESCRIPTION OF SYMBOLS 1... Vacuum chamber, 2... Evaporation source, 3... Substrate, 4...
...Disc, 5! ...Indoor, 6...Opening, 7...
Moving board, 8... guide rod.
Claims (1)
対向して基板３を取付けたディスク４を回転自在に設け
、該基板３上に各蒸発源２からの蒸発物質が混合した合
金その他の薄膜を形成するようにしたものに於いて、該
真空室１にその室内５と外部を連通ずる開口６を形成し
てその外側に移動自在で且つ該開口６を密閉自在の移動
板７を設け、該移動板７に、該室内５へ延びる案内杆８
と該移動板７を挿通し且つ該案内杆８と該移動板７を挿
通し且つ該案内杆８により案内された進出自在のディス
ク４の回転軸９を設けて成る真空処理装置に於ける基板
移動装置。A plurality of evaporation sources 2 are provided in the vacuum chamber 1, and a disk 4 with a substrate 3 attached thereto is rotatably provided opposite to the evaporation sources 2, and an alloy in which evaporation substances from each evaporation source 2 are mixed is placed on the substrate 3. In another type of thin film forming device, an opening 6 is formed in the vacuum chamber 1 to communicate the interior 5 with the outside, and a movable plate 7 is movable to the outside of the opening 6 and can seal the opening 6. A guide rod 8 is provided on the movable plate 7 and extends into the interior 5.
A substrate in a vacuum processing apparatus comprising: a rotary shaft 9 for a disk 4 which is inserted through the movable plate 7, and which is guided by the guide rod 8; Mobile device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9157684U JPS617568U (en) | 1984-06-21 | 1984-06-21 | Substrate moving device in vacuum processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9157684U JPS617568U (en) | 1984-06-21 | 1984-06-21 | Substrate moving device in vacuum processing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS617568U true JPS617568U (en) | 1986-01-17 |
| JPH037389Y2 JPH037389Y2 (en) | 1991-02-25 |
Family
ID=30647587
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9157684U Granted JPS617568U (en) | 1984-06-21 | 1984-06-21 | Substrate moving device in vacuum processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS617568U (en) |
-
1984
- 1984-06-21 JP JP9157684U patent/JPS617568U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH037389Y2 (en) | 1991-02-25 |
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